A semiconductor device includes a lower structure, stack structure including gate electrodes stacked and spaced apart from each other on a first region of the lower structure and extending in a staircase shape on a second region of the lower structure, and interlayer insulating layers alternately stacked with the gate electrodes, channel structures penetrating through the gate electrodes on the first region, and isolation structures penetrating through the gate electrodes spaced apart from each other. Each channel structure a channel bent portion between first and second channel structures. Each isolation structure includes a first isolation bent portion between first and second isolation structures and a second isolation bent portion between second and third isolation structures. A width of an upper surface of the second isolation structure is narrower than a width of a lower surface of the third isolation structure.

A semiconductor device and a method of manufacturing the semiconductor includes a first source layer spaced apart from a substrate and disposed in a memory cell region of the substrate, a second source layer spaced apart from the substrate and disposed in a contact region of the substrate, a cell stacked structure including interlayer insulating layers and conductive patterns alternately stacked on each other over the first source layer, a discharge contact passing through at least a part of the second source layer, and a dielectric layer disposed between the second source layer and the discharge contact.

A semiconductor device includes a peripheral circuit region comprising a first substrate, circuit elements on the first substrate, a first insulating layer covering the circuit elements, and a contact plug passing through the first insulating layer and disposed to be connected to the first substrate; and a memory cell region comprising a second substrate, gate electrodes on the second substrate and stacked in a vertical direction, and channel structures passing through the gate electrodes, wherein the contact plug comprises a metal silicide layer disposed to contact the first substrate and having a first thickness, a first metal nitride layer on the metal silicide layer to contact the metal silicide layer and having a second thickness, greater than the first thickness, a second metal nitride layer on the first metal nitride layer, and a conductive layer on the second metal nitride layer.

A vertical-type nonvolatile memory device including: a substrate including a cell array area and an extension area, the extension area extending in a first direction from the cell array area and including contacts; a channel structure extending in a vertical direction from the substrate; a first stack structure including gate electrode layers and interlayer insulating layers alternately stacked along sidewalls of the channel structure; a plurality of division areas extending in the first direction and dividing the cell array area and the extension area in a second direction perpendicular to the first direction; in the extension area, two insulating layer dams are arranged between two division areas adjacent to each other; a second stack structure including sacrificial layers and interlayer insulating layers alternately stacked on the substrate between the two insulating layer dams; and an electrode pad connected to a first gate electrode layer in the extension area.

A vertical memory device includes gate electrodes on a substrate, a channel extending through the gate electrodes, and a contact plug extending through the gate electrodes. The gate electrodes are stacked in a first direction substantially vertical to an upper surface of the substrate and arranged to have a staircase shape including steps of which extension lengths in a second direction substantially parallel to the upper surface gradually increase from a lowermost level toward an uppermost level. A pad at an end portion of each of the gate electrodes in the second direction has a thickness greater than those of other portions thereof. The channel extends in the first direction. The contact plug extends in the first direction. The channel contacts the pad of a first gate electrode among the gate electrodes to be electrically connected thereto, and is electrically insulated from second gate electrodes among the gate electrodes.

A vertical memory device includes gate electrodes on a substrate, a channel extending through the gate electrodes, and a contact plug extending through the gate electrodes. The gate electrodes are stacked in a first direction substantially vertical to an upper surface of the substrate and arranged to have a staircase shape including steps of which extension lengths in a second direction substantially parallel to the upper surface gradually increase from a lowermost level toward an uppermost level. A pad at an end portion of each of the gate electrodes in the second direction has a thickness greater than those of other portions thereof. The channel extends in the first direction. The contact plug extends in the first direction. The channel contacts the pad of a first gate electrode among the gate electrodes to be electrically connected thereto, and is electrically insulated from second gate electrodes among the gate electrodes.

Some embodiments include an integrated assembly having a conductive structure which includes a semiconductor material over a metal-containing material. A stack of alternating conductive levels and insulative levels is over the conductive structure. A partition extends through the stack. The partition has wall regions, and has corner regions where two or more wall regions meet. The conductive structure includes a first portion which extends directly under the corner regions, and includes a second portion which is directly under the wall regions and is not directly under the corner regions. The first portion has a first thickness of the semiconductor material and the second portion has a second thickness of the semiconductor material. The first thickness is greater than the second thickness. Some embodiments include methods of forming integrated assemblies.

A semiconductor storage device includes a memory cell array including a stacked body having insulating layers and conductive layers that are alternately stacked. The memory cell array includes a cell area and a contact area provided adjacent the cell area. The semiconductor storage device includes: a circuit below the memory cell array; a source layer between the memory cell array and the circuit; a first contact in the contact area, and coupled to the circuit; a second contact over the cell area and the contact area; a first wiring extending in a direction intersecting an extending direction of the second contact in the contact area; a second wiring above the second contact, extending along the second contact in the contact area, and connected to the first wiring; and third contacts between the second wiring and the second contact.

A semiconductor storage device includes a memory cell array including a stacked body having insulating layers and conductive layers that are alternately stacked. The memory cell array includes a cell area and a contact area provided adjacent the cell area. The semiconductor storage device includes: a circuit below the memory cell array; a source layer between the memory cell array and the circuit; a first contact in the contact area, and coupled to the circuit; a second contact over the cell area and the contact area; a first wiring extending in a direction intersecting an extending direction of the second contact in the contact area; a second wiring above the second contact, extending along the second contact in the contact area, and connected to the first wiring; and third contacts between the second wiring and the second contact.

Embodiments of semiconductor devices and fabrication methods thereof are disclosed. In an example, a semiconductor device includes NAND memory cells and a first bonding layer including first bonding contacts. The semiconductor device also includes a second semiconductor structure including DRAM cells and a second bonding layer including second bonding contacts. The semiconductor device also includes a third semiconductor structure including a processor, SRAM cells, and a third bonding layer including third bonding contacts. The semiconductor device further includes a first bonding interface between the first and third bonding layers, and a second bonding interface between the second and third bonding layers. The first bonding contacts are in contact with a first set of the third bonding contacts at the first bonding interface. The second bonding contacts are in contact with a second set of the third bonding contacts at the second bonding interface. The first and second bonding interfaces are in a same plane.