Patent classifications
H03K3/78
SIGNAL PRE-SHAPING TO SUPPRESS POWER SUPPLY DISTURBANCES
Embodiments include methods performed by an apparatus configured to generate output signals for transmission. Such methods include detecting a triggering condition related to a change in operational status of the apparatus and selecting one of a plurality of pre-shaping vectors based on the triggering condition and past operating conditions of the apparatus during a plurality of most recent time intervals. Each pre-shaping vector includes a plurality of values that compensate for effects of voltage variation of a power supply for the apparatus. Such methods include, during a plurality of time intervals after the triggering condition, applying the values of the selected pre-shaping vector to respective information-carrying signals, thereby generating pre-shaped information-carrying signals. Such methods include generating output signals for transmission during the plurality of subsequent time intervals, using the pre-shaped information-carrying signals. The output signals are generated by an active circuit powered by the power supply.
SIGNAL PRE-SHAPING TO SUPPRESS POWER SUPPLY DISTURBANCES
Embodiments include methods performed by an apparatus configured to generate output signals for transmission. Such methods include detecting a triggering condition related to a change in operational status of the apparatus and selecting one of a plurality of pre-shaping vectors based on the triggering condition and past operating conditions of the apparatus during a plurality of most recent time intervals. Each pre-shaping vector includes a plurality of values that compensate for effects of voltage variation of a power supply for the apparatus. Such methods include, during a plurality of time intervals after the triggering condition, applying the values of the selected pre-shaping vector to respective information-carrying signals, thereby generating pre-shaped information-carrying signals. Such methods include generating output signals for transmission during the plurality of subsequent time intervals, using the pre-shaped information-carrying signals. The output signals are generated by an active circuit powered by the power supply.
SURFACE CHARGE AND POWER FEEDBACK AND CONTROL USING A SWITCH MODE BIAS SYSTEM
Systems, methods and apparatus for regulating ion energies in a plasma chamber and avoiding excessive and damaging charge buildup on the substrate surface and within capacitive structures being built on the surface. An exemplary method includes placing a substrate in a plasma chamber, forming a plasma in the plasma chamber, controllably switching power to the substrate so as to apply a periodic voltage function (or a modified periodic voltage function) to the substrate, and modulating, over multiple cycles of the periodic voltage function, the periodic voltage function responsive to a defined distribution of energies of ions at the surface of the substrate so as to effectuate the defined distribution of ion energies on a time-averaged basis, and to maintain surface charge buildup below a threshold.
SURFACE CHARGE AND POWER FEEDBACK AND CONTROL USING A SWITCH MODE BIAS SYSTEM
Systems, methods and apparatus for regulating ion energies in a plasma chamber and avoiding excessive and damaging charge buildup on the substrate surface and within capacitive structures being built on the surface. An exemplary method includes placing a substrate in a plasma chamber, forming a plasma in the plasma chamber, controllably switching power to the substrate so as to apply a periodic voltage function (or a modified periodic voltage function) to the substrate, and modulating, over multiple cycles of the periodic voltage function, the periodic voltage function responsive to a defined distribution of energies of ions at the surface of the substrate so as to effectuate the defined distribution of ion energies on a time-averaged basis, and to maintain surface charge buildup below a threshold.
Signal pre-shaping to suppress power supply disturbances
Embodiments include methods performed by an apparatus configured to generate output signals for transmission. Such methods include detecting a triggering condition related to a change in operational status of the apparatus and selecting one of a plurality of pre-shaping vectors based on the triggering condition and past operating conditions of the apparatus during a plurality of most recent time intervals. Each pre-shaping vector includes a plurality of values that compensate for effects of voltage variation of a power supply for the apparatus. Such methods include, during a plurality of time intervals after the triggering condition, applying the values of the selected pre-shaping vector to respective information-carrying signals, thereby generating pre-shaped information-carrying signals. Such methods include generating output signals for transmission during the plurality of subsequent time intervals, using the pre-shaped information-carrying signals. The output signals are generated by an active circuit powered by the power supply.
Signal pre-shaping to suppress power supply disturbances
Embodiments include methods performed by an apparatus configured to generate output signals for transmission. Such methods include detecting a triggering condition related to a change in operational status of the apparatus and selecting one of a plurality of pre-shaping vectors based on the triggering condition and past operating conditions of the apparatus during a plurality of most recent time intervals. Each pre-shaping vector includes a plurality of values that compensate for effects of voltage variation of a power supply for the apparatus. Such methods include, during a plurality of time intervals after the triggering condition, applying the values of the selected pre-shaping vector to respective information-carrying signals, thereby generating pre-shaped information-carrying signals. Such methods include generating output signals for transmission during the plurality of subsequent time intervals, using the pre-shaped information-carrying signals. The output signals are generated by an active circuit powered by the power supply.
Device and method for high power-density thermionic energy conversion
Thermionic generators are described herein that include a variety of features that allow the devices to efficiently and effectively convert large amounts of thermal energy directly to electrical energy, such as in the form of currents and/or voltages. For example, the thermionic generators can be used to generate an electron beam from a thermionic emission device, and focus or shape the electron beam in such a way that allows the energy of electrons in the electron beam to be captured and converted to electrical energy.
Device and method for high power-density thermionic energy conversion
Thermionic generators are described herein that include a variety of features that allow the devices to efficiently and effectively convert large amounts of thermal energy directly to electrical energy, such as in the form of currents and/or voltages. For example, the thermionic generators can be used to generate an electron beam from a thermionic emission device, and focus or shape the electron beam in such a way that allows the energy of electrons in the electron beam to be captured and converted to electrical energy.