Examples herein relate to a memory device comprising an eDRAM memory cell, the eDRAM memory cell can include a write circuit formed at least partially over a storage cell and a read circuit formed at least partially under the storage cell; a compute near memory device bonded to the memory device; a processor; and an interface from the memory device to the processor. In some examples, circuitry is included to provide an output of the memory device to emulate output read rate of an SRAM memory device comprises one or more of: a controller, a multiplexer, or a register. Bonding of a surface of the memory device can be made to a compute near memory device or other circuitry. In some examples, a layer with read circuitry can be bonded to a layer with storage cells. Any layers can be bonded together using techniques described herein.

On P layer bases extending in a band shape in a first direction in plan view, N.sup.+ layers also extending in a band shape in the first direction and Si pillars are formed. Subsequently, a gate insulating layer and gate conductor layers are formed so as to surround the Si pillars. Subsequently, contact holes whose bottom portions are in contact with the N.sup.+ layers are formed in an insulating layer, and first conductor W layers are formed at the bottom portions of the contact holes. Subsequently, insulating layers each having a hole are formed in the contact holes. Subsequently, a second conductor W layer is formed in a second direction perpendicular to the first direction so as to be connected to the gate conductor layers.

A Dynamic Random Access Memory (DRAM) capacitor and a preparation method therefor are provided. The DRAM capacitor includes a dielectric layer, and the dielectric layer includes a high dielectric material layer, and low dielectric loss material layers provided on both side surfaces of the high dielectric material layer.

Embodiments provide method for fabricating a semiconductor structure, and a semiconductor structure. The method includes: providing a substrate, a thin-film stack structure being formed on the substrate; forming a first groove and a second groove in the thin-film stack structure, and forming write transistors in the first groove, the second groove extending along a first direction, and the second groove being positioned between adjacent two of the write transistors in a second direction; removing a part of the thin-film stack structure by etching using the second groove to form a first hole and a second hole respectively, forming a write word line in the first hole, and forming a write bit line in the second hole; forming a first via on an upper surface of the thin-film stack structure, and forming a storage node in the first via; and forming a read transistor, a read bit line and a lead.

Apparatuses and methods to provide a patterned substrate are described. A plurality of patterned and spaced first lines and carbon material lines and formed on the substrate surface by selectively depositing and etching films extending in a first direction and films extending in a second direction that crosses the first direction to pattern the underlying structures.

Various 3D memory cells, array architectures, and processes are disclosed. In an embodiment, a memory cell structure is provided that is formed by a process of alternately depositing multiple semiconductor layers and insulating layers to form a stack, forming vertical bit line holes through the stack using a deep trench process, and forming floating bodies in the semiconductor layers using an isotropic doping process through the bit line holes.

An N.sup.+ layer connected to a source line SL at both ends of individual Si pillars standing in a vertical direction; N.sup.+ layers connected to a bit line BL1; N.sup.+ layers connected to a bit line BL2; a TiN layer surrounding gate HfO.sub.2 layers surrounding the individual Si pillars, being continuous between the individual Si pillars, and connected to a plate line PL; a TiN layer surrounding gate HfO.sub.2 layers surrounding the four Si pillars, being continuous between the individual Si pillars, and connected to a word line WL1; and a TiN layer connected to a word line WL2 are formed on a substrate. Voltages to be applied to the source line SL, the plate line PL, the word lines WL1 and WL2, and the bit lines BL1 and BL2 are controlled to perform a data hold operation of holding, in any or all of the Si pillars, a positive hole group generated by an impact ionization phenomenon or a gate-induced drain-leakage current, and a data erase operation of discharging the positive hole group from the Si pillars.

Various 3D memory cells, array architectures, and processes are disclosed. In an embodiment, a memory cell structure is provided that is formed by a process of alternately depositing multiple semiconductor layers and sacrificial layers to form a stack, forming vertical bit line holes through the stack using a deep trench process, forming floating bodies in the semiconductor layers using an isotropic doping process through the bit line holes, depositing conductor material to fill the bit line holes, removing the sacrificial layers, depositing a gate dielectric layer between the semiconductor layers, and depositing gate material onto the gate dielectric layer.

The present disclosure relates to a method for preparing a semiconductor device including a conductive contact having a tapering profile and a method for preparing the semiconductor device. The method includes forming a conductive layer over a semiconductor substrate, and forming a dielectric layer covering the conductive layer. The method also includes etching the dielectric layer to form an opening exposing the conductive layer, and etching the dielectric layer to form a first recess and a second recess connecting to the opening. A depth of the opening is greater than a depth of the first recess and a depth of the second recess, and the first recess and the second recess have tapering profiles that taper toward the conductive layer. The method further includes forming a conductive contact over the conductive layer. The opening, the first recess and the second recess are filled by the conductive contact.

A method for manufacturing a plurality of semiconductor structures is provided. The method includes the operations as follows. A first hybrid bonding layer is formed over a first wafer including a plurality of first memory structures. A second hybrid bonding layer is formed over a second wafer including a plurality of control circuit structures. The memory structures and the control circuit structures are in contact with the first and the second hybrid bonding layers, respectively. The first wafer and the second wafer are bonded through a first hybrid bonding operation to connect the first and the second hybrid bonding layers, thereby obtaining a first bonded wafer. At least the first wafer, the second wafer, the first hybrid bonding structure, and the second hybrid bonding structure are singulated to obtain the plurality of semiconductor structures. A method for manufacturing a system in package (SiP) is also provided.