A MEMS device and a method of manufacturing the same are provided. A semiconductor device includes a substrate and a membrane over the substrate. The membrane includes a piezoelectric material configured to generate charges in response to an acoustic wave. The membrane includes a via pattern having first lines that partition the membrane into slices such that the slices are separated from each other at a first region near an edge of the membrane and connected to each other at a second region.

A vibration plate having a reinforced structural element is provided. The vibration plate includes a vibration plate main body. The vibration main body has a first surface and a second surface opposite to each other. The reinforced structural element is located between the first surface and the second surface. A material of the vibration plate main body is different from a material of the reinforced structural element.

An electrostatic transducer, a diaphragm (2) therefor, and corresponding methods of manufacture are disclosed. The electrostatic transducer is preferably for use in a motor vehicle. A composite laminated diaphragm (2) is manufactured by providing a first insulating layer (4), providing a conductive layer (6) on a surface of the first insulating layer (4), and bonding a second insulating layer (10) to the conductive layer (6) such that the second insulating layer (10) extends over the conductive layer (6). The first and second insulating layers (4, 10) each comprise a sheet of uncharged insulating material. The thickness of the composite laminated diaphragm (2) is less than 20 m. Manufacturing the electrostatic transducer comprises securing a first conductive stator, a first insulating spacer and the diaphragm (2) in a stack with the first insulating spacer between the first conductive stator and the diaphragm (2) to provide a spacing of less than 1 mm between the first conductive stator and the diaphragm (2).

In various embodiments, a speaker module includes: an air adsorption member, and an electronic device includes the speaker module. The speaker module may include a yoke defining one surface of the speaker module, a magnet attached to the yoke through a first surface of the magnet, a plate attached to a second surface of the magnet, a frame providing a lateral surface of the speaker module and combined with the yoke at a first end of the frame, a voice coil disposed to be spaced apart from the magnet, and a diaphragm combined with the voice coil at an inner surface of the diaphragm. At least one of the yoke, the magnet, the plate, and the frame may include at least a portion of an air adsorption member comprising an air adsorption material configured to adsorb air in the speaker module based on the diaphragm vibrating.

A microphone assembly comprises a substrate. An acoustic transducer is disposed on the substrate and configured to generate an electrical signal responsive to an acoustic signal. An integrated circuit is disposed on the substrate and electrically coupled to the acoustic transducer. An enclosure is disposed on the substrate, and comprises a main body, and a sidewall projecting axially from outer edges of the main body towards the substrate and contacting the substrate such that an internal volume is defined between the enclosure and the substrate. An insulating layer is insert molded on an inner surface of the enclosure, or over molded on an outer surface of the enclosure such that the insulating layer is not disposed on a portion of the sidewall proximate to the substrate.

Proposed is a vibration sensor including: a substrate; a first electrode positioned on the substrate; a support positioned on the first electrode and including a cylindrical hollow hole; and a diaphragm including a thin film positioned on the support and a second electrode positioned on the thin film. According to the present disclosure, it is possible to manufacture a skin-attachable vibration sensor that is attached to a user's neck to detect vibration acceleration in user's neck skin, thus exhibiting a uniform and high sensitivity to a user's voice over the frequency range of the human voice. In addition, the sensor sensitively detects a user's voice through neck skin vibrations rather than through air, thus being free from the influence of external noise or wind, and can recognize the user's voice even in a situation where a user's mouth is covered.

A non-dispensing manufacturing process includes forming a paper cone; engaging the paper cone with a voice coil to form a vibration assembly; fixing a yoke, a magnet set, and a washer to form a magnetic circuit assembly; engaging a basket with the magnetic circuit assembly; and engaging the basket with the vibration assembly to form a speaker, where no glue is used in the manufacturing process. A speaker includes a paper cone; a voice coil engaged with the paper cone to form a vibration assembly, where a junction between a bobbin of the voice coil and the paper cone has a first welding layer; a magnetic circuit assembly including a yoke, a magnet set, and a washer that are integrally fixed; and a basket engaged with the magnetic circuit assembly and the vibration assembly.

A piezoelectric speaker-forming laminate (10) includes: a piezoelectric film (35); a pressure-sensitive adhesive face (17); an interposed layer (40) being a porous body layer and/or a resin layer disposed between the piezoelectric film (35) and the pressure-sensitive adhesive face (17); and a release layer (20) joined to the pressure-sensitive adhesive face (17). The pressure-sensitive adhesive face (17) is disposed in such a manner that at least a portion of the piezoelectric film (35) overlaps the pressure-sensitive adhesive face (17) when the piezoelectric film (35) is viewed in plan. The piezoelectric film (35) and the interposed layer (40) are allowed to be fixed to a support (80) as a piezoelectric speaker or a portion of a piezoelectric speaker by sticking the pressure-sensitive adhesive face (17) from which the release layer (20) has been removed to the support (80).

A speaker includes a frame, a vibration unit fixed to the frame, and a magnetic circuit unit fixed to the frame. The vibration unit includes a diaphragm fixed to the frame, and a coil configured to drive the diaphragm to vibrate and sound. The diaphragm includes a dome. The dome includes a first layer, a second layer and a third layer which are stacked sequentially in a direction from the coil to the diaphragm. The second layer includes a honeycomb structure. The third layer includes a body and a plurality of through holes extending through the body in a vibration direction of the diaphragm. The through holes communicate with the honey structure of the second layer form a resonance cavity.

An apparatus includes a first support member, a second support member and one or more electro-active polymer members between the first support member and the second support. The one or more electro-active polymer members include a first end configured to be coupled to the first support member, a second end configured to be coupled to the second support member and a middle portion located between the first end and the second end, where the middle portion includes a curved member in a first state of the one or more electro-active polymer members. A curved shape of the one or more electro-active polymer members is configured to create linear movement in a vertical direction, by bending in a curved direction.