A raster scanning x-ray source can be light and small, and can have high resolution. A raster-assembly can be attached directly to and can encircle an x-ray tube. The raster-assembly can adjoin or can be very close to the x-ray tube, resulting in a small and lightweight scanning x-ray source. X-rays can backscatter back into the x-ray tube instead of into a detector, thus improving resolution of the resulting image. A voltage-multiplier, which can be used with the x-ray source, can include separate voltage-multiplier-stages in a stack,

Some embodiments include a system, comprising: a plurality of x-ray sources, each x-ray source including: an electron source configured to generate an electron beam; and a target configured to receive the electron beam and convert the electron beam into an x-ray beam; wherein: at first x-ray source of the x-ray sources is different from a second x-ray source of the x-ray sources; and the targets of the x-ray sources are part of a linear target.

Some embodiments include a system, comprising: a plurality of x-ray sources, each x-ray source including: an electron source configured to generate an electron beam; and a target configured to receive the electron beam and convert the electron beam into an x-ray beam; wherein: at first x-ray source of the x-ray sources is different from a second x-ray source of the x-ray sources; and the targets of the x-ray sources are part of a linear target.

An apparatus includes a switch cabinet and a device housing. The device housing is adapted to accommodate a component of a device and the switch cabinet is adapted to accommodate electrical equipment for the device. The switch cabinet is operable to be moved between an open position and a closed position relative to the device housing. When in the closed position a wall of the switch cabinet closes off an opening in the device housing, and when in the open position the wall of the switch cabinet is removed from the opening in the device housing so as to expose that opening.

A radiation emission device is provided. The radiation emission device may include a cathode configured to emit an electron beam and an anode configured to rotate on a shaft. The anode may be situated to receive the electron beam from the cathode. The radiation emission device may further include a rotor configured to drive the anode to rotate. The rotor may be mechanically connected to the shaft. The radiation emission device may further include a sleeve configured to support the shaft via at least one bearing. The cathode, the anode, and the rotor may be enclosed in an enclosure that is connected to the sleeve. At least a portion of the sleeve may reside outside the enclosure.

An arrayed X-ray source and an X-ray imaging apparatus are described. An example X-ray source includes a housing and X-ray generators located in the housing. The X-ray generators are arranged in an array. The X-ray generators are provided separately from each other and configured to emit X-rays independently of each other.

An X-ray module includes a housing in which an opening portion is formed; an electron gun that emits an electron beam; a target that transmits an X-ray generated when the electron beam is incident on the target and emits the X-ray from an X-ray-emitting surface; an X-ray-emitting window that seals the opening portion, and that transmits the X-ray and emits the X-ray to a first side in an axial direction; and a heat radiating unit disposed outside the housing. The housing includes a surface on which a protrusion protruding to the first side is formed, the opening portion is formed in the protrusion, and the target is disposed in the opening portion. The heat radiating unit includes a first portion extending along the surface and thermally connected to the surface, and a second portion extending from the first portion to a second side opposite the first side.

Methods and systems for realizing a high radiance x-ray source based on a high density electron emitter array are presented herein. The high radiance x-ray source is suitable for high throughput x-ray metrology and inspection in a semiconductor fabrication environment. The high radiance X-ray source includes an array of electron emitters that generate a large electron current focused over a small anode area to generate high radiance X-ray illumination light. In some embodiments, electron current density across the surface of the electron emitter array is at least 0.01 Amperes/mm.sup.2, the electron current is focused onto an anode area with a dimension of maximum extent less than 100 micrometers, and the spacing between emitters is less than 5 micrometers. In another aspect, emitted electrons are accelerated from the array to the anode with a landing energy less than four times the energy of a desired X-ray emission line.

Methods and systems for realizing a high radiance x-ray source based on a high density electron emitter array are presented herein. The high radiance x-ray source is suitable for high throughput x-ray metrology and inspection in a semiconductor fabrication environment. The high radiance X-ray source includes an array of electron emitters that generate a large electron current focused over a small anode area to generate high radiance X-ray illumination light. In some embodiments, electron current density across the surface of the electron emitter array is at least 0.01 Amperes/mm.sup.2, the electron current is focused onto an anode area with a dimension of maximum extent less than 100 micrometers, and the spacing between emitters is less than 5 micrometers. In another aspect, emitted electrons are accelerated from the array to the anode with a landing energy less than four times the energy of a desired X-ray emission line.

An X-ray module includes a housing; an electron gun that emits an electron beam inside the housing; a target disposed inside the housing and fixed to the housing, to generate an X-ray when the electron beam is incident on the target; and a deflection unit including a permanent magnet and disposed outside the housing, to deflect the electron beam by means of a magnetic force of the permanent magnet. The deflection unit includes a heat insulating member disposed at least between the permanent magnet and the housing. A thermal conductivity of the heat insulating member is lower than a thermal conductivity of the permanent magnet.