A ferroelectric memory device includes a multi-layer stack, a ferroelectric layer, and channel layers. The multi-layer stack is disposed on a substrate and includes conductive layers and dielectric layers stacked alternately. The ferroelectric layer has a curvy profile and is disposed along sidewalls of the conducive layers and sidewalls of the dielectric layers. The channel layers are separated from each other and disposed on the ferroelectric layer, and correspond to the conductive layers respectively.

A ferroelectric memory device includes a multi-layer stack, a ferroelectric layer, and channel layers. The multi-layer stack is disposed on a substrate and includes conductive layers and dielectric layers stacked alternately. The ferroelectric layer has a curvy profile and is disposed along sidewalls of the conducive layers and sidewalls of the dielectric layers. The channel layers are separated from each other and disposed on the ferroelectric layer, and correspond to the conductive layers respectively.

A memory device includes a first etch stop layer, an etch stop pattern, a second etch stop layer, a plurality of stacks and a first conductive pillar. The etch stop pattern is disposed in the first etch stop layer. The second etch stop layer is disposed on the first etch stop layer and the etch stop pattern, wherein a material of the etch stop pattern is different from a material of the first etch stop layer and a material of the second etch stop layer. The stacks are disposed on the second etch stop layer. The first conductive pillar is disposed between the stacks, wherein the first conductive pillar extends along the stacks and the second etch stop layer to be in physical contact with the etch stop pattern.

A memory device includes a first etch stop layer, an etch stop pattern, a second etch stop layer, a plurality of stacks and a first conductive pillar. The etch stop pattern is disposed in the first etch stop layer. The second etch stop layer is disposed on the first etch stop layer and the etch stop pattern, wherein a material of the etch stop pattern is different from a material of the first etch stop layer and a material of the second etch stop layer. The stacks are disposed on the second etch stop layer. The first conductive pillar is disposed between the stacks, wherein the first conductive pillar extends along the stacks and the second etch stop layer to be in physical contact with the etch stop pattern.

A memory device includes a first conductive via, a first conductive line, an etch stop layer, a plurality of stacks and a first conductive pillar. The first conductive line is disposed on and in physical contact with the first conductive via. The etch stop layer is disposed on and in physical contact with the first conductive line. The stacks are disposed on the etch stop layer. The first conductive pillar is disposed between the stacks. The first conductive pillar extends between opposite surfaces of the stacks to be in physical contact with the first conductive line.

A memory device includes a first conductive via, a first conductive line, an etch stop layer, a plurality of stacks and a first conductive pillar. The first conductive line is disposed on and in physical contact with the first conductive via. The etch stop layer is disposed on and in physical contact with the first conductive line. The stacks are disposed on the etch stop layer. The first conductive pillar is disposed between the stacks. The first conductive pillar extends between opposite surfaces of the stacks to be in physical contact with the first conductive line.

The invention provides a non-volatile storage element and non-volatile storage device employing a ferroelectric material with low power consumption, excellent high reliability, and especially write/erase endurance, which can be mixed with advanced CMOS logic. The non-volatile storage element has at least a first conductive layer, a second conductive layer, and a ferroelectric layer composed of a metal oxide between both conductive layers, with a buffer layer having oxygen ion conductivity situated between the ferroelectric layer and the first conductive layer and/or second conductive layer. An interface layer composed of a single-layer film or a multilayer film may be also provided between the first conductive layer and the ferroelectric layer, the interface layer as a whole having higher dielectric constant than silicon oxide, and when the buffer layer is present between the first conductive layer and the ferroelectric layer, the interface layer is situated between the first conductive layer and the buffer layer. The non-volatile storage device comprises at least a memory cell array comprising low-power-consumption ferroelectric memory elements formed in a two-dimensional or three-dimensional configuration, and a control circuit. The ferroelectric layer is scalable to 10 nm or smaller and is fabricated at a low temperature of ≤400° C., and is subjected to low temperature thermal annealing treatment at ≤400° C. after the buffer layer has been formed, to provide high reliability.

In an embodiment, a device includes: a first word line over a substrate, the first word line including a first conductive material; a first bit line intersecting the first word line; a first memory film between the first bit line and the first word line; and a first conductive spacer between the first memory film and the first word line, the first conductive spacer including a second conductive material, the second conductive material having a different work function than the first conductive material, the first conductive material having a lower resistivity than the second conductive material.

A semiconductor device includes a first memory cell that includes: a first conductor structure extending along a first lateral direction; a first portion of a first memory film wrapping around a first portion of the first conductor structure; a first semiconductor film wrapping around the first portion of the first memory film; a second conductor structure extending along a vertical direction and coupled to a first sidewall of the first semiconductor film, wherein the first sidewall faces toward or away from a second lateral direction perpendicular to the first lateral direction; and a third conductor structure extending along the vertical direction and coupled to a second sidewall of the first semiconductor film, wherein the second sidewall faces toward or away from the second lateral direction.

A semiconductor device includes first conductive lines provided on a substrate and spaced apart from each other in a first direction perpendicular to a top surface of the substrate, second conductive lines spaced apart from the first conductive lines in a second direction parallel to the top surface of the substrate, a gate electrode disposed between the first and second conductive lines and extended in the first direction, a plurality of channel patterns provided to enclose a side surface of the gate electrode and spaced apart from each other in the first direction, a ferroelectric pattern between each of the channel patterns and the gate electrode, and a gate insulating pattern between each of the channel patterns and the ferroelectric pattern. Each of the channel patterns is connected to a corresponding one of the first conductive lines and a corresponding one of the second conductive lines.