The invention relates to a method for producing a coating in which: a substrate is provided; and the substrate is provided with a coating, in particular by means of atmospheric plasma spraying, with a plasma torch having a torch nozzle being used, by means of which torch a plasma jet is generated from a supplied process gas, and with a supplied spraying material being applied to the substrate by means of the plasma jet in order to obtain the coating, wherein the torch nozzle is characterized by a nozzle diameter or a minimum nozzle diameter in the range of 4 mm to 8 mm, in particular 5 mm to 8 mm, preferably 5 mm to 7 mm, and wherein the process gas stream is at least 40 slpm. The invention further relates to a component comprising a substrate and a coating.

A plasma device applies cold atmospheric plasma to a surface to be treated, in particular to textiles, leather and/or plastic fibers. An actuator activates a plasma source, provided that a distance between the plasma source and the surface to be treated is less than a predetermined distance. The actuator has an adjustable and pre-loaded actuator element with at least one activation element and has a recording apparatus that records the position of the actuator element at least when the distance between the plasma source and the surface to be treated is less than the predetermined distance. The plasma device makes it possible to avoid risks owing to incorrect operation by the client and to avoid emissions, since the plasma source is activated only when the distance from the item to be treated (e.g., clothing to be cleaned) is less than the predetermined threshold distance.

Methods for plasma stability in a plasma treatment tool are disclosed. A laser is positioned within a plasma treatment chamber within a skin depth of the electromagnetic field generated therein. The laser can be synchronized with the electrical triggering signals that generate the electromagnetic field. This scheme provides a stable and efficient method of plasma ignition.

A plasma treatment device includes dielectric plates arranged in parallel, sets of active electrodes disposed on outwardly facing sides of the dielectric plates, respectively, and ground electrodes interposed between inwardly facing sides of the dielectric plates. The sets of active electrodes and the ground electrodes are arranged to define a plasma treatment zone, which exhibits multi-axis symmetry and which is receptive of particles, and are operable to generate plasma for plasma treating the particles therein.

There are provided a die surface treatment apparatus capable of sequentially performing reduction and activation processes on dies in a dual zone and a die bonding system including the die surface treatment apparatus. The die surface treatment apparatus includes: a stage supporting dies, a first plasma generator installed on a moving path of the dies, the first plasma generator performing a reduction process on surfaces of the dies, in a first plasma area; and a second plasma generator installed on the moving path of the dies, the second plasma generator performing a hydrophilization process on the surfaces of the dies, in a second plasma area.

The invention relates to a method for decontaminating a preform made of thermoplastic material by exposing at least part of the preform to reactive species obtained by mixing a precursor agent with a plasma, the plasma being generated by injection of a carrier gas into a reactor, the method including mixing of the precursor agent with the plasma is carried out exclusively outside the reactor before it is in contact with the preform. The invention also relates to a decontamination device for carrying out the method.

The present invention provides an apparatus of charged-particle beam e.g. an electron microscope comprising a plasma generator for selectively cleaning BSE detector. In various embodiments, the plasma generator is located between a sample stage and a sample table having one or more openings or holes. The plasma generator generates plasma and distributes or dissipates the plasma through the openings of the sample table toward and onto surface of the BSE detector. Cleaning contaminants on the surface of the BSE detector frequently and selectively with in-situ generated plasma can prevent the detectors from performance deterioration such as losing resolution and contrast in imaging at high levels of magnification.

A plasma treatment device (1), designed for treating a surface with a dielectrically impeded plasma, comprising an electrode arrangement (5) which has at least one electrode (3), and comprising dielectric (7) which completely covers the electrode (3) in relation to the surface to be treated, and comprising a housing (9) which contains a line arrangement (11) which comprises at least one high-voltage supply line (10, 10a, 10b), wherein the electrode (3) is connected to the line arrangement (11) and can be acted on by a high-voltage signal (13a, 13b), which can be applied to the high-voltage supply line (10, 10a, 10b), via the high-voltage supply line (10, 10a, 10b), allows, in a simple manner, the combination of an effective plasma treatment with an effective mechanical treatment of the surface to be treated by way of the plasma treatment device (1) having a brush head (15) which has a bristle area (17) and a bristle support (19) with a base surface (21), wherein the bristle area (17) has a large number of flexible bristles (23) and interspaces between the bristles (23), and the bristles (23) protrude from the base surface (21) of the bristle support (19) in a direction of an abutment surface (27) which is defined by those ends of the longest bristles (23) of the bristle area (17) that are averted from the base surface (21), wherein the bristle area (17) has a first length which is defined by the distance between the base surface (21) and the abutment surface (27), and wherein the at least one electrode (3) of the electrode arrangement (5), starting from the base surface (21), extends with a second length, which is smaller than the first length or equal to the first length and is at least 30% of the first length, into the bristle area (17) in the direction of the abutment surface (27).

The invention concerns a method for treating in an enclosure an inner surface of a container made from polymer material, in order to deposit a barrier-effect coating there, comprising: inserting the container into the enclosure introducing a so-called precursor gas intended into the container intended, once transformed into the plasma state, to be deposited at least partially on the inner surface of the container in order to constitute the coating, the method further comprising: transforming the precursor gas into the plasma state by a combination of excitations comprising a main excitation by means of electromagnetic waves of the microwave type, and a secondary excitation by means of an electrical discharge of alternating voltage having a frequency between 1 kHz and 15 MHz. The invention also relates to a device for implementing the method of the invention.

Atmospheric-pressure plasma generation device of the present invention includes heat sinks. Flow paths are formed in the heat sinks, and cooling gas flows in the flow paths, thereby cooling lower housing in which a reaction chamber is formed. Here, the gas used for cooling is warmed by the heat of the lower housing. The warmed gas is supplied into heated gas supply device and heated by heater. The heated gas flows in lower cover and is emitted together with plasma gas from lower cover toward a processing object. Consequently, it is possible to perform cooling of the lower housing heated by electric discharge and perform heating of the processing object, and it is possible to reduce energy required for heating gas.