An ion throughput pump (ITP) includes a pump inlet configured to communicate with a vacuum chamber; an ionization source fluidly communicating with the vacuum chamber via the pump inlet and configured for ionizing gas species received from the vacuum chamber; a pump outlet; ion optics configured for accelerating ions produced by the ionization source toward the pump outlet; and a roughing pump stage configured for receiving the ions from the ionization source, producing neutral species from the ions, and pumping the neutral species through the pump outlet.

A system for an atomic interferometer includes a laser control system and a feedback control system. The laser control system controls a first pointing angle of a first interrogating laser beam. The first interrogating laser beam and a second interrogating laser beam interrogate a pair of almost counter-propagating laser cooled atomic ensembles. The feedback control system adjusts the first pointing angle based at least in part on an inertial measurement using the atomic interferometer to bias an output of the atomic interferometer to compensate for the effects of rotations. The pointing angle of the laser beam, which is linearly related to a frequency used to drive an acousto-optic deflector, is linearly related to the rotation rate of the sensor.

A system for an atomic interferometer includes a laser control system and a feedback control system. The laser control system controls a first pointing angle of a first interrogating laser beam. The first interrogating laser beam and a second interrogating laser beam interrogate a pair of almost counter-propagating laser cooled atomic ensembles. The feedback control system adjusts the first pointing angle based at least in part on an inertial measurement using the atomic interferometer to bias an output of the atomic interferometer to compensate for the effects of rotations. The pointing angle of the laser beam, which is linearly related to a frequency used to drive an acousto-optic deflector, is linearly related to the rotation rate of the sensor.

An apparatus, method and products thereof provide an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials.

An apparatus, method and products thereof provide an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials.

A negative ion-based beam injector comprising a negative ion source and an accelerator. The ions produced by the ion source are pre-accelerated before injection into a high energy accelerator by an electrostatic multi-aperture grid pre-accelerator, which is used to extract ion beams from the plasma and accelerate to some fraction of the required beam energy. The beam from the ion source passes through a pair of deflecting magnets, which enable the beam to shift off axis before entering the high energy accelerator. The negative ion-based beam injector can be combined with a neutralizer to produce about a 5 MW neutral beam with energy of about 0.50 to 1.0 MeV. After acceleration to full energy, the beam enters the neutralizer where it is partially converted into a neutral beam. The remaining ion species are separated by a magnet and directed into electrostatic energy converters. The neutral beam passes through a gate valve and enters a plasma chamber.

A negative ion-based beam injector comprising a negative ion source and an accelerator. The ions produced by the ion source are pre-accelerated before injection into a high energy accelerator by an electrostatic multi-aperture grid pre-accelerator, which is used to extract ion beams from the plasma and accelerate to some fraction of the required beam energy. The beam from the ion source passes through a pair of deflecting magnets, which enable the beam to shift off axis before entering the high energy accelerator. The negative ion-based beam injector can be combined with a neutralizer to produce about a 5 MW neutral beam with energy of about 0.50 to 1.0 MeV. After acceleration to full energy, the beam enters the neutralizer where it is partially converted into a neutral beam. The remaining ion species are separated by a magnet and directed into electrostatic energy converters. The neutral beam passes through a gate valve and enters a plasma chamber.

An exemplary embodiment of the present disclosure provides a collimated atomic beam generator. The generator can comprise an atomic vapor chamber, a collimator plate, and an insulative adhesive layer. The atomic vapor chamber can comprise an atomic vapor source. The collimator plate can comprise a first side facing the atomic vapor chamber, an opposing second side, and a plurality of channels extending between the first side and the second side. The insulative adhesive layer can be positioned between and coupling the atomic vapor chamber to the collimator plate. The collimator plate can be configured to collimate atomic vapors generated by the atomic vapor source in the atomic vapor chamber.

An exemplary embodiment of the present disclosure provides a collimated atomic beam generator. The generator can comprise an atomic vapor chamber, a collimator plate, and an insulative adhesive layer. The atomic vapor chamber can comprise an atomic vapor source. The collimator plate can comprise a first side facing the atomic vapor chamber, an opposing second side, and a plurality of channels extending between the first side and the second side. The insulative adhesive layer can be positioned between and coupling the atomic vapor chamber to the collimator plate. The collimator plate can be configured to collimate atomic vapors generated by the atomic vapor source in the atomic vapor chamber.

A non-resonance photo-neutralizer for negative ion-based neutral beam injectors. The non-resonance photo-neutralizer utilizes a nonresonant photon accumulation, wherein the path of a photon becomes tangled and trapped in a certain space region, i.e., the photon trap. The trap is preferably formed by two smooth mirror surfaces facing each other with at least one of the mirrors being concave. In its simplest form, the trap is elliptical. A confinement region is a region near a family of normals, which are common to both mirror surfaces. The photons with a sufficiently small angle of deviation from the nearest common normal are confined. Depending on specific conditions, the shape of the mirror surface may be one of spherical, elliptical, cylindrical, or toroidal geometry, or a combination thereof.