A vapor deposition mask used for forming a thin film pattern on a substrate enables to form much higher-definition thin film pattern and to closely attract and hold the vapor deposition mask to and on a surface of a transparent substrate by a magnetic force in a state that the substrate held on a substrate holder is intermediated therebetween, while preventing occurrence of shadow portions (vapor deposition shadows) to which no deposition material is adhered due to a holding member. A vapor deposition mask 1 is composed of a single resin film layer 2 or a resin film layer 2 and a holding member 7 of a substantially rectangular thin plate frame body, and a metal powder 4 is contained in the resin film layer 2 in which a plurality of through openings 3 are formed. When having the holding member 7, a single rectangular opening 8 including a portion of the resin film layer 2 where a plurality of the through openings 3 are formed is formed on the holding member 7.

A vapor deposition mask used for forming a thin film pattern on a substrate enables to form much higher-definition thin film pattern and to closely attract and hold the vapor deposition mask to and on a surface of a transparent substrate by a magnetic force in a state that the substrate held on a substrate holder is intermediated therebetween, while preventing occurrence of shadow portions (vapor deposition shadows) to which no deposition material is adhered due to a holding member. A vapor deposition mask 1 is composed of a single resin film layer 2 or a resin film layer 2 and a holding member 7 of a substantially rectangular thin plate frame body, and a metal powder 4 is contained in the resin film layer 2 in which a plurality of through openings 3 are formed. When having the holding member 7, a single rectangular opening 8 including a portion of the resin film layer 2 where a plurality of the through openings 3 are formed is formed on the holding member 7.

A method of manufacturing a display device, including: a stacking step of stacking, on a glass substrate, a sacrificial resin layer, a metal layer, a transparent metal oxide layer, a base material resin layer, and a functional layer including at least one of a pixel circuit-constituting layer driving a plurality of pixels and a color filter layer, in this order; a radiating step of radiating a pulsed light of a xenon flash lamp to the metal layer through the glass substrate and the sacrificial resin layer; and a detaching step of reducing a force of adhesion between the sacrificial resin layer and the metal layer with the pulsed light radiated in the radiating step, and detaching the sacrificial resin layer from the metal layer.

A method of manufacturing a display device, including: a stacking step of stacking, on a glass substrate, a sacrificial resin layer, a metal layer, a transparent metal oxide layer, a base material resin layer, and a functional layer including at least one of a pixel circuit-constituting layer driving a plurality of pixels and a color filter layer, in this order; a radiating step of radiating a pulsed light of a xenon flash lamp to the metal layer through the glass substrate and the sacrificial resin layer; and a detaching step of reducing a force of adhesion between the sacrificial resin layer and the metal layer with the pulsed light radiated in the radiating step, and detaching the sacrificial resin layer from the metal layer.

An etching device includes a chemical treatment tank configured to allow a substrate to be transported in an interior thereof, and a spraying unit disposed in the interior of the chemical treatment tank, including a blowing port oriented in a direction that does not intersect a front face of the substrate, and configured to spray an etchant chemical solution as a mist through the blowing port.

A flexible display device is manufactured with high yield. A display device having high resistance to repeated bending is provided. The display device is manufactured by forming a separation layer over a support substrate; forming, over the separation layer, an inorganic insulating layer including a first portion and a second portion; forming a display element over the inorganic insulating layer to be overlapped with the first portion; forming a connection electrode over the inorganic insulating layer to be overlapped with the second portion; sealing the display element; separating the support substrate and the inorganic insulating layer using the separation layer; attaching a substrate to the inorganic insulating layer to be overlapped with the first portion; and etching the second portion using the substrate as a mask to expose the connection electrode.

To provide a charge transport layer excellent in the external quantum efficiency, and an organic photoelectronic element comprising the charge transport layer. A charge transport layer comprising a film containing a fluorinated polymer and a semiconductor material, wherein the film has a material composition such that E.sub.th is within a range of from 0.010 to 0.080 MV/cm. An organic photoelectronic element comprising the charge transport layer.

To provide a charge transport layer excellent in the external quantum efficiency, and an organic photoelectronic element comprising the charge transport layer. A charge transport layer comprising a film containing a fluorinated polymer and a semiconductor material, wherein the film has a material composition such that E.sub.th is within a range of from 0.010 to 0.080 MV/cm. An organic photoelectronic element comprising the charge transport layer.

After an intermediate region and a flexible substrate region of a plastic film of a multilayer stack are divided, the interface between the flexible substrate region and a glass base is irradiated with laser light. The multilayer stack is separated into the first portion and the second portion while the multilayer stack is kept in contact with the stage. The first portion includes a plurality of OLED devices in contact with the stage. The OLED devices include a plurality of functional layer regions and the flexible substrate region. The second portion includes the glass base and the intermediate region. The step of irradiating with the laser light includes forming the laser light from a plurality of arranged laser light sources and temporally and spatially modulating a power of the plurality of laser light sources according to a shape of the flexible substrate region of the synthetic resin film.

A bank (BK1b) and a bank (BK1a) having a height less than a height of the bank (BK1b) are intermittently provided on a bank (BK1) covering a peripheral portion of each first electrode (21) of a light emitting element.