An arrangement for light sheet microscopy that includes a means for scanning a sample volume with a light sheet, which includes an angle ??90? with the optical axis of an objective. The light sheet passes through the entire sample volume in the propagation direction, and the depth of field S.sub.obj of the objective is less than the optical-axis depth T of this sample volume. An optical device, disposed downstream of the objective, increases the depth of field S.sub.obj to a depth of field S.sub.eff?the depth T of this sample volume. The arrangement also includes a means for positioning the sample volume within the region of the depth of field S.sub.eff. A spatially resolving optoelectronic area sensor is disposed downstream of the optical device, and hardware and software are provided to generate sample-volume images from the electronic image signals output by the area sensor.

An arrangement for light sheet microscopy that includes a means for scanning a sample volume with a light sheet, which includes an angle ??90? with the optical axis of an objective. The light sheet passes through the entire sample volume in the propagation direction, and the depth of field S.sub.obj of the objective is less than the optical-axis depth T of this sample volume. An optical device, disposed downstream of the objective, increases the depth of field S.sub.obj to a depth of field S.sub.eff?the depth T of this sample volume. The arrangement also includes a means for positioning the sample volume within the region of the depth of field S.sub.eff. A spatially resolving optoelectronic area sensor is disposed downstream of the optical device, and hardware and software are provided to generate sample-volume images from the electronic image signals output by the area sensor.

An optical scanning device for displaying or capturing an image is used, the device including: an optical scanning unit configured to scan emitted light while drawing a spiral trajectory, wherein the unit includes: a light guide path configured to guide incident light to output the emitted light from an emission end; and a vibration unit configured to vibrate the emission end; a light emission control unit configured to control light emission of the emitted light; a polar coordinate generation unit configured to generate a radius and a deflection angle relating to the spiral trajectory; a driving signal generation unit configured to generate a driving signal for driving the vibration unit; an angle correction unit configured to perform calculation for correcting an angle based on information from the driving signal generation unit and output an corrected angle; and a coordinate calculation unit configured to calculate coordinates of an image.

An optical scanning device for displaying or capturing an image is used, the device including: an optical scanning unit configured to scan emitted light while drawing a spiral trajectory, wherein the unit includes: a light guide path configured to guide incident light to output the emitted light from an emission end; and a vibration unit configured to vibrate the emission end; a light emission control unit configured to control light emission of the emitted light; a polar coordinate generation unit configured to generate a radius and a deflection angle relating to the spiral trajectory; a driving signal generation unit configured to generate a driving signal for driving the vibration unit; an angle correction unit configured to perform calculation for correcting an angle based on information from the driving signal generation unit and output an corrected angle; and a coordinate calculation unit configured to calculate coordinates of an image.

A substrate inspection device and method are disclosed. The substrate inspection device includes a conveyance stage for carrying the substrate on its surface; a region scanning camera located at a first side of the conveyance stage, provided to be opposite to the surface, and configured for inspecting standard specification of the substrate; a line scanning camera located at the first side of the conveyance stage, provided to be opposite to the surface, and configured for inspecting edge line and size of the substrate; and a light source located at a second side of the conveyance stage opposite to the first side, configured for irradiating light rays onto the substrate, so as to be utilized by the region scanning camera and the line scanning camera for inspecting the substrate.

The disclosed optical scanning endoscope apparatus includes a scanner that scans an object with illumination light from a light source, a light amount detector that detects a light amount of the illumination light from the light source, and a controller that controls output of the light source based on the light amount detected by the light amount detector. The controller controls the output of the light source based on an integral value of the light amount detected by the light amount detector during an immediately prior predetermined period.

An arrangement for light sheet microscopy that includes a means for scanning a sample volume with a light sheet, which includes an angle 90 with the optical axis of an objective. The light sheet passes through the entire sample volume in the propagation direction, and the depth of field S.sub.obj of the objective is less than the optical-axis depth T of this sample volume. An optical device, disposed downstream of the objective, increases the depth of field S.sub.obj to a depth of field S.sub.effthe depth T of this sample volume. The arrangement also includes a means for positioning the sample volume within the region of the depth of field S.sub.eff. A spatially resolving optoelectronic area sensor is disposed downstream of the optical device, and hardware and software are provided to generate sample-volume images from the electronic image signals output by the area sensor.

An arrangement for light sheet microscopy that includes a means for scanning a sample volume with a light sheet, which includes an angle 90 with the optical axis of an objective. The light sheet passes through the entire sample volume in the propagation direction, and the depth of field S.sub.obj of the objective is less than the optical-axis depth T of this sample volume. An optical device, disposed downstream of the objective, increases the depth of field S.sub.obj to a depth of field S.sub.effthe depth T of this sample volume. The arrangement also includes a means for positioning the sample volume within the region of the depth of field S.sub.eff. A spatially resolving optoelectronic area sensor is disposed downstream of the optical device, and hardware and software are provided to generate sample-volume images from the electronic image signals output by the area sensor.