Devices and methods of fabricating integrated circuit devices with reduced cell height are provided. One method includes, for instance: obtaining an intermediate semiconductor device having a substrate including a logic area and an SRAM area, a fin material layer, and a hardmask layer; depositing a mandrel over the logic area; depositing a sacrificial spacer layer; etching the sacrificial spacer layer to define a sacrificial set of vertical spacers; etching the hardmask layer; leaving a set of vertical hardmask spacers; depositing a first spacer layer; etching the first spacer layer to define a first set of vertical spacers over the logic area; depositing an SOH layer; etching an opening in the SOH layer over the SRAM area; depositing a second spacer layer; and etching the second spacer layer to define a second set of spacers over the SRAM area.

Fabrication method for a semiconductor memory device and structure are provided, which includes: providing at least two mask layers over a pair of fin structures extended above a substrate, wherein a first mask layer of the at least two mask layers is orthogonal to a second mask layer of the at least two mask layers; and patterning the pair of fin structures to define a pass-gate transistor, wherein the first mask layer facilitates removing of a portion of a first fin structure of the pair of fin structures to define a first pass-gate fin portion of the pass-gate transistor, and the second mask layer protects a second fin structure of the pair of fin structures to define a second pass-gate fin portion of the pass-gate transistor.

At least one method, apparatus and system disclosed involves a memory device having a memory cell comprising NMOS only transistors. An SRAM bit cell comprises a first pass gate (PG) NMOS transistor coupled to a first bit line signal and a word line signal; a second PG NMOS transistor coupled to a second bit line signal and the word line signal; a first pull down (PD) NMOS transistor operatively coupled to the first PG NMOS transistor; a second PD NMOS transistor operatively coupled to the second PG NMOS transistor; a first pull up (PU) NMOS transistor operatively coupled to the first PD NMOS transistor; and a second PU NMOS transistor operatively coupled to the second PD NMOS transistor. Each of the back gates of the first and second PU NMOS transistors are coupled to a predetermined voltage signal for biasing the first and second PU NMOS transistors.

6T-SRAM cell designs for larger SRAM arrays and methods of manufacture generally include a single fin device for both nFET (pass-gate (PG) and pull-down (PD)) and pFET (pull-up (PU). The pFET can be configured with a smaller effective channel width (Weff) than the nFET or with a smaller active fin height. An SRAM big cell consumes the (111) 6t-SRAM design area while provide different Weff ratios other than 1:1 for PU/PD or PU/PG as can be desired for different SRAM designs.

A method for forming ultra-high density integrated circuitry, such as for a 6T SRAM, for example, is provided. The method involves applying double patterning litho-etch litho-etch (LELE) and using a spacer process to shrink the critical dimension of features. To improve process margins, the method implements a double-patterning technique by modifying the layout and splitting cross-coupling straps into two colors (e.g., each color corresponds to a mask-etch process). In addition, a spacer process is implemented to shrink feature size and increase the metal-to-metal spacing between the two cross-coupling straps, in order to improve process margin and electrical performance. This is achieved by depositing a spacer layer over an opening in a hardmask, followed by spacer etch back. The opening is thus shrunk by the amount of spacer thickness. The strap-to-strap spacing may then be increased by twice the amount of spacer thickness.

An integrated circuit structure in which a gate overlies channel region in an active area of a first transistor. The first transistor includes a channel region, a source region and a drain region. A conductive contact is coupled to the drain region of the first transistor. A second transistor that includes a channel region, a source region a drain region is adjacent to the first transistor. The gate of the second transistor is spaced from the gate of the first transistor. A conductive via passes through an insulation layer to electrically connect to the gate of the second transistor. An expanded conductive via overlays both the conductive contact and the conductive via to electrically connect the drain of the first transistor to the gate of the second transistor.

The method for manufacturing a three-dimensional static random-access memory, including: manufacturing a first semiconductor structure including multiple MOS transistors and a first insulating layer thereon; bonding a first material layer to the first insulating layer to form a first substrate layer; manufacturing multiple first low-temperature MOS transistors at a low temperature on the first substrate layer, and forming a second insulating layer thereon to form a second semiconductor structure; bonding a second material layer to the second insulating layer to form a second substrate layer; manufacturing multiple second low-temperature MOS transistors at a low temperature on the second substrate layer, and forming a third insulating layer thereon to form a third semiconductor structure; and forming an interconnection layer which interconnets the first semiconductor structure, the second semiconductor structure and the third semiconductor structure.

A method of forming a semiconductor structure is provided. The method includes forming a gate structure over an active region of a substrate, forming an epitaxial layer comprising first dopants of a first conductivity type over portions of the active region on opposite sides of the gate structure, the epitaxial layer, applying a cleaning solution comprising ozone and deionized water to the epitaxial layer, thereby forming an oxide layer on the epitaxial layer, forming a patterned photoresist layer over the oxide layer and the gate structure to expose a portion of the oxide layer, forming a contact region second dopants of a second conductivity type opposite the first conductivity type in the portion of the epitaxial layer not covered by the patterned photoresist layer, and forming a contact overlying the contact region.

An IC package includes a substrate, a first monolithic die, a second monolithic die and a third monolithic die. A processing unit circuit is formed in the first monolithic die. A plurality of SRAM arrays are formed in the second monolithic die, wherein the plurality of SRAM arrays include at least 5-20 G Bytes. A plurality of DRAM arrays are formed in the third monolithic die, wherein the plurality of DRAM arrays include at least 64-512 G Bytes. The first monolithic die, the second monolithic die and the third monolithic die are vertically stacked above the substrate. The third monolithic die is electrically connected to the first monolithic die through the second monolithic die.

In certain aspects, a memory device includes a bit line, a plurality of memory cells coupled with the bit line, and N selectors, where N is a positive integer greater than 1, and N word lines. Each one of the plurality of memory cells includes N phase-change memory (PCM) elements. Each one of the N selectors is coupled with a respective one of the N PCM elements. Each one of the N word lines is coupled with a respective one of the N selectors.