A microelectromechanical apparatus includes a base and a thin film including a stationary part disposed on the base, a peripheral part, a central part surrounded by the peripheral part, and a first and second elastic part. The first elastic part is connected to the stationary part and the peripheral part. The second elastic part is connected to the peripheral part and the central part. When low frequency signal is input to a first electrode of the first elastic part, the peripheral part and the and the central part respectively vibrate with a first and second low-frequency amplitudes. When high-frequency signal is input to a second electrode of the second elastic part, the peripheral part and the central part respectively vibrate with a first and second high-frequency amplitudes. A difference between the first and second low-frequency amplitudes is smaller than a difference between the first and second high-frequency amplitudes.

A microelectromechanical apparatus includes a base and a thin film including a stationary part disposed on the base, a peripheral part, a central part surrounded by the peripheral part, and a first and second elastic part. The first elastic part is connected to the stationary part and the peripheral part. The second elastic part is connected to the peripheral part and the central part. When low frequency signal is input to a first electrode of the first elastic part, the peripheral part and the and the central part respectively vibrate with a first and second low-frequency amplitudes. When high-frequency signal is input to a second electrode of the second elastic part, the peripheral part and the central part respectively vibrate with a first and second high-frequency amplitudes. A difference between the first and second low-frequency amplitudes is smaller than a difference between the first and second high-frequency amplitudes.

The Application relates to optically transparent electrostatic transducers. In some embodiments, the transducers comprise graphene. Such transducers are capable of functioning as acoustic sensors and/or transmitters as a singulated device or in an array configuration. Also provided are methods of manufacturing and using such transducers.

The Application relates to optically transparent electrostatic transducers. In some embodiments, the transducers comprise graphene. Such transducers are capable of functioning as acoustic sensors and/or transmitters as a singulated device or in an array configuration. Also provided are methods of manufacturing and using such transducers.

In accordance with embodiments of the present disclosure, a device may include a piezoelectric speaker for generating sound, a microphone, and a controller communicatively coupled to the speaker and the microphone. The controller may be configured to receive a first signal from the piezoelectric speaker, the first signal induced at least in part by sound incident on the speaker other than sound generated by the piezoelectric speaker, receive a second signal from the microphone, the second signal induced by sound incident on the microphone, process at least one of the first signal and the second signal to determine at least one characteristic of sound incident upon at least one of the piezoelectric speaker and the microphone, and select at least one of the microphone and the piezoelectric speaker as a signal source for incident sound based on the at least one characteristic.

In accordance with embodiments of the present disclosure, a device may include a piezoelectric speaker for generating sound, a microphone, and a controller communicatively coupled to the speaker and the microphone. The controller may be configured to receive a first signal from the piezoelectric speaker, the first signal induced at least in part by sound incident on the speaker other than sound generated by the piezoelectric speaker, receive a second signal from the microphone, the second signal induced by sound incident on the microphone, process at least one of the first signal and the second signal to determine at least one characteristic of sound incident upon at least one of the piezoelectric speaker and the microphone, and select at least one of the microphone and the piezoelectric speaker as a signal source for incident sound based on the at least one characteristic.

A MEMS device and a method for manufacturing a MEMS device are provided. The MEMS device includes an anchor, a diaphragm structure, and a sealing film. The diaphragm structure is disposed over the anchor and has an opening through the diaphragm structure. The sealing film covers at least a portion of the opening of the diaphragm structure.

A MEMS device and a method for manufacturing a MEMS device are provided. The MEMS device includes an anchor, a diaphragm structure, and a sealing film. The diaphragm structure is disposed over the anchor and has an opening through the diaphragm structure. The sealing film covers at least a portion of the opening of the diaphragm structure.

An acoustic device including a first passive radiator structure and a second passive radiator structure is provided. The first passive radiator structure includes a passive diaphragm mechanically coupled to a first enclosure member via a first flexible suspension element, and is configured to vibrate relative to the first enclosure member. The second passive radiator structure includes a second enclosure member, and is configured to vibrate relative to the first enclosure member. The second passive radiator structure further includes a second flexible suspension element mechanically coupled to the first enclosure member and the second enclosure member. The second passive radiator structure further includes an active electro-acoustic transducer mechanically coupled to the second enclosure member. The second passive radiator structure moves when the active electro-acoustic transducer vibrates. A first mass of the first passive radiator structure is less than a second mass of the second passive radiator structure. During operation, the first enclosure member experiences substantially no vibrations

An acoustic device including a first passive radiator structure and a second passive radiator structure is provided. The first passive radiator structure includes a passive diaphragm mechanically coupled to a first enclosure member via a first flexible suspension element, and is configured to vibrate relative to the first enclosure member. The second passive radiator structure includes a second enclosure member, and is configured to vibrate relative to the first enclosure member. The second passive radiator structure further includes a second flexible suspension element mechanically coupled to the first enclosure member and the second enclosure member. The second passive radiator structure further includes an active electro-acoustic transducer mechanically coupled to the second enclosure member. The second passive radiator structure moves when the active electro-acoustic transducer vibrates. A first mass of the first passive radiator structure is less than a second mass of the second passive radiator structure. During operation, the first enclosure member experiences substantially no vibrations