A device includes a Static Random Access Memory (SRAM) array, and an SRAM cell edge region abutting the SRAM array. The SRAM array and the SRAM cell edge region in combination include first gate electrodes having a uniform pitch. A word line driver abuts the SRAM cell edge region. The word line driver includes second gate electrodes, and the first gate electrodes have lengthwise directions aligned to lengthwise directions of respective ones of the second gate electrodes.

A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where the first transistors each include a single crystal channel; first metal layers interconnecting at least the first transistors; a second metal layer overlaying the first metal layers; and a second level including a second single crystal layer, the second level including second transistors, where the second level overlays the first level, where the second transistors each include at least two side-gates, where the second level is bonded to the first level, and where the bonded includes oxide to oxide bonds.

A method for producing a 3D semiconductor device including: providing a first level including a first single crystal layer; forming peripheral circuitry in and/or on the first level, and includes first single crystal transistors; forming a first metal layer on top of the first level; forming a second metal layer on top of the first metal layer; forming second level disposed on top of the second metal layer; performing a first lithography step; forming a third level on top of the second level; performing a second lithography step; processing steps to form first memory cells within the second level and second memory cells within the third level, where the plurality of first memory cells include at least one second transistor, and the plurality of second memory cells include at least one third transistor; and deposit a gate electrode for second and third transistors simultaneously.

A 3D semiconductor device, the device comprising: a first level comprising a first single crystal layer, said first level comprising first transistors, wherein each of said first transistors comprises a single crystal channel; first metal layers interconnecting at least said first transistors; a second metal layer overlaying said first metal layers; and a second level comprising a second single crystal layer, said second level comprising second transistors, wherein said second level overlays said first level, wherein at least one of said second transistors comprises a gate all around structure, wherein said second level is directly bonded to said first level, and wherein said bonded comprises direct oxide to oxide bonds.

Embodiments of three-dimensional (3D) memory devices with a 3D NAND memory array having a plurality of pages, an on-die cache coupled to the memory array on a same chip and configured to cache a plurality of batches of program data between a host and the memory array, the on-die cache having SRAM cells, and a controller coupled to the on-die cache on the same chip. The controller is configured to check a status of an (N−2).sup.th batch of program data, N being an integer equal to or greater than 2, program an (N−1).sup.th batch of program data into respective pages in the 3D NAND memory array, and cache an N.sup.th batch of program data in respective space in the on-die cache as a backup copy of the N.sup.th batch of program data.

An IC is provided. The IC includes a plurality of a plurality of P-type fin field-effect transistors (FinFETs). The P-type FinFETs includes at least one first P-type FinFET and at least one second P-type FinFET. Source/drain regions of the first P-type FinFET have a first depth, and source/drain regions of the second P-type FinFET have a second depth that is different from the first depth. A first semiconductor fin of the first P-type FinFET includes a first portion and a second portion that are formed by different materials, and the second portion of the first semiconductor fin has a third depth that is greater than the first depth.

An integrated circuit device includes an active area extending in a first direction on a substrate and a gate line extending in a second direction intersecting with the first direction to intersect with the active area. The gate line comprises a first sidewall and a second sidewall opposite to each other. The first sidewall has a convex shape. The second sidewall has a concave shape.

Memory devices are provided. In an embodiment, a memory device includes a static random access memory (SRAM) array. The SRAM array includes a static random access memory (SRAM) array. The SRAM array includes a first subarray including a plurality of first SRAM cells and a second subarray including a plurality of second SRAM cells. Each n-type transistor in the plurality of first SRAM cells includes a first work function stack and each n-type transistor in the plurality of second SRAM cells includes a second work function stack different from the first work function stack.

A includes depositing a gate electrode layer over a semiconductor substrate; patterning the gate electrode layer into a first gate electrode and a gate electrode extending portion; forming a first gate spacer alongside the first gate electrode; patterning the gate electrode extending portion into a second gate electrode after forming the first gate spacer; and forming a second gate spacer alongside the second gate electrode and a third gate spacer around the first spacer.

Embodiments of semiconductor devices and fabrication methods thereof are disclosed. In an example, first semiconductor structures are formed. At least one of the first semiconductor structures includes a processor, static random-access memory (SRAM) cells, and a first bonding layer comprising first bonding contacts. Second semiconductor structures are formed. At least one of the second semiconductor structures comprises dynamic random-access memory (DRAM) cells and a second bonding layer comprising second bonding contacts. The first semiconductor structures and the second semiconductor structures are bonded. The first bonding contacts of the first semiconductor structure are in contact with the second bonding contacts of the second semiconductor structure. At least one of the first semiconductor structures and the second semiconductor structures further includes a peripheral circuit.