A multi-degree-of-freedom sample holder, comprising a housing and a rotating shaft, is disclosed. A frame is provided between the housing and the rotating shaft, and the frame is coaxial with the housing and rotating shaft. The present invention has multiple degrees of freedom such as high-precision translational freedom of the sample along the X-axis, Y-axis and Z-axis, and 360° rotation of the sample around the axis, etc. The sample is always aligned with the sample holder shaft during the rotation, and the static electricity accumulated on the sample can be led out.

A piezoelectric driving device includes a supporting section, a first moving section movable in a first direction relative to the supporting section, a second moving section movable in a second direction relative to the first moving section, a first driving section configured to drive a first piezoelectric actuator to move the first moving section relative to the supporting section and stop the first piezoelectric actuator to hold the first moving section on the supporting section, and a second driving section configured to drive a second piezoelectric actuator to move the second moving section relative to the first moving section and stop the second piezoelectric actuator to hold the second moving section on the first moving section. A first holding force for holding the first moving section on the supporting section and a second holding force for holding the second moving section on the first moving section are different from each other.

A first member, a second member, a bearing that rotatably supports the second member about a rotation axis relative to the first member, a driven member placed on the first member, and a plurality of piezoelectric actuators that transmit driving forces for rotating the second member about the rotation axis relative to the first member to the driven member are provided, and the piezoelectric actuators are supported by the second member while being pressed against the first member or the member fixed thereto, and, as seen from a direction along the rotation axis, a center of pressing forces from the plurality of piezoelectric actuators to the driven member is located inside of an outer circumferential part of the bearing.

An optical element driving mechanism has an optical axis and includes a fixed portion, a movable portion, and a driving assembly. The movable portion is movable relative to the fixed portion. The driving assembly drives the movable portion to move relative to the fixed portion. The driving assembly moves in a first direction to move the movable portion in a second direction, wherein the first direction is different from the second direction.

A positioning apparatus comprises a base element provided for fastening to a robot, a base movably supported at the base element, and a piezoactuator by which the base is movable in a direction relative to the base element. A second piezoactuator is provided by which a counterweight is simultaneously movable in an opposite direction.

The disclosure relates to a drive means for non-resonant linear and/or rotary positioning of an object, comprising at least two piezoelectric or electrostrictive actuator groups, where-in a first actuator group moves a first runner portion relative to a stationary base of the drive means according to the principle of an inertia drive, and by means of the second actuator group a second runner portion is moved relative to the first runner portion with a limited range of movement in the high-resolution scan mode, wherein a common electrical control signal is applied to the first and second actuator groups.

A positioning device includes a chassis, a plate to be positioned, wherein it further comprises a motor comprising a stator which is connected to the chassis and a rotor, a shaft which is connected to the rotor driven by the motor, which is mobile in rotation relative to the chassis in a first direction and in a second direction opposing the first direction, a first element for the transmission of rotational movement which is configured to be driven in rotation by the shaft in the first direction and to be free in the second direction, a second element for the transmission of rotational movement which is configured to be driven in rotation by the shaft in the second direction and to be free in the first direction, a first connecting rod which is connected to the plate by a first pivot connection and which is connected to the first element for the transmission of rotational movement by a second pivot connection which is offset to the axis of rotation of the first element for the transmission of rotational movement, a second connecting rod which is connected to the plate by a third pivot connection and which is connected to the second element for the transmission of rotational movement by a fourth pivot connection which is offset to the axis of rotation of the second element for the transmission of rotational movement, a connecting element having at least two degrees of rotational freedom between the plate and the chassis.

An optical element driving mechanism has an optical axis and includes a fixed portion, a movable portion, and a driving assembly. The movable portion is movable relative to the fixed portion. The driving assembly drives the movable portion to move relative to the fixed portion. The driving assembly moves in a first direction to move the movable portion in a second direction, wherein the first direction is different from the second direction.

A lead screw actuator device includes a base configured to support a plurality of actuators. A first bridge is supported by one of the plurality of actuators and a second bridge is supported by another one of the plurality of actuators. A nut is supported by the first bridge and the second bridge and is rotatably coupled to a screw with a sliding contact friction between the screw and the nut. The plurality of actuators generate small movements of the first bridge, the second bridge, and the nut that produce relative rotation between the nut and the screw. A method of making a lead screw actuator device is also disclosed.

A piezoelectric drive unit is configured for driving a passive element relative to an active element, wherein the active element includes a resonator with two arms, each extending in parallel to a reference plane and ending in a contact element, which is movable by oscillating movements of the arms and thereby drives the passive element. A pre-stress element is arranged to exert a relative force between the active element and passive element, pressing them against one another with pre-stress forces that are normal to the reference plane.