A gallium arsenide (GaAs) radio frequency (RF) circuit is disclosed. The GaAs RF circuit includes a power amplifier and a low noise amplifier; a first transmit/receive (TR) switch, coupled to the power amplifier and the low noise amplifier, wherein the first TR switch is fabricated by a pHEMT (Pseudomorphic High Electron Mobility Transistor) process; and a first active phase shifter, coupled to the power amplifier or the low noise amplifier, wherein the first active phase shifter is fabricated by an HBT (Heterojunction Bipolar Transistor) process; wherein the GaAs RF circuit is formed within a GaAs die.

Preventing RF signal distortion and signal error producing memory events in a Radio Frequency (RF) power amplifier (RFPA). An element, disposed prior to the Radio Frequency (RF) power amplifier (RFPA) in a signal path of a RF signal input to the RFPA, may enforce a maximum allowable amplitude in a high PAPR instantaneous high peak of the RF signal. An element may also increase or supplement a bias of the Radio Frequency (RF) power amplifier (RFPA) when a high PAPR instantaneous high peak is detected in the RF signal prior to receipt by the RFPA. Additionally, a first element operable detects when an instantaneous output voltage of the Radio Frequency (RF) power amplifier (RFPA) is below a predetermined voltage, and in response, a second element supplies additional current to prevent the output voltage of the RFPA from falling below a predetermined threshold voltage.

Embodiments are described herein for power generation systems and methods that use quadrature splitters and combiners to facilitate plasma stability and control. For one embodiment, a quadrature splitter receives an input signal and generates a first and second signals as outputs with the second signal being ninety degrees out of phase with respect to the first signal. Two amplifiers then generate a first and second amplified signals. A quadrature combiner receives the first and second amplified signals and generates a combined amplified signal that represents re-aligned versions of the first and second amplified signals. The power amplifiers can be combined into a system to generate a high power output to a processing chamber. Further, detectors can generate measurements used to monitor and control power generation. The power amplifiers, system, and methods provide significant advantages for high-power generation delivered to process chambers for plasma generation during plasma processing.

An impedance converter includes an insulating layer; a first wire provided on a first surface of the insulating layer and extending in a first direction; a second wire provided on a second surface of the insulating layer and extending in the first direction and face the first wire, the second surface being located on a side opposite to the first surface; a third wire provided on the first surface and extending in a second direction orthogonal to the first direction; a fourth wire provided on the second surface and extending in the second direction and face the third wire; a fifth wire provided on the first surface and extending in the second direction; and a sixth wire provided on the second surface and extending in the second direction and face the fifth wire.

A power amplifier includes a 3-dB coupler which splits a first signal into a second signal and a third signal lagging behind the second signal by 90°, a carrier amplifier, a peak amplifier, and a hybrid coupler. The carrier amplifier amplifies the second signal and outputs a fourth signal when the first-signal power level is a first level or higher. The peak amplifier amplifies the third signal and outputs a fifth signal when the first-signal power level is a second level or higher, which is higher than the first level. The hybrid coupler includes a first transmission line receiving the fourth signal at its first terminal, and a second transmission line receiving the fifth signal at its first terminal and being open at its second terminal. The first transmission line outputs, from its second terminal, an amplified first signal obtained by combining the fourth and fifth signals.

A hybrid coupler-based T/R switch for use in a TDM system. An output hybrid coupler of a balanced amplifier is used to selectively switch a transmit or receive path to an antenna. During transmission, power at the output of the balanced amplifier is delivered directly to the antenna. During reception, power from the antenna is reflected through ports of the hybrid coupler connected to respective two amplifiers of the balanced amplifier, to constructively combine at a port of the coupler coupled to the receive path, with a ninety degrees phase shift. A pair of shunting switches or series switches coupled to the ports of the hybrid coupler connected to the two amplifiers, and a shunting switch coupled to the port coupled to the receive path, control operation of the hybrid coupler-based T/R switch. An additional switch coupled to the port of the coupler that is coupled to the receive path can provide a bypass path for reception or transmission through the antenna while bypassing the balanced amplifier of the transmit path and an amplifier of the receive path.

A radio frequency (RF) front end for wireless communications, in particular for use in a half duplex (HD) and/or full duplex (FD) transceiver. The RF front end is based on a quadrature balanced power amplifier (QBPA). The RF front end includes an antenna port for outputting a transmit signal to and receiving a receive signal from an antenna, and a receive port for outputting the receive signal to a signal processing section. Further, the QBPA is configured to receive a transmit input signal at a first port, receive a cancellation input signal at a fourth port, and receive the receive signal at a second port coupled to the antenna port.

A sequenced transmit muting wideband power amplifier is provided that includes at least one pre-driver stage having at least a first pre-driver and a second pre-driver. A mute switch selectively establishes a communication path between the first and second pre-drivers or couples the second pre-driver to a termination resistor. A pre-driver switch selectively activates/deactivates the first and second pre-drivers. A driver stage is in communication with the pre-driver stage and includes a first driver. A final amplifier stage is in communication with the driver stage and includes at least one second driver. At least one S-NBS switch is configured to selectively activate/deactivate the first driver and second driver. A controller is configured to activate the at least one pre-driver switch, the mute switch, the at least one S-NBS switch to selectively place the amplifier in one of a transmit mode and a mute mode.

Embodiments of the disclosure generally relate to a multi-channel Doherty power amplifier, a multi-antenna transmitter, and a method for turning on the multi-channel Doherty amplifier. The multi-channel Doherty power amplifier includes: multiple input ports and the same number of output ports corresponding to multiple channels, the multiple channels having the same characteristics for radio signal amplification and transmission; multiple private peaking amplifiers corresponding to the multiple channels; and a common Doherty core shared by the multiple private peaking amplifiers. The multiple private peaking amplifiers and the common Doherty core are configured to amplify identical multi-channel signal for multiple inputs and multiple outputs, thus higher saving ratio and better channel performance (output power, linearity, efficiency, power gain etc.) consistency would be greatly improved.

An average power tracking (APT) power amplifier apparatus is provided. In a non-limiting example, the APT power amplifier apparatus includes multiple sets of power amplifier circuits configured to amplify a radio frequency (RF) signal(s) for transmission in different polarizations (e.g., vertical and horizontal). In examples disclosed herein, the APT power amplifier apparatus can be configured to employ a single power management integrated circuit (PMIC) to provide an APT voltage to all of the power amplifier circuits for amplifying the RF signal(s). By employing a single PMIC in the APT power amplifier apparatus, it is possible to reduce footprint, power consumption, and costs of the APT power amplifier apparatus.