Plasma processing systems and methods are provided. In one example, a system includes a processing chamber having a workpiece support. The workpiece is configured to support a workpiece. The system includes a plasma source configured to induce a plasma from a process gas in a plasma chamber to generate one or more species of negative ions. The system includes a grid structure configured to accelerate the one or more negative ions towards the workpiece. The grid structure can include a first grid plate, a second grid plate, and one or more magnetic elements positioned between the first grid plate and second grid plate to reduce electrons accelerated through the first grid plate. The system can include a neutralizer cell disposed downstream of the grid structure configured to detach extra electrons from ions of the one or more species of negative ions to generate energetic neutral species for processing the workpiece.

In some variations, a vapor-cell system comprises: a vapor-cell region configured to allow at least one vapor-cell optical path into a vapor phase within the vapor-cell region; a first electrode disposed in contact with the vapor-cell region; a second electrode that is electrically isolated from the first electrode; and a transparent ion-conducting layer interposed between the first electrode and the second electrode, wherein the transparent ion-conducting layer is optically transparent over a selected optical band of electromagnetic wavelengths. Some embodiments provide a magneto-optical trap or atomic-cloud imaging apparatus, comprising: the disclosed vapor-cell system; a source of laser beams configured to provide three orthogonal vapor-cell optical paths through the vapor-cell gas phase, to trap or image a population of cold atoms; and a magnetic-field source configured to generate magnetic fields within the vapor-cell region. Methods of use are also disclosed herein.

In some variations, a vapor-cell system comprises: a vapor-cell region configured to allow at least one vapor-cell optical path into a vapor phase within the vapor-cell region; a first electrode disposed in contact with the vapor-cell region; a second electrode that is electrically isolated from the first electrode; and a transparent ion-conducting layer interposed between the first electrode and the second electrode, wherein the transparent ion-conducting layer is optically transparent over a selected optical band of electromagnetic wavelengths. Some embodiments provide a magneto-optical trap or atomic-cloud imaging apparatus, comprising: the disclosed vapor-cell system; a source of laser beams configured to provide three orthogonal vapor-cell optical paths through the vapor-cell gas phase, to trap or image a population of cold atoms; and a magnetic-field source configured to generate magnetic fields within the vapor-cell region. Methods of use are also disclosed herein.

A matter-wave gyro with counter-propagating traps uses three-dimensional lattices formed of interference fringes from three pairs of interfering laser beams. Particles, such as neutral atoms, ion, or molecules are cooled to a ground state near absolute zero. The resulting ultra-cold particles are loaded into the lattices. The laser beams used to form the lattices are driven according to functions that cause the lattices to counter-propagate about a closed path (Sagnac loop) N times, where a desired tradeoff between spatial resolution and temporal resolution can be achieved by choosing an appropriate integer value of N. The lattices can be extinguished so that the particles can be imaged to identify an interference pattern. A shift in the interference pattern relative to an interference pattern that would occur with zero angular momentum can be used to measure angular momentum.

A matter-wave gyro with counter-propagating traps uses three-dimensional lattices formed of interference fringes from three pairs of interfering laser beams. Particles, such as neutral atoms, ion, or molecules are cooled to a ground state near absolute zero. The resulting ultra-cold particles are loaded into the lattices. The laser beams used to form the lattices are driven according to functions that cause the lattices to counter-propagate about a closed path (Sagnac loop) N times, where a desired tradeoff between spatial resolution and temporal resolution can be achieved by choosing an appropriate integer value of N. The lattices can be extinguished so that the particles can be imaged to identify an interference pattern. A shift in the interference pattern relative to an interference pattern that would occur with zero angular momentum can be used to measure angular momentum.

A device such as a medical device and a method for making same provides a device surfaces modified by beam irradiation, such as a gas cluster ion beams or a neutral beam, to inhibit or delay attachment or activation or clotting of platelets or to match surface energy of the device to that of a protein with the property of inhibition of bacterial colonization that can coat the all or part of the device surface to effect such inhibition.

A device such as a medical device and a method for making same provides a device surfaces modified by beam irradiation, such as a gas cluster ion beams or a neutral beam, to inhibit or delay attachment or activation or clotting of platelets or to match surface energy of the device to that of a protein with the property of inhibition of bacterial colonization that can coat the all or part of the device surface to effect such inhibition.

A method of processing a trench, via, hole, recess, void, or other feature that extends a depth into a substrate to a base or bottom and has an opening by irradiation with an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials at the base or bottom of the opening.

A method of processing a trench, via, hole, recess, void, or other feature that extends a depth into a substrate to a base or bottom and has an opening by irradiation with an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials at the base or bottom of the opening.

A negative ion-based beam injector comprising a negative ion source and an accelerator. The ions produced by the ion source are pre-accelerated before injection into a high energy accelerator by an electrostatic multi-aperture grid pre-accelerator, which is used to extract ion beams from the plasma and accelerate to some fraction of the required beam energy. The beam from the ion source passes through a pair of deflecting magnets, which enable the beam to shift off axis before entering the high energy accelerator. The negative ion-based beam injector can be combined with a neutralizer to produce about a 5 MW neutral beam with energy of about 0.50 to 1.0 MeV. After acceleration to full energy, the beam enters the neutralizer where it is partially converted into a neutral beam. The remaining ion species are separated by a magnet and directed into electrostatic energy converters. The neutral beam passes through a gate valve and enters a plasma chamber.