A method comprising: 1) positioning an inflatable pipe plug inside a high-vacuum beam line assembly proximate an axial gap between two beam tubes mechanically connected by a bellows-encased radio frequency (RF) shield; 2) inflating a balloon of the pipe plug proximate the axial gap to exert a uniform pressure along dislocated fingers of the RF shield; 3) angularly bending the bellows to enlarge a repair portion of the axial gap to a width larger than the dislocated finger(s); and 4) returning the dislocated finger(s) to the operation-ready RF shield position under the uniform pressure before 5) deflating and removing the inflatable pipe plug. A corrector system kit may comprise a set of custom-sized balloon(s) of a nitrile material type, a fixed-length or tailorable delivery hose, and a connector(s). A fluid (e.g., gas, liquid) pump delivers pressured fluid to the selected/tailored connector, through the delivery hose, and into the balloon.

A method comprising: 1) positioning an inflatable pipe plug inside a high-vacuum beam line assembly proximate an axial gap between two beam tubes mechanically connected by a bellows-encased radio frequency (RF) shield; 2) inflating a balloon of the pipe plug proximate the axial gap to exert a uniform pressure along dislocated fingers of the RF shield; 3) angularly bending the bellows to enlarge a repair portion of the axial gap to a width larger than the dislocated finger(s); and 4) returning the dislocated finger(s) to the operation-ready RF shield position under the uniform pressure before 5) deflating and removing the inflatable pipe plug. A corrector system kit may comprise a set of custom-sized balloon(s) of a nitrile material type, a fixed-length or tailorable delivery hose, and a connector(s). A fluid (e.g., gas, liquid) pump delivers pressured fluid to the selected/tailored connector, through the delivery hose, and into the balloon.

An ion implanter, including an ion source and extraction system, arranged to generate an ion beam at a first ion energy, and a linear accelerator, arranged to accelerate the ion beam to a second ion energy, wherein the linear accelerator comprises a plurality of acceleration stages coupled to receive a plurality of RF signals from a plurality of power assemblies, respectively. The linear accelerator may be configured wherein at least one stage of the plurality of acceleration stages is coupled to: reversibly connect to a first power assembly, comprising a resonator that contains a resonator enclosure, the first power assembly generating a first RF signal at a first frequency; to disconnect from the first power assembly; and to connect to a second power assembly, generating a second RF signal at a second frequency, greater than the first frequency, while not changing the resonator enclosure.

An ion implanter, including an ion source and extraction system, arranged to generate an ion beam at a first ion energy, and a linear accelerator, arranged to accelerate the ion beam to a second ion energy, wherein the linear accelerator comprises a plurality of acceleration stages coupled to receive a plurality of RF signals from a plurality of power assemblies, respectively. The linear accelerator may be configured wherein at least one stage of the plurality of acceleration stages is coupled to: reversibly connect to a first power assembly, comprising a resonator that contains a resonator enclosure, the first power assembly generating a first RF signal at a first frequency; to disconnect from the first power assembly; and to connect to a second power assembly, generating a second RF signal at a second frequency, greater than the first frequency, while not changing the resonator enclosure.

An ion implanter, including an ion source and extraction system, arranged to generate an ion beam at a first ion energy, and a linear accelerator, arranged to accelerate the ion beam to a second ion energy, wherein the linear accelerator comprises a plurality of acceleration stages coupled to receive a plurality of RF signals from a plurality of power assemblies, respectively. The linear accelerator may be configured wherein at least one stage of the plurality of acceleration stages is coupled to: reversibly connect to a first power assembly, comprising a resonator that contains a resonator enclosure, the first power assembly generating a first RF signal at a first frequency; to disconnect from the first power assembly; and to connect to a second power assembly, generating a second RF signal at a second frequency, greater than the first frequency, while not changing the resonator enclosure.

An ion implanter, including an ion source and extraction system, arranged to generate an ion beam at a first ion energy, and a linear accelerator, arranged to accelerate the ion beam to a second ion energy, wherein the linear accelerator comprises a plurality of acceleration stages coupled to receive a plurality of RF signals from a plurality of power assemblies, respectively. The linear accelerator may be configured wherein at least one stage of the plurality of acceleration stages is coupled to: reversibly connect to a first power assembly, comprising a resonator that contains a resonator enclosure, the first power assembly generating a first RF signal at a first frequency; to disconnect from the first power assembly; and to connect to a second power assembly, generating a second RF signal at a second frequency, greater than the first frequency, while not changing the resonator enclosure.

A vacuum protection apparatus comprises a main line conduit and at least one recirculating side chamber comprising a tesla valve, the recirculating side chamber further including a side chamber conduit, an inlet to the side chamber conduit, a curve in the side chamber conduit, and an outlet connected to the main line conduit.

A vacuum protection apparatus comprises a main line conduit and at least one recirculating side chamber comprising a tesla valve, the recirculating side chamber further including a side chamber conduit, an inlet to the side chamber conduit, a curve in the side chamber conduit, and an outlet connected to the main line conduit.