Embodiments herein describe techniques for a semiconductor device including a memory cell vertically above a substrate. The memory cell includes a metal-insulator-metal (MIM) capacitor at a lower device portion, and a transistor at an upper device portion above the lower device portion. The MIM capacitor includes a first plate, and a second plate separated from the first plate by a capacitor dielectric layer. The first plate includes a first group of metal contacts coupled to a metal electrode vertically above the substrate. The first group of metal contacts are within one or more metal layers above the substrate in a horizontal direction in parallel to a surface of the substrate. Furthermore, the metal electrode of the first plate of the MIM capacitor is also a source electrode of the transistor. Other embodiments may be described and/or claimed.

A memory cell comprises a nanowire structure comprising a channel region and source/drain regions of a transistor. The nanowire structure also comprises as first conductor of a capacitive device as a vertical extension of the nanowire structure.

A semiconductor device includes a semiconductor substrate and word line structures. A plurality of active areas are formed in the substrate, and the plurality of active areas are isolated by an isolation structure. The isolation structure includes first areas and second areas. A dimension of the second areas is larger than that of the first areas in first direction. The word line structures are below a surface of the substrate and extend in first direction. The word line structures penetrate the isolation structure and the plurality of active areas. A word line structure includes first sub-word line structures located in first areas and second sub-word line structures located in second areas. The first sub-word line structures have first dimension in second direction, and the second sub-word line structures have second dimension at least larger than first dimension in second direction. The second direction forms an included angle with first direction.

A method for manufacturing a capacitor array includes: providing a substrate provided with a device area configured for forming a capacitor and a peripheral area located at a periphery of the device area; forming successively a first support layer and a first sacrificial layer on the substrate; etching the first sacrificial layer of the peripheral area to expose the first support layer, so as to form a first via; and filling the first via to form a support pillar.

The present disclosure discloses a method of manufacturing a semiconductor structure and a semiconductor structure, and relates to the technical field of semiconductors. The method includes: providing a base, active regions arranged at intervals along a first direction being arranged in the base; forming, on the base, bit line structures arranged at intervals; forming a contact structure between two adjacent ones of the bit line structures; forming a barrier structure on the contact structure, the barrier structures being arranged in correspondence with and connected to the bit line structure, and a first recess being formed between any adjacent barrier structures; and forming a conductive structure in the first recess, the conductive structure including a protective layer and a conductive portion, and the protective layer wrapping a sidewall and a bottom wall of the conductive portion.

An integrated circuit structure comprises one or more backend-of-line (BEOL) interconnects formed over a first ILD layer. An etch stop layer is over the one or more BEOL interconnects, the etch stop layer having a plurality of vias that are in contact with the one or more BEOL interconnects. An array of BEOL thin-film-transistors (TFTs) is over the etch stop layer, wherein adjacent ones of the BEOL TFTs are separated by isolation trench regions. The TFTs are aligned with at least one of the plurality of vias to connect to the one or more BEOL interconnects, wherein each of the BEOL TFTs comprise a bottom gate electrode, a gate dielectric layer over the bottom gate electrode, and an oxide-based semiconductor channel layer over the bottom gate electrode having source and drain regions therein. Contacts are formed over the source and drain regions of each of BEOL TFTs, wherein the contacts have a critical dimension of 35 nm or less, and wherein the BEOL TFTs have an absence of diluted hydro-fluoride (DHF).

Semiconductor devices including vertically-stacked combination memory devices and associated systems and methods are disclosed herein. The vertically-stacked combination memory devices include at least one volatile memory die and at least one non-volatile memory die stacked on top of each other. The corresponding stack may be attached to a controller die that is configured to provide interface for the attached volatile and non-volatile memory dies.

A memory cell includes a select device and a capacitor electrically coupled in series with the select device. The capacitor includes two conductive capacitor electrodes having ferroelectric material there-between. The capacitor has an intrinsic current leakage path from one of the capacitor electrodes to the other through the ferroelectric material. There is a parallel current leakage path from the one capacitor electrode to the other. The parallel current leakage path is circuit-parallel the intrinsic path and of lower total resistance than the intrinsic path. Other aspects are disclosed.

A three-dimensional semiconductor device includes a first channel pattern on and spaced apart from a substrate, the first channel pattern having a first end and a second end that are spaced apart from each other in a first direction parallel to a top surface of the substrate, and a first sidewall and a second sidewall connecting between the first end and the second end, the first and second sidewalls being spaced apart from each other in a second direction parallel to the top surface of the substrate, the second direction intersecting the first direction, a bit line in contact with the first end of the first channel pattern, the bit line extending in a third direction perpendicular to the top surface of the substrate, and a first gate electrode adjacent to the first sidewall of the first channel pattern.

A memory device having long data retention time and high reliability is provided. The memory device includes a driver circuit and a plurality of memory cells, the memory cell includes a transistor and a capacitor, and the transistor includes a metal oxide in a channel formation region. The transistor includes a first gate and a second gate, and in a period during which the memory cell retains data, negative potentials are applied to the first gate and the second gate of the transistor.