H03H9/22

Quartz MEMS piezoelectric resonator for chipscale RF antennae

A RF antenna having a magnetostrictive film may be made by patterning selected portions of a top surface of the quartz wafer for deposition of electrode metal and deposition of the magnetostrictive film and depositing the electrode metal and the magnetostrictive film; temporarily bonding the quartz wafer to a handle wafer; thinning the quartz wafer to a desired thickness; etching the quartz wafer to define the outlines of at least one quartz resonator bearing the electrode metal and the magnetostrictive film; patterning selected portions of a bottom surface the at least one quartz resonator for deposition of electrode metal and at least one bond pad and depositing the electrode metal and the at least one bond pad; bonding the at least one quartz resonator to a substrate wafer; and releasing the at least one quartz resonator from the handle wafer.

Quartz MEMS Piezoelectric Resonator for Chipscale RF Antennae
20250062744 · 2025-02-20 · ·

A RF antenna comprises a quartz resonator having electrodes disposed thereon with a magnetostrictive film disposed on the quartz resonator either on, partially under or adjacent at least one of the electrodes. A RF antenna having a magnetostrictive film may be made by patterning selected portions of a top surface of the quartz wafer for deposition of electrode metal and deposition of the magnetostrictive film and depositing the electrode metal and the magnetostrictive film; temporarily bonding the quartz wafer to a handle wafer; thinning the quartz wafer to a desired thickness; etching the quartz wafer to define the outlines of at least one quartz resonator bearing the electrode metal and the magnetostrictive film; patterning selected portions of a bottom surface the at least one quartz resonator for deposition of electrode metal and at least one bond pad and depositing the electrode metal and the at least one bond pad; bonding the at least one quartz resonator to a substrate wafer; and releasing the at least one quartz resonator from the handle wafer.

System and method for cleaning of a drill bit

A system for cleaning of a drill bit, comprises a vibration generator arranged to generate vibrations in the ultrasonic frequency range in at least parts of the drill bit, and a power source connected to the vibration generator.

System and method for cleaning of a drill bit

A system for cleaning of a drill bit, comprises a vibration generator arranged to generate vibrations in the ultrasonic frequency range in at least parts of the drill bit, and a power source connected to the vibration generator.

Magnetoelectric antenna arrays

Two or more ME resonators are connected in series and in parallel generating a high sensitive, energy efficient and broadband miniature antenna and other conductor devices.

Magnetoelectric antenna arrays

Two or more ME resonators are connected in series and in parallel generating a high sensitive, energy efficient and broadband miniature antenna and other conductor devices.