Various 3D memory cells, array architectures, and processes are disclosed. In an embodiment, a memory cell structure is provided that is formed by a process of alternately depositing multiple semiconductor layers and insulating layers to form a stack, forming vertical bit line holes through the stack using a deep trench process, and forming floating bodies in the semiconductor layers using an isotropic doping process through the bit line holes.

A dynamic flash memory cell and a fin transistor are formed on a P layer substrate 10a. The dynamic flash memory cell includes a first insulating layer 11a, a fin P layer 25, N.sup.+ layers 35ba and 35bb, a gate insulating layer 27b, and gate conductor layers 30ba and 30bb; the fin transistor includes a fin P layer 22 including fin P layers 15a and 15b, N.sup.+ layers 35aa and 35ab, a gate insulating layer 27a, and a gate conductor layer 30a; in a perpendicular direction, a top portion of the fin P layer 25 is positioned close to or higher than a top portion of the fin P layer 15a, bottom portions of the gate insulating layers 27a and 27b are positioned close to each other, and a bottom portion of the fin semiconductor layer 15b is positioned within the P layer substrate 10a.

Provided on a substrate are a first insulating layer; a first metal wire layer embedded therein; a second metal wire layer extending vertically on the first metal wire layer; a first n+ layer on the second metal wire layer, a semiconductor p layer on the first n+ layer, and a second n+ layer on the semiconductor p layer, each extending vertically; a gate insulating layer partially covering them; first and second electrically isolated gate conductor layers around the gate insulating layer; a second insulating layer partially covering the first and second n+ layers and the first and second gate conductor layers; a third insulating layer on the second insulating layer, partially covering the second n+ layer and the second gate conductor layer; and a fourth metal wire layer connecting to the second n+ layer via a contact hole. A fifth metal wire layer connects to the second gate conductor layer.

An N.sup.+ layer connected to a source line SL at both ends of individual Si pillars standing in a vertical direction; N.sup.+ layers connected to a bit line BL1; N.sup.+ layers connected to a bit line BL2; a TiN layer surrounding gate HfO.sub.2 layers surrounding the individual Si pillars, being continuous between the individual Si pillars, and connected to a plate line PL; a TiN layer surrounding gate HfO.sub.2 layers surrounding the four Si pillars, being continuous between the individual Si pillars, and connected to a word line WL1; and a TiN layer connected to a word line WL2 are formed on a substrate. Voltages to be applied to the source line SL, the plate line PL, the word lines WL1 and WL2, and the bit lines BL1 and BL2 are controlled to perform a data hold operation of holding, in any or all of the Si pillars, a positive hole group generated by an impact ionization phenomenon or a gate-induced drain-leakage current, and a data erase operation of discharging the positive hole group from the Si pillars.

Various 3D memory cells, array architectures, and processes are disclosed. In an embodiment, a memory cell structure is provided that is formed by a process of alternately depositing multiple semiconductor layers and sacrificial layers to form a stack, forming vertical bit line holes through the stack using a deep trench process, forming floating bodies in the semiconductor layers using an isotropic doping process through the bit line holes, depositing conductor material to fill the bit line holes, removing the sacrificial layers, depositing a gate dielectric layer between the semiconductor layers, and depositing gate material onto the gate dielectric layer.

An IC may include an array of memory cells formed in a semiconductor, including memory cells arranged in rows and columns, each memory cell may include a floating body region defining at least a portion of a surface of the memory cell, the floating body region having a first conductivity type; a buried region located within the memory cell and located adjacent to the floating body region, wherein the buried region has a second conductivity type, wherein the floating body region is bounded on a first side by a first insulating region having a first thickness and on a second side by a second insulating region having a second thickness, and a gate region above the floating body region and the second insulating region and is insulated from the floating body region by an insulating layer; and control circuitry configured to provide electrical signals to said buried region.

Some embodiments include apparatuses and methods using a substrate, a pillar having a length perpendicular to the substrate, a first conductive plate, a second conductive plate, a memory cell located between the first and second conductive plates and electrically separated from the first and second conductive plates, and a conductive connection. The first conductive plate is located in a first level of the apparatus and being separated from the pillar by a first dielectric located in the first level. The second conductive plate is located in a second level of the apparatus and being separated from the pillar by a second dielectric located in the second level. The memory cell includes a first semiconductor material located in a third level of the apparatus between the first and second levels and contacting the pillar and the conductive connection, and a second semiconductor material located in a fourth level of the apparatus between the first and second levels and contacting the pillar.

A semiconductor device, the device comprising: a plurality of transistors, wherein at least one of said plurality of transistors comprises a first single crystal source, channel, and drain, wherein at least one of said plurality of transistors comprises a second single crystal source, channel, and drain, wherein said second single crystal source, channel, and drain is disposed above said first single crystal source, channel, and drain, wherein at least one of said plurality of transistors comprises a third single crystal source, channel, and drain, wherein said third single crystal source, channel, and drain is disposed above said second single crystal source, channel, and drain, wherein at least one of said plurality of transistors comprises a fourth single crystal source, channel, and drain, and wherein said first single crystal channel is self-aligned to said second single crystal channel being processed following the same lithography step.

Provided are a solid-state image-capturing element and an electronic device capable of reducing the capacitance by using a hollow region. At least a part of a region between an FD wiring connected to a floating diffusion and a wiring other than the FD wiring is a hollow region. The present disclosure can be applied to a CMOS image sensor having, for example, a floating diffusion, a transfer transistor, an amplifying transistor, a selection transistor, a reset transistor, and a photodiode.

A 3D semiconductor device, the device comprising: a first level comprising a first single crystal layer, said first level comprising first transistors, wherein each of said first transistors comprises a single crystal channel; first metal layers interconnecting at least said first transistors; a second metal layer overlaying said first metal layers; and a second level comprising a second single crystal layer, said second level comprising second transistors, wherein said second level overlays said first level, wherein at least one of said second transistors comprises a gate all around structure, wherein said second level is directly bonded to said first level, and wherein said bonded comprises direct oxide to oxide bonds.