H03K3/80

COMB SIGNAL GENERATOR AND METHOD OF PROVIDING A PHASE AND AMPLITUDE REFERENCE

A comb signal generator that includes at least two signal sources that each provide a signal, wherein the signals provided by the at least two signal sources are shaped similarly. The comb signal generator also has a combining circuit connected with the at least two signal sources, wherein the combining circuit is configured to combine the signals provided by the at least two signal sources, thereby generating a combined signal. Further, the comb signal generator includes a clipping circuit connected with the combining circuit, wherein the clipping circuit is configured to receive and process the combined signal, thereby generating a comb signal. Further, a method of providing a phase and amplitude reference is described.

Digital sinusoid generator

A recursive digital sinusoid generator generates recursive values used in the production of a digital sinusoid output. The recursive values are generated at a first frequency. A sinusoid value generator generates replacement values at a second frequency, wherein the second frequency is less than the first frequency. The generated recursive values are periodically replaced with the generated replacement values without interrupting production of the digital sinusoid output at the first frequency. This periodic replacement effectively corrects for a finite precision error which accumulates in the recursive values over time.

Digital sinusoid generator

A recursive digital sinusoid generator generates recursive values used in the production of a digital sinusoid output. The recursive values are generated at a first frequency. A sinusoid value generator generates replacement values at a second frequency, wherein the second frequency is less than the first frequency. The generated recursive values are periodically replaced with the generated replacement values without interrupting production of the digital sinusoid output at the first frequency. This periodic replacement effectively corrects for a finite precision error which accumulates in the recursive values over time.

RF PULSING WITHIN PULSING FOR SEMICONDUCTOR RF PLASMA PROCESSING
20200335305 · 2020-10-22 ·

A system and method for generating a radio frequency (RF) waveform are described. The method includes defining a train of on-off pulses separated by an off state having no on-off pulses. The method further includes applying a multi-level pulse waveform that adjusts a magnitude of each of the on-off pulses to generate an RF waveform. The method includes sending the RF waveform to an electrode.

Isolated grounding effectiveness monitor
10725120 · 2020-07-28 · ·

A system for monitoring electrical current leakage comprises a frequency injection circuit, one or more devices, and a microprocessor. The frequency injection circuit includes an electronic oscillator providing an electrical signal to a first side of an isolation barrier. The devices are located on a second side of the isolation barrier. The microprocessor samples the electrical signal and identifies deviations in the sampled electrical signal exceeding a predetermined threshold caused by the one or more devices. The microprocessor further generates one or more alert messages based on the identified deviations in the electrical signal.

Isolated grounding effectiveness monitor
10725120 · 2020-07-28 · ·

A system for monitoring electrical current leakage comprises a frequency injection circuit, one or more devices, and a microprocessor. The frequency injection circuit includes an electronic oscillator providing an electrical signal to a first side of an isolation barrier. The devices are located on a second side of the isolation barrier. The microprocessor samples the electrical signal and identifies deviations in the sampled electrical signal exceeding a predetermined threshold caused by the one or more devices. The microprocessor further generates one or more alert messages based on the identified deviations in the electrical signal.

DIGITAL SINUSOID GENERATOR

A recursive digital sinusoid generator generates recursive values used in the production of a digital sinusoid output. The recursive values are generated at a first frequency. A sinusoid value generator generates replacement values at a second frequency, wherein the second frequency is less than the first frequency. The generated recursive values are periodically replaced with the generated replacement values without interrupting production of the digital sinusoid output at the first frequency. This periodic replacement effectively corrects for a finite precision error which accumulates in the recursive values over time.

DIGITAL SINUSOID GENERATOR

A recursive digital sinusoid generator generates recursive values used in the production of a digital sinusoid output. The recursive values are generated at a first frequency. A sinusoid value generator generates replacement values at a second frequency, wherein the second frequency is less than the first frequency. The generated recursive values are periodically replaced with the generated replacement values without interrupting production of the digital sinusoid output at the first frequency. This periodic replacement effectively corrects for a finite precision error which accumulates in the recursive values over time.

RF generator

An RF generator includes: a modulation circuit outputting a pulsed RF signal; a variable attenuation circuit adjusting the level of the pulsed RF signal; an output power detecting unit detecting an output power value of the power output from the device; a first comparative arithmetic circuit outputting a first level control signal for controlling the level of the adjusted pulsed RF signal on the basis of a first detected voltage value and a set voltage value set in advance; a second comparative arithmetic circuit outputting a second level control signal for controlling the level of the adjusted pulsed RF signal on the basis of a second detected voltage value and the set voltage value; and a switching circuit switching between the value of the first level control signal and the value of the second level control signal depending on a switching timing setting value.

RF generator

An RF generator includes: a modulation circuit outputting a pulsed RF signal; a variable attenuation circuit adjusting the level of the pulsed RF signal; an output power detecting unit detecting an output power value of the power output from the device; a first comparative arithmetic circuit outputting a first level control signal for controlling the level of the adjusted pulsed RF signal on the basis of a first detected voltage value and a set voltage value set in advance; a second comparative arithmetic circuit outputting a second level control signal for controlling the level of the adjusted pulsed RF signal on the basis of a second detected voltage value and the set voltage value; and a switching circuit switching between the value of the first level control signal and the value of the second level control signal depending on a switching timing setting value.