Disclosed is a static eliminator having an offset voltage reducing structure capable of improving antistatic performance for a charged body by reducing an ion offset voltage. The present static eliminator comprises a static eliminator body having an air passage through which high-pressure air is supplied, a plurality of discharge structures installed at the lower end of the static eliminator body to supply the high-pressure air passing through the air passage, and generating positive/negative ions by discharging using the applied high voltage, and an offset voltage reduction unit having a plurality of openings formed to allow the positive/negative ions and high-pressure air to pass therethrough, and installed to cover at least some of the plurality of discharge structures.

Disclosed is a wafer processing system, a load lock system, a chamber system, and methods of neutralizing static charges and dislodging particles from a wafer. The chamber system (e.g., load lock system) may comprise a chamber (e.g., load lock chamber), at least one ionizer to ionize inert gas supplied to the chamber (e.g., load lock chamber), at least one bottom nozzle to flow ionized inert gas to a bottom surface of a wafer, at least one top nozzle to flow ionized inert gas to a top surface of a wafer, and at least one exhaust vent to remove the ionized inert gas and any neutralized particles dislodged from the wafer. The chamber may include a single wafer or multiple wafers. The chamber system may further comprise at least one nozzle to flow an inert gas curtain proximate to an exit and/or entry into the chamber.

Disclosed is a wafer processing system, a load lock system, a chamber system, and methods of neutralizing static charges and dislodging particles from a wafer. The chamber system (e.g., load lock system) may comprise a chamber (e.g., load lock chamber), at least one ionizer to ionize inert gas supplied to the chamber (e.g., load lock chamber), at least one bottom nozzle to flow ionized inert gas to a bottom surface of a wafer, at least one top nozzle to flow ionized inert gas to a top surface of a wafer, and at least one exhaust vent to remove the ionized inert gas and any neutralized particles dislodged from the wafer. The chamber may include a single wafer or multiple wafers. The chamber system may further comprise at least one nozzle to flow an inert gas curtain proximate to an exit and/or entry into the chamber.

Automatic emitter point cleaners are disclosed. An automatic emitter point cleaning system includes: a fan configured to direct a stream of air through an air path; a point emitter configured to produce at least one of positive ions or negative ions within or proximate to the air path; a brush; a first gear coupled to the brush and configured to move the brush into contact with the point emitter; a second gear to engage the first gear; and a motor to actuate the second gear such that the second gear actuates the first gear to move the brush past the point emitter.

A damping force generation device for a vehicle includes a shock absorber including a cylinder and a piston. The shock absorber is coupled to a vehicle body, a wheel carrier, and the like at a rod part of the piston and the cylinder, respectively, and is configured to generate a damping force due to a flow resistance when oil passes through an orifice formed in the piston. Each of self-discharge type charge eliminators is fixed to a surface of a specific member being at least one of a component of the shock absorber or an auxiliary member connected to the component. The charge eliminator reduces positive electric charge that is charged to the specific member, to thereby reduce a charge amount of the oil.

A damping force generation device for a vehicle includes a shock absorber including a cylinder and a piston. The shock absorber is coupled to a vehicle body, a wheel carrier, and the like at a rod part of the piston and the cylinder, respectively, and is configured to generate a damping force due to a flow resistance when oil passes through an orifice formed in the piston. Each of self-discharge type charge eliminators is fixed to a surface of a specific member being at least one of a component of the shock absorber or an auxiliary member connected to the component. The charge eliminator reduces positive electric charge that is charged to the specific member, to thereby reduce a charge amount of the oil.

The invention relates to an emission tip assembly (100) on high-voltage electrodes for charging or discharging substrates, comprising at least one emission tip (1) and a carrier body (7) comprised of an insulating material, which has at least one high-resistance series resistor (13), wherein the at least one emission tip (1) can be connected to a high-voltage connection (14) by means of the series resistor (13). In order to have available an assembly of emission tips which, despite protrusion from the carrier body (7) thereof to an extent in principle and despite the metal profiled element (10, 10a) provided with the insulating potting mass (6), causes no injuries in the event of unintentional and intentional contact and thus permits safe handling together with high efficiency of the assembly, the emission tip (1) is formed of a spring metal and forms an elastic spring element, and a free end of the emission tip (1) is freely spaced apart from the carrier body (7), the particular metal profiled element (10, 10a) and the insulating potting mass (6), as a corona tip (2). In addition the range effect of a discharge electrode is improved by the guiding of an auxiliary air quantity (15) directly to the corona tip (2).

Provided are a static eliminator capable of performing quick static elimination while having a good ion balance, an electronic balance including the static eliminator, and a static eliminating method of the static eliminator. A static eliminator is provided which is configured to eliminate static from a static eliminating object by ions generated by applying high voltages to static eliminating needles, and has a high-speed static eliminating mode configured to eliminate static from a static eliminating object at a high speed, and a relaxation static eliminating mode to be executed by a voltage application method different from that of the high-speed static eliminating mode and configured to regulate ion balances of the static eliminating object and the area around of the static eliminating object. With this configuration, a static eliminator capable of quickly eliminating static from a specimen while having a good ion balance can be provided.

The present invention relates to a protective ionizing laminate (PIL) static eliminating device that uses a wide variety of laminate materials to protect ionizing points that eliminate static. In an embodiment, the protective encasement is made from laminate and in others it is made from a substrate onto which of electrically conductive or static dissipative material is printed or placed. The present invention includes a plurality of electrically conductive or static dissipative material or microfibers, wherein the plurality of electrically conductive or static dissipative material or microfibers forms a pattern and a ground in communication with the electrically conductive or static dissipative microfibers or material. The laminate materials form an encasement or enclosure of the electrically conductive or static dissipative microfibers or material and at least a portion of the ground. The PIL of the present invention includes an edge or slit in the enclosure that exposes the plurality of electrically conductive or static dissipative material or microfibers at the edge or slit to create a series of ionizing points. When air between the ionizing points and charged material passes by or near the PIL static eliminating device, the PIL sufficiently removes or reduces static charge from the passing material.

The present invention relates to a protective ionizing laminate (PIL) static eliminating device that uses a wide variety of laminate materials to protect ionizing points that eliminate static. In an embodiment, the protective encasement is made from laminate and in others it is made from a substrate onto which of electrically conductive or static dissipative material is printed or placed. The present invention includes a plurality of electrically conductive or static dissipative material or microfibers, wherein the plurality of electrically conductive or static dissipative material or microfibers forms a pattern and a ground in communication with the electrically conductive or static dissipative microfibers or material. The laminate materials form an encasement or enclosure of the electrically conductive or static dissipative microfibers or material and at least a portion of the ground. The PIL of the present invention includes an edge or slit in the enclosure that exposes the plurality of electrically conductive or static dissipative material or microfibers at the edge or slit to create a series of ionizing points. When air between the ionizing points and charged material passes by or near the PIL static eliminating device, the PIL sufficiently removes or reduces static charge from the passing material.