A pulse generation system is disclosed. The pulse generation system includes a controller, an output terminal, and a plurality of pulse generator circuits. The controller is configured to cause a driving signal pulse to be transmitted to any selected one or more of the pulse generator circuits, and to cause the driving signal pulse to not be transmitted to any selected one or more other pulse generator circuits. Each of the pulse generator circuits is configured to generate an output voltage pulse at the output terminal in response to the driving signal pulse being transmitted thereto.

A bit sequence generator for generating a bit sequence defined by a generating function and an initial state of the generating function comprising a plurality of state machines and a multiplexer. Each state machine of the plurality of state machines generates a time-interleaved bit sequence, wherein a state machine generates a bit of the time-interleaved bit sequence for a current time step based on at least one bit generated by the state machine for a preceding time step, the generating function of the bit sequence to be generated, and the initial state of the generating function and independent from a time-interleaved bit sequence generated by another state machine of the plurality of state machines. Further, a multiplexer selects successively one bit from each generated time-interleaved bit sequence in a repetitive manner to obtain the bit sequence defined by the generating function and the initial state of the generating function.

A bit sequence generator for generating a bit sequence defined by a generating function and an initial state of the generating function comprising a plurality of state machines and a multiplexer. Each state machine of the plurality of state machines generates a time-interleaved bit sequence, wherein a state machine generates a bit of the time-interleaved bit sequence for a current time step based on at least one bit generated by the state machine for a preceding time step, the generating function of the bit sequence to be generated, and the initial state of the generating function and independent from a time-interleaved bit sequence generated by another state machine of the plurality of state machines. Further, a multiplexer selects successively one bit from each generated time-interleaved bit sequence in a repetitive manner to obtain the bit sequence defined by the generating function and the initial state of the generating function.

The present invention relates to a circuit arrangement comprising: a bias tee having an input AC terminal comprising a bias tee capacitor, wherein the input AC terminal is adapted to receive at least one AC signal, wherein the AC signal comprises at least one of a positive pulse train signal and a negative discharge pulse signal; an input DC terminal, adapted to receive at least one bias DC signal; and an output interface, adapted to output a signal based on the received AC signal and the received bias DC signal, and a discharge circuit, adapted to discharge the bias tee capacitor.

Systems, methods and apparatus for regulating ion energies in a plasma chamber and avoiding excessive and damaging charge buildup on the substrate surface and within capacitive structures being built on the surface. An exemplary method includes placing a substrate in a plasma chamber, forming a plasma in the plasma chamber, controllably switching power to the substrate so as to apply a periodic voltage function (or a modified periodic voltage function) to the substrate, and modulating, over multiple cycles of the periodic voltage function, the periodic voltage function responsive to a defined distribution of energies of ions at the surface of the substrate so as to effectuate the defined distribution of ion energies on a time-averaged basis, and to maintain surface charge buildup below a threshold.

Systems, methods and apparatus for regulating ion energies in a plasma chamber and avoiding excessive and damaging charge buildup on the substrate surface and within capacitive structures being built on the surface. An exemplary method includes placing a substrate in a plasma chamber, forming a plasma in the plasma chamber, controllably switching power to the substrate so as to apply a periodic voltage function (or a modified periodic voltage function) to the substrate, and modulating, over multiple cycles of the periodic voltage function, the periodic voltage function responsive to a defined distribution of energies of ions at the surface of the substrate so as to effectuate the defined distribution of ion energies on a time-averaged basis, and to maintain surface charge buildup below a threshold.

A switching assembly for transferring trains of pulses includes a first and second assembly terminal, a first and second set of relays, a first and second capacitor and a controller to concurrently activate the first and second set to connect the first and the second assembly terminals to transfer the trains of pulses. The relays of the first set and the first capacitor are connected in parallel. The relays of the second set connect and the second capacitor are connected in parallel.

A broadband impulse generator includes a first delay line and a second delay line that receive an input signal and include a plurality of delay elements connected in series with each other, an oscillation signal generator that generates an oscillation signal having a certain number of pulses during a target impulse duration based on the input signal and an output signal of the first delay line, an envelope signal generator that generates a plurality of envelope signals having a delay duration with each other and having a certain voltage level during the target impulse duration, based on the input signal and an output signal of the second delay line, and an impulse signal generator that generates an impulse signal having the certain number of pulses during the target impulse duration based on the plurality of impulse signals and the oscillation signal.

A broadband impulse generator includes a first delay line and a second delay line that receive an input signal and include a plurality of delay elements connected in series with each other, an oscillation signal generator that generates an oscillation signal having a certain number of pulses during a target impulse duration based on the input signal and an output signal of the first delay line, an envelope signal generator that generates a plurality of envelope signals having a delay duration with each other and having a certain voltage level during the target impulse duration, based on the input signal and an output signal of the second delay line, and an impulse signal generator that generates an impulse signal having the certain number of pulses during the target impulse duration based on the plurality of impulse signals and the oscillation signal.

Described herein are apparatuses and methods for applying high voltage, high current, sub-microsecond (e.g., nanosecond range) pulsed output to a biological material, e.g., tissues, cells, etc., while preventing damage from load arcing. Some of the apparatuses and methods described herein may limit the load and pulsed power source current in case of load arcing significantly by using a transmission line (e.g., coaxial cable, twisted pair or parallel pair cables) between the pulsed power source and the load having a length configured to achieve this goal.