A bone conduction microphone includes a housing having an opening, a microphone pad, an element support member, a piezoelectric element, and a drive plate. The microphone pad is formed in a bottomed tubular shape having a bottom portion disposed outward and a tubular portion with an outer circumference fixed to an inner circumference of the opening. The element support member has an outer circumference fixed to an inner circumference of the tubular portion, and a support portion projecting toward the bottom portion. The piezoelectric element is in a plate shape with a peripheral edge of one surface fixed to the support portion and picks up vibration. The drive plate has a diaphragm part fixed to an inward surface of the bottom portion, and the diaphragm part is provided at a center with a protrusion fixed to an element central portion on another surface of the piezoelectric element.

The invention provides a piezoelectric micro-electromechanical system (MEMS) microphone includes a base with a cavity and a piezoelectric diaphragm arranged on the base. The base has a ring base and a support column. The piezoelectric diaphragm includes a plurality of diaphragm sheets. Each diaphragm sheet has a fixing end connected with the support column and a free end suspended above the cavity. The widths of the diaphragm sheets are gradually increased from the fixing ends to the free ends. According to the piezoelectric MEMS microphone provided by the invention, under sound pressure, the free ends vibrate, wide free ends drive short fixing ends, and the diaphragm sheets close the fixing ends generate greater deformation to generate more charge. Therefore, the sensitivity can be further improved.

The invention provides a piezoelectric micro-electromechanical system (MEMS) microphone includes a base with a cavity and a piezoelectric diaphragm arranged on the base. The base has a ring base and a support column. The piezoelectric diaphragm includes a plurality of diaphragm sheets. Each diaphragm sheet has a fixing end connected with the support column and a free end suspended above the cavity. The widths of the diaphragm sheets are gradually increased from the fixing ends to the free ends. According to the piezoelectric MEMS microphone provided by the invention, under sound pressure, the free ends vibrate, wide free ends drive short fixing ends, and the diaphragm sheets close the fixing ends generate greater deformation to generate more charge. Therefore, the sensitivity can be further improved.

A beamforming microphone array may be integrated into a wall or ceiling tile as a single unit. The beamforming microphone array includes a plurality of microphones that picks up audio input signals. In addition, the wall or ceiling tile may include an acoustically transparent outer surface on the front side of the tile, and the beamforming microphone array picks up the audio input signals through the outer surface of the tile. The beamforming microphone array may be coupled to the tile as a single unit and may be integrated into the back side of the tile.

A beamforming microphone array may be integrated into a wall or ceiling tile as a single unit. The beamforming microphone array includes a plurality of microphones that picks up audio input signals. In addition, the wall or ceiling tile may include an acoustically transparent outer surface on the front side of the tile, and the beamforming microphone array picks up the audio input signals through the outer surface of the tile. The beamforming microphone array may be coupled to the tile as a single unit and may be integrated into the back side of the tile.

A piezoelectric speaker device that includes an organic polymer piezoelectric film, at least one pair of electrodes provided in contact with the piezoelectric film and the at least one pair of electrodes including a user-side electrode on a first side of the piezoelectric film, an insulation layer on the user-side electrode, a flaw detection electrode line on the insulation layer, and a detection circuit configured to detect whether the flaw detection electrode line is in a normal electric conduction state.

A microphone and a method of manufacturing the microphone are provided. The method includes; preparing a substrate and forming a vibrating membrane having an oxide film and a plurality of slots onto the substrate. A sacrificial layer and a fixed membrane is formed over the vibrating membrane and air intake apertures are formed through the fixed membrane. A first pad is connected to the fixed membrane, a second pad is connected to the vibrating membrane, and a phase delay unit is bonded to the bonding pad. A penetration aperture may be formed by etching the rear side of the substrate and bonding the phase delay unit on the bonding pad. A sound passage, is formed by connecting passage patterns, and sound apertures with the sound passages by sequentially stacking phase delay layers on the bonding pad and simultaneously forming the passage patterns in the phase delay layers.

A microphone and a method of manufacturing the microphone are provided. The method includes; preparing a substrate and forming a vibrating membrane having an oxide film and a plurality of slots onto the substrate. A sacrificial layer and a fixed membrane is formed over the vibrating membrane and air intake apertures are formed through the fixed membrane. A first pad is connected to the fixed membrane, a second pad is connected to the vibrating membrane, and a phase delay unit is bonded to the bonding pad. A penetration aperture may be formed by etching the rear side of the substrate and bonding the phase delay unit on the bonding pad. A sound passage, is formed by connecting passage patterns, and sound apertures with the sound passages by sequentially stacking phase delay layers on the bonding pad and simultaneously forming the passage patterns in the phase delay layers.

Disclosed are systems and methods that uses a window as a keypad entry system that functions as a replacement for a keyless entry keypad in a vehicle. The system includes a vehicle window functional as a keypad using piezoelectric transducers that capture resonance from the vehicle window when pressure waves (e.g., generated by voice commands or taps) impact the glass. A transducer controller amplifies the vibrations from the vehicle window user tap or spoken commands and triangulates the signal to localize a position of the origination point of the tap, which may be mapped to a respective numeric or cardinal input value. The system may include a low power mode that receives input while the vehicle is off.

Provided is a directional acoustic sensor. The acoustic sensor includes a support a plurality of resonators provided on the support, and extending in a length direction. Each resonator of the plurality of resonators may include a base; and a frame provided on the base and extending continuously along a length of the base in the length direction. The base may have a thickness less than that of the frame.