The present invention provides a piezoelectric material which has excellent insulating and piezoelectric properties and which contains no lead and potassium and also provides a piezoelectric element and a multilayered piezoelectric element each using the above piezoelectric material. The piezoelectric material is a perovskite-type metal oxide represented by the following general formula (1).
(1x){(Na.sub.yBa.sub.1-z)(Nb.sub.7Ti.sub.1-z)O.sub.3}-xBiFeO.sub.3(1)
In the formula, 0<x0.015, 0.80y0.95, 0.85z0.95 are satisfied.

Articles and methods in which an electric field is used to actuate a material are generally described. Provided in one embodiment is a method including applying an electric field to a ceramic material. Applying the electric field to the ceramic material can transform the ceramic material from a first solid phase to a second distinct solid phase. The applied electric field is less than a breakdown electric field of the ceramic material, according to certain embodiments.

A non-contact deposition system comprises a jetting assembly including at least one micro-valve. The micro-valve includes an orifice plate defining an orifice therethrough. An actuating beam disposed in a spaced relationship to the orifice plate. The actuating beam including a base portion and a cantilevered portion extending from the base portion towards the orifice and is movable between a closed position and an open position. A sealing structure comprising a sealing member is disposed at the overlapping portion of the cantilevered portion. A fluid manifold is coupled to the micro-valve and defines a fluid reservoir containing a pressurized fluid. When the actuating beam is in the closed position, the cantilevered portion is positioned such that the sealing structure seals the orifice so as to close the micro-valve, and in the open position, the fluid is dispensed from the orifice towards a substrate and deposited thereon.

A drive unit for driving a passive element relative to an active element, includes a resonator, an excitation unit, and two arms with contact elements that are movable by way of oscillating movements and thereby drive the passive element. The resonator is attached to a base element via fixation elements. For at least a first arm and for its contact element there is a shortest path through the active element to a nearest fixation element. The shortest path does not intersect an outline of the excitation unit, or, of it does, the area of an overhanging portion of the excitation unit is less than ten percent of an area of the excitation unit. As a result, the excitation unit is less likely to break due to forces on the arms.