Techniques are described herein for phase modulation and interpolation that support high phase modulation resolution with high linearity. Embodiments receive a digital signal that uses a sequence of K-bit digital codes to encode a sequence of instantaneous phases for phase-modulating a local oscillator signal. A fractional divider divides a reference clock into N divided clock signals at equally spaced phase intervals and selects a pair of such signals based on first designated bits of the digital code. A fractional divider-calibrated delay line generates M delayed clock signals at equally spaced phase intervals between the selected pair of divided clock signals, and selects a pair of the delayed clock signals based on second designated bits of the digital code. A digital controlled edge interpolator generates a delayed local oscillator output signal by interpolating between the selected pair of delayed clock signals based on third designated bits of the digital code.

A direct drive circuit for providing RF power to a component of a substrate processing system includes a clock generator to generate a clock signal at a first frequency, a gate driver to receive the clock signal and a half bridge circuit. The half bridge circuit includes a first switch with a control terminal connected to the gate driver, a first terminal and a second terminal; a second switch with a control terminal connected to the gate driver, a first terminal connected to the second terminal of the first switch and an output node, and a second terminal; a first DC supply to supply a first voltage potential to the first terminal of the first switch; and a second DC supply to supply a second voltage potential to the second terminal of the second switch. The first voltage potential and the second voltage potential have opposite polarity and are approximately equal in magnitude.

A direct drive circuit for providing RF power to a component of a substrate processing system includes a clock generator to generate a clock signal at a first frequency, a gate driver to receive the clock signal and a half bridge circuit. The half bridge circuit includes a first switch with a control terminal connected to the gate driver, a first terminal and a second terminal; a second switch with a control terminal connected to the gate driver, a first terminal connected to the second terminal of the first switch and an output node, and a second terminal; a first DC supply to supply a first voltage potential to the first terminal of the first switch; and a second DC supply to supply a second voltage potential to the second terminal of the second switch. The first voltage potential and the second voltage potential have opposite polarity and are approximately equal in magnitude.

A system, method, and apparatus for continuous seed laser pulses supplied to a CW pumped pre-amplifier and/or power-amplifier chain comprises an optical modulator configured to impress pulse signals on an optical signal, a waveform generator configured to establish a structure of the optical signal, and a keep-alive circuit that generates a continuous electrical pulse pattern provided to the optical modulator, wherein the system provides a continuous seed laser pulse structure.

According to one embodiment, an electronic circuitry includes a clock generation circuit configured to generate a first clock signal; a first conversion circuit configured to convert an input signal into a first signal having a frequency corresponding to the first clock signal based on the first clock signal; a first electromagnetic field coupler configured to transmit the first signal by electromagnetic field coupling; a second electromagnetic field coupler configured to transmit the first clock signal by electromagnetic field coupling; and a second conversion circuit configured to convert the first signal transmitted by the first electromagnetic field coupler into a second signal having a frequency corresponding to the input signal, based on the first clock signal transmitted by the second electromagnetic field coupler.

An oscillator circuit (100) comprises a first tank circuit (T1) comprising an inductive element (L) and a capacitive element (C) coupled in series between a first voltage rail (14) and a first drive node (12). A feedback stage (F) is coupled to a first tank output (13) of the first tank circuit (T1) and to the first drive node (12). The feedback stage (F) is arranged to generate, responsive to a first oscillating tank voltage present at the first tank output (13), a first oscillating drive signal at the first drive node (12) in-phase with a first oscillating tank current flowing in the inductive element (L) and the capacitive element (C), thereby causing the oscillator (100) to oscillate in a series resonance mode of the inductive element (L) and the capacitive element (C).

The present disclosure provides a comparator, an integrated circuit, and a method. One form of the comparator includes: a first mirror unit, configured to output a dynamic current to an input unit and adjust a value of the dynamic current based on a received feedback current; a second mirror unit, configured to output a fixed current to the input unit; the input unit, configured to output a first current to a feedback unit and a second current to an output unit based on a difference between a first voltage and a second voltage, the fixed current, and the dynamic current; the feedback unit, configured to output a feedback current to the first mirror unit after receiving the first current; and the output unit, configured to: obtain the second current or a mirror current of the adjusted dynamic current, output a first comparison result in response to the second current when the first voltage is greater than the second voltage, and output a second comparison result in response to the mirror current when the first voltage is less than the second voltage. The comparator can improve a comparison speed.

An electronic circuit including: a differential multiplier circuit with a first differential input and a second differential input and a differential output; and a phase locked loop (PLL) circuit including: (1) a balanced differential mixer circuit with a first differential input electrically connected to the differential output of the differential multiplier circuit, a second differential input, and an output; (2) a loop filter having an output and an input electrically connected to the output of the balanced differential mixer circuit; and (3) a voltage controlled oscillator (VCO) circuit having an input electrically connected to the output of the loop filter and with an output electrically feeding back to the second differential input of the balanced differential mixer circuit.

An RF frontend IC device includes an RF transceiver to transmit and receive RF signals and a frequency synthesizer to perform frequency synthetization to operate within a predetermined frequency band. The frequency synthesizer generates an LO signal to the RF transceiver to enable the RF transceiver to transmit and receive RF signals within the predetermined frequency band. The frequency synthesizer includes a QPG circuit to generate signals shifted in phases based on the LO signal and a phase shifting circuit to generate quadrant signals based on the signals shifted in phases. Each of the quadrant signals corresponds to one of the four quadrants in phases in the respective quadrant spaces. The phase shifting circuit includes multiple phase switches operable in a collaboration manner to further shift in phase based on the signal shifted in phases to generate the quadrant signals in proper quadrant spaces.

Methods, apparatus, systems and articles of manufacture are disclosed to provide phase imbalance correction. An example system includes a phase detector to obtain a first signal and generate a first output, a comparator coupled to the phase detector, the comparator to generate a second output based on the first output, and an amplifier coupled to the comparator, the amplifier to adjust a first phase response of the first signal based on the second output.