Cyclotron includes an acceleration chamber, a vacuum system, an ion source system, and a control system that is configured to determine at least one operating parameter as a particle beam is directed along a beam path of the cyclotron. The control system is configured to decrease a supply of the charged particles for the particle beam based on the at least one operating parameter. The particle beam continues after decreasing the supply of the charged particles. The control system is also configured to increase the supply of the charged particles for the particle beam after a predetermined time period or in response to determining that an amount of gas molecules has reduced based on the at least one operating parameter.

A compact light source based on electron beam accelerator technology includes a storage ring, a booster ring, a linear accelerator and an undulator for providing light having the characteristics for actinic mask inspection at 13.5 nm. The booster ring and the storage ring are located at different levels in a concentric top view arrangement in order to keep the required floor space small and to reduce interference effects. Quasi-continuous injection by enhanced top-up injection leads to high intensity stability and combats lifetime reductions due to elastic beam gas scattering and Touschek scattering. Injection into the storage ring and extraction from the booster ring are performed diagonal in the plane which is defined by the parallel straight section orbits of the booster ring and the storage ring. For the top-up injection from the booster ring into the storage ring two antisymmetrically arranged Lambertson septa are used.

A compact light source based on electron beam accelerator technology includes a storage ring, a booster ring, a linear accelerator and an undulator for providing light having the characteristics for actinic mask inspection at 13.5 nm. The booster ring and the storage ring are located at different levels in a concentric top view arrangement in order to keep the required floor space small and to reduce interference effects. Quasi-continuous injection by enhanced top-up injection leads to high intensity stability and combats lifetime reductions due to elastic beam gas scattering and Touschek scattering. Injection into the storage ring and extraction from the booster ring are performed diagonal in the plane which is defined by the parallel straight section orbits of the booster ring and the storage ring. For the top-up injection from the booster ring into the storage ring two antisymmetrically arranged Lambertson septa are used.

The present disclosure relates to a magnet pole for an isochronous sector-focused cyclotron having hill and valley sectors alternatively distributed around a central axis, Z, each hill sector having an upper surface bounded by four edges: an upper peripheral edge, an upper central edge, a first and a second upper lateral edges. The upper surface of at least one hill sector may further include: a recess extending over a length between a proximal end and a distal end along a longitudinal axis intersecting the upper peripheral edge and the upper central edge. The recess may be separate from the first and second upper lateral edges over at least 80% of its length, and a pole insert having a geometry fitting in the recess may be positioned in, and reversibly coupled to the recess.

The present disclosure relates to a magnet pole for an isochronous sector-focused cyclotron having hill and valley sectors alternatively distributed around a central axis, Z, each hill sector having an upper surface bounded by four edges: an upper peripheral edge, an upper central edge, a first and a second upper lateral edges. The upper surface of at least one hill sector may further include: a recess extending over a length between a proximal end and a distal end along a longitudinal axis intersecting the upper peripheral edge and the upper central edge. The recess may be separate from the first and second upper lateral edges over at least 80% of its length, and a pole insert having a geometry fitting in the recess may be positioned in, and reversibly coupled to the recess.

A vented electrode that provides a directional stop to prevent energetic particles and secondaries (i.e., secondary electrons, charged particles, photons) generated in the vent channel from reaching into a gap outside of the electrode plate. For example, ventilation is added to at least one electrode, via vented inserts, wherein the vents do not provide a direct line of sight from at least one side of the electrode plate to the other.

The present disclosure relates to a magnet pole for an isochronous sector-focused cyclotron having hill and valley sectors alternatively distributed around a central axis, Z, each hill sector having an upper surface bounded by four edges: an upper peripheral edge, an upper central edge, a first and a second upper lateral edges. The upper peripheral edge of a hill sector may be an arc of circle whose center is offset with respect to the central axis, and whose radius, Rh, is not more than 85% of a distance, Lh, from the central axis to a midpoint of the upper peripheral edge. Furthermore, the midpoint may be equidistant to the first and second upper distal ends.

The present disclosure relates to a magnet pole for an isochronous sector-focused cyclotron having hill and valley sectors alternatively distributed around a central axis, Z, each hill sector having an upper surface bounded by four edges: an upper peripheral edge, an upper central edge, a first and a second upper lateral edges. The upper peripheral edge of a hill sector may be an arc of circle whose center is offset with respect to the central axis, and whose radius, Rh, is not more than 85% of a distance, Lh, from the central axis to a midpoint of the upper peripheral edge. Furthermore, the midpoint may be equidistant to the first and second upper distal ends.

Ions are released over time from an ion source into a beam area proximate a central axis. A radiofrequency (RF) system with a variable frequency and variable voltage accelerates the ions in orbiting trajectories expanding outward from the central axis. The ions are accelerated to different extraction energy levels within a given design range at a shared extraction radius from the central axis. An RF-frequency versus ion-time-of-flight scenario is set such that the frequency versus time scenario is the same for any ion extraction energy from the given design range, and a constant-or-variable-RF-voltage versus ion-time-of-flight scenario is adjusted to provide ion acceleration from injection to extraction for ions with different respective extraction energy levels within the given design range; and the ions are extracted at the different energy levels at the shared extraction radius.

Ions are released over time from an ion source into a beam area proximate a central axis. A radiofrequency (RF) system with a variable frequency and variable voltage accelerates the ions in orbiting trajectories expanding outward from the central axis. The ions are accelerated to different extraction energy levels within a given design range at a shared extraction radius from the central axis. An RF-frequency versus ion-time-of-flight scenario is set such that the frequency versus time scenario is the same for any ion extraction energy from the given design range, and a constant-or-variable-RF-voltage versus ion-time-of-flight scenario is adjusted to provide ion acceleration from injection to extraction for ions with different respective extraction energy levels within the given design range; and the ions are extracted at the different energy levels at the shared extraction radius.