A semiconductor device includes: a substrate having a cell region and a peripheral region; a thyristor on the cell region; a MOS transistor on the peripheral region; a first shallow trench isolation (STI) between the thyristor and the MOS transistor; and a second STI between the first STI and the MOS transistor. The thyristor further includes: a first semiconductor layer, a second semiconductor layer, a third semiconductor layer, and a fourth semiconductor layer on the cell region; patterned metal layers in the first semiconductor layer; vertical dielectric patterns on the patterned metal layers; and first contact plugs on the fourth semiconductor layer.

Bi-stable static random access memory (SRAM) bit cells formed from III-V compounds and configured to achieve higher operating speeds are disclosed. In one aspect, a bi-stable SRAM bit cell includes substrate, first well layer formed over substrate from a III-V compound doped with a first type material, and second well layer formed over first well layer from a III-V compound doped with a second type material. Channel layer is formed over second well layer from a III-V compound doped with the first type material. Source and drain regions are formed over channel layer from a III-V compound doped with the first type material, and gate region is formed over channel layer. Bipolar junction transistors (BJTs) are formed such that a data value can be stored in second well layer. Collector tap electrode is configured to provide access to collector of each BJT for reading or writing data.

The present disclosure relates to a method of forming an integrated circuit. In some embodiments, the method may be performed by forming a lower interconnect structure within a first inter-level dielectric (ILD) layer over an upper surface of a substrate, and forming a resistive random access memory (RRAM) device over the lower interconnect structure. A second ILD layer is formed over the RRAM device. The second ILD layer is patterned to remove a part of the second ILD layer that defines a cavity. The cavity vertically extends from an upper surface of the second ILD layer to an upper surface of the RRAM device and laterally extends past opposing sidewalls of the RRAM device. An upper interconnect wire is formed within the cavity.

The present disclosure relates to an integrated circuit having an interconnect wire contacting an upper electrode of the RRAM (resistive random access memory) device, and a method of formation. In some embodiments, the integrated circuit comprises an RRAM device having a dielectric data storage layer disposed between a lower electrode and an upper electrode. An interconnect wire contacts an upper surface of the upper electrode, and an interconnect via is arranged onto the interconnect wire. The interconnect via is set back from one or more outermost sidewalls of the interconnect wire. The interconnect wire has a relatively large size that provides for a good electrical connection between the interconnect wire and the upper electrode, thereby increasing a process window of the RRAM device.

A method for fabricating a semiconductor device includes the steps of: providing a substrate having a cell region and a peripheral region; forming a first semiconductor layer, a second semiconductor layer, a third semiconductor layer, and a fourth semiconductor layer on the substrate; forming a thyristor on the cell region; removing the first semiconductor layer, the second semiconductor layer, the third semiconductor layer, and the fourth semiconductor layer on the peripheral region; and forming a metal oxide semiconductor (MOS) transistor on the peripheral region.

A vertical thyristor memory array including: a vertical thyristor memory cell, the vertical thyristor memory cell including: a p+ anode; an n-base located below the p+ anode; a p-base located below the n-base; a n+ cathode located below the p-base; an isolation trench located around the vertical thyristor memory cell; an assist gate located in the isolation trench adjacent the n-base wherein an entire vertical height of the assist gate is positioned within an entire vertical height of the n-base.

A method for fabricating a semiconductor device includes the steps of: providing a substrate having a cell region and a peripheral region; forming a first semiconductor layer, a second semiconductor layer, a third semiconductor layer, and a fourth semiconductor layer on the substrate; forming a thyristor on the cell region; removing the first semiconductor layer, the second semiconductor layer, the third semiconductor layer, and the fourth semiconductor layer on the peripheral region; and forming a metal oxide semiconductor (MOS) transistor on the peripheral region.

A memory cell based upon thyristors for an SRAM integrated circuit can be implemented in different combinations of MOS and bipolar select transistors, or without select transistors, with thyristors in a semiconductor substrate with shallow trench isolation. Standard CMOS process technology can be used to manufacture the SRAM cells. Special circuitry provides lowered power consumption during standby.

A vertical thyristor memory array including: a vertical thyristor memory cell, the vertical thyristor memory cell including: a p+ anode; an n-base located below the p+ anode; a p-base located below the n-base; a n+ cathode located below the p-base; an isolation trench located around the vertical thyristor memory cell; an assist gate located in the isolation trench adjacent the n-base wherein an entire vertical height of the assist gate is positioned within an entire vertical height of the n-base.

A first PMOS transistor is defined by a gate electrode extending along a first gate electrode track. A first NMOS transistor is defined by a gate electrode extending along a second gate electrode track. A second PMOS transistor is defined by a gate electrode extending along the second gate electrode track. A second NMOS transistor is defined by a gate electrode extending along the first gate electrode track. The gate electrodes of the first PMOS transistor and the first NMOS transistor are electrically connected to a first gate node. The gate electrodes of the second PMOS transistor and the second NMOS transistor are electrically connected to a second gate node. Each of the first PMOS transistor, the first NMOS transistor, the second PMOS transistor, and the second NMOS transistor has a respective diffusion terminal electrically connected to a common output node.