A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member. A plurality of openings within a surface of the resonant member are disposed more densely within the first region than the second region and at least partly filled with a compensating material that reduces temperature dependence of the resonant frequency corresponding to the mechanical resonance mode.

A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member. A plurality of openings within a surface of the resonant member are disposed more densely within the first region than the second region and at least partly filled with a compensating material that reduces temperature dependence of the resonant frequency corresponding to the mechanical resonance mode.

An oscillator control system includes an non-linear oscillator structure configured to oscillate about an axis; a driver circuit configured to generate a driving signal to drive the oscillator structure; a detection circuit configured to measure an angle amplitude and a phase error of the oscillator structure; an amplitude controller configured to generate a reference oscillator period based on the measured angle amplitude; a period and phase controller configured to receive the reference oscillator period and the measured phase error from the detection circuit, generate at least one control parameter of the driving signal based on the reference oscillator period and the measured phase error, and determine a driving period of the driving signal based on the reference oscillator period and the measured phase error. The driver circuit is configured to generate the driving signal based on the at least one control parameter and the driving period.

An aspect of the present disclosure concerns an oscillator circuit including a driver circuit that includes a first amplifier and a current detector where the first amplifier produces an oscillation voltage signal, where the current detector detects an oscillation current signal and produces a drive voltage signal, and where the oscillation current signal corresponds to difference in voltage between the oscillation voltage signal and the drive voltage signal; a feedback circuit that includes a second amplifier receiving the oscillation voltage signal and the drive voltage signal, to produce a feedback voltage signal to the driver circuit; and an oscillator that oscillates at a frequency determined in accordance with the drive voltage signal.

Systems and methods are provided for compensating for mechanical acceleration at a reference oscillator. A reference oscillator provides an oscillator output signal and an accelerometer on a same platform as the reference oscillator, such that mechanical acceleration at the reference oscillator is detected at the accelerometer to produce a measured acceleration. A filter assembly, having an associated set of filter weights, receives the measured acceleration from the accelerometer and provides a tuning control signal responsive to the measured acceleration to a frequency reference associated with the system. An adaptive weighting component receives the oscillator output signal of the reference oscillator and an external signal that is provided from a source external to the platform and adjusts the set of filter weights for the filter assembly based on a comparison of the external signal and the oscillator output signal.

Systems and methods are provided for compensating for mechanical acceleration at a reference oscillator. A reference oscillator provides an oscillator output signal and an accelerometer on a same platform as the reference oscillator, such that mechanical acceleration at the reference oscillator is detected at the accelerometer to produce a measured acceleration. A filter assembly, having an associated set of filter weights, receives the measured acceleration from the accelerometer and provides a tuning control signal responsive to the measured acceleration to a frequency reference associated with the system. An adaptive weighting component receives the oscillator output signal of the reference oscillator and an external signal that is provided from a source external to the platform and adjusts the set of filter weights for the filter assembly based on a comparison of the external signal and the oscillator output signal.

An oscillator circuit includes: two charge and discharge circuits, a reference voltage switching module, two comparators and a logic control module. When an output of either of the comparators transitions, the logic control module controls one charge and discharge circuit connected to the comparator to discharge, and controls the other charge and discharge circuit to charge, and controls the reference voltage switching module to switch a reference voltage of the comparator to a second voltage. When the output of the comparator transitions again, the logic control module controls the one charge and discharge circuit to charge. When the output of the comparator transitions again, the logic control module controls the reference voltage switching module to switch the reference voltage of the comparator to a first voltage, and controls one charge and discharge circuit to stop charging.

Systems, methods, and devices of the present disclosure relate, generally, to compensating for frequency error of a reference signal supplied to a clock-tracking-loop due to temperature. Error characteristics of a crystal oscillator that supplies the reference signal are used to compensate for possible frequency errors. Other systems, methods and devices are disclosed.

Systems, methods, and devices of the present disclosure relate, generally, to compensating for frequency error of a reference signal supplied to a clock-tracking-loop due to temperature. Error characteristics of a crystal oscillator that supplies the reference signal are used to compensate for possible frequency errors. Other systems, methods and devices are disclosed.

An oscillator includes: a base substrate having a first electrode; a temperature control element mounted on the base substrate and having a first pad electrically coupled to the first electrode; a resonator element having a first major surface and a second major surface in front-back relation with the first major surface, and mounted on the temperature control element in such a way that the second major surface faces the temperature control element; and at least one first bonding wire coupling the first major surface and the first pad together.