Disclosed is a stage including a first supporting plate, a second supporting plate under the first supporting plate, a shaft under the second supporting plate and overlapping with the first supporting plate and the second supporting plate, and at least one sheath heater passing through the second supporting plate. The at least one sheath heater is arranged so as to extend on a first surface and a second surface which are parallel to an upper surface of the second supporting plate and which are different in distance from the first supporting plate from each other.

The embodiments described herein generally relate to a stem assembly for coupling a susceptor to a process chamber. The stem assembly includes a pivot mechanism, a first flexible seal coupled to the pivot mechanism, a second flexible seal coupled to a plate on a first side of the plate, the plate having a second side coupled to the first flexible seal, a housing coupled to the second flexible seal, and a motion assembly adapted to move the housing in an X axis and a Y axis, and position the susceptor angularly relative to an X-Y plane of the process chamber.

The embodiments described herein generally relate to a stem assembly for coupling a susceptor to a process chamber. The stem assembly includes a pivot mechanism, a first flexible seal coupled to the pivot mechanism, a second flexible seal coupled to a plate on a first side of the plate, the plate having a second side coupled to the first flexible seal, a housing coupled to the second flexible seal, and a motion assembly adapted to move the housing in an X axis and a Y axis, and position the susceptor angularly relative to an X-Y plane of the process chamber.

A surface heater including a substrate, an insulating layer positioned on the substrate, and a heater layer positioned on the insulating layer, wherein the insulating layer and the heating layer are co-fired.

A domestic gas cooking appliance for heating a food item is provided. The domestic cooking appliance includes a top sheet; a burner body on the top sheet, the burner body having an upwardly extending riser pin; a gas supply line that supplies gas to the burner body; and a burner cap positioned above the burner body and resting on the riser pin such that a pin receiving area contacts the riser pin. One of the riser pin and the pin receiving area comprises a magnet, and the other of the riser pin and the pin receiving area comprises a ferrous material.

A cooking appliance includes a knob assembly to emit light to improve an aesthetic feel and user convenience. The cooking appliance includes a main body having at least one heating source, a panel disposed in the main body and provided with a through hole, and a knob assembly coupled to the panel. The knob assembly includes a knob, at least one light source configured to emit light, a first light guide passing through the through hole and arranged to guide the light emitted from the light source, and a second light guide configured to guide the light guided by the first light guide to an outside of the knob.

A cooking appliance includes a knob assembly to emit light to improve an aesthetic feel and user convenience. The cooking appliance includes a main body having at least one heating source, a panel disposed in the main body and provided with a through hole, and a knob assembly coupled to the panel. The knob assembly includes a knob, at least one light source configured to emit light, a first light guide passing through the through hole and arranged to guide the light emitted from the light source, and a second light guide configured to guide the light guided by the first light guide to an outside of the knob.

The embodiments described herein generally relate to a stem assembly for coupling a susceptor to a process chamber. The stem assembly includes a pivot mechanism, a first flexible seal coupled to the pivot mechanism, a second flexible seal coupled to a plate on a first side of the plate, the plate having a second side coupled to the first flexible seal, a housing coupled to the second flexible seal, and a motion assembly adapted to move the housing in an X axis and a Y axis, and position the susceptor angularly relative to an X-Y plane of the process chamber.

The embodiments described herein generally relate to a stem assembly for coupling a susceptor to a process chamber. The stem assembly includes a pivot mechanism, a first flexible seal coupled to the pivot mechanism, a second flexible seal coupled to a plate on a first side of the plate, the plate having a second side coupled to the first flexible seal, a housing coupled to the second flexible seal, and a motion assembly adapted to move the housing in an X axis and a Y axis, and position the susceptor angularly relative to an X-Y plane of the process chamber.

An electrostatic chuck includes a heating part, a substrate on the heating part, a temperature sensor, and an embedment part. The substrate includes a first surface onto which an object is to be attracted and held, a second surface opposite from the first surface and contacting the heating part, and a hole open at the second surface of the substrate. The hole includes a threaded inner wall surface. The temperature sensor is at the bottom of the hole. The embedment part includes a threaded side surface, and is embedded in the hole with the threaded side surface mating with the threaded inner wall surface. The substrate and the embedment part are formed of the same material.