A packaging technology to improve performance of an AI processing system resulting in an ultra-high bandwidth system. An IC package is provided which comprises: a substrate; a first die on the substrate, and a second die stacked over the first die. The first die can be a first logic die (e.g., a compute chip, CPU, GPU, etc.) while the second die can be a compute chiplet comprising ferroelectric or paraelectric logic. Both dies can include ferroelectric or paraelectric logic. The ferroelectric/paraelectric logic may include AND gates, OR gates, complex gates, majority, minority, and/or threshold gates, sequential logic, etc. The IC package can be in a 3D or 2.5D configuration that implements logic-on-logic stacking configuration. The 3D or 2.5D packaging configurations have chips or chiplets designed to have time distributed or spatially distributed processing. The logic of chips or chiplets is segregated so that one chip in a 3D or 2.5D stacking arrangement is hot at a time.

Some embodiments include a ferroelectric transistor having an active region which includes a first source/drain region, a second source/drain region, and a body region between the first and second source/drain regions. The body region has a different semiconductor composition than at least one of the first and second source/drain regions to enable replenishment of carrier within the body region. An insulative material is along the body region. A ferroelectric material is along the insulative material. A conductive gate material is along the ferroelectric material.

Disclosed are a NOR-type memory device and an electronic apparatus. The NOR-type memory device includes a NOR cell array and a peripheral circuit. The NOR cell array includes: a first substrate; an array of memory cells on the first substrate, wherein each memory cell includes a first gate stack extending vertically with respect to the first substrate and an active region surrounding a periphery of the first gate stack; first bonding pads electrically connected to the first gate stacks; and second bonding pads electrically connected to the active regions. The peripheral circuit includes: a second substrate; peripheral circuit elements on the second substrate; and third bonding pads, wherein at least some of the third bonding pads are electrically connected to the peripheral circuit elements. At least some of the first bonding pads and the second bonding pads are opposite to at least some of the third bonding pads.

Disclosed are a NOR-type memory device and an electronic apparatus. The NOR-type memory device includes a NOR cell array and a peripheral circuit. The NOR cell array includes: a first substrate; an array of memory cells on the first substrate, wherein each memory cell includes a first gate stack extending vertically with respect to the first substrate and an active region surrounding a periphery of the first gate stack; first bonding pads electrically connected to the first gate stacks; and second bonding pads electrically connected to the active regions. The peripheral circuit includes: a second substrate; peripheral circuit elements on the second substrate; and third bonding pads, wherein at least some of the third bonding pads are electrically connected to the peripheral circuit elements. At least some of the first bonding pads and the second bonding pads are opposite to at least some of the third bonding pads.

A three-dimensional non-volatile memory device includes a memory cell array including a plurality of memory cells repeatedly arranged in a first lateral direction, a second lateral direction, and a vertical direction on a substrate. The first lateral direction and the second lateral direction are parallel to a main surface of the substrate and perpendicular to each other, and the vertical direction is perpendicular to the main surface of the substrate. The memory cell array includes a plurality of horizontal channel regions and a vertical word line. The plurality of horizontal channel regions extend in the first lateral direction on the substrate. The plurality of horizontal channel regions overlap each other and are apart from each other in the vertical direction. The vertical word line passes through the plurality of horizontal channel regions in the vertical direction.

A three-dimensional non-volatile memory device includes a memory cell array including a plurality of memory cells repeatedly arranged in a first lateral direction, a second lateral direction, and a vertical direction on a substrate. The first lateral direction and the second lateral direction are parallel to a main surface of the substrate and perpendicular to each other, and the vertical direction is perpendicular to the main surface of the substrate. The memory cell array includes a plurality of horizontal channel regions and a vertical word line. The plurality of horizontal channel regions extend in the first lateral direction on the substrate. The plurality of horizontal channel regions overlap each other and are apart from each other in the vertical direction. The vertical word line passes through the plurality of horizontal channel regions in the vertical direction.

A semiconductor structure includes a gate stack over a substrate and a blocking layer disposed between the gate stack and the substrate. The gate stack includes an upper electrode, a lower electrode, a ferroelectric layer disposed between the upper electrode and the lower electrode, and a first seed layer disposed between the ferroelectric layer and the lower electrode. The blocking layer includes doped hafnium oxide.

A semiconductor memory device includes a semiconductor layer, a gate electrode, a gate insulating film disposed therebetween, first and second wirings connected to the semiconductor layer, and a third wiring connected to the gate electrode and is configured to execute a write operation, an erase operation, and a read operation. In the write operation, a write voltage of a first polarity is supplied between the third wiring and at least one of the first wiring or the second wiring. In the erase operation, an erase voltage of a second polarity is supplied between the third wiring and at least one of the first wiring or the second wiring. In the read operation, the write voltage or a voltage having a larger amplitude than that of the write voltage is supplied between the third wiring and at least one of the first wiring or the second wiring.

In some embodiments, the present disclosure relates to an integrated circuit. The integrated circuit has a first doped region and a second doped region within a substrate. A ferroelectric material is arranged over the substrate and laterally between the first doped region and the second doped region. A conductive electrode is over the ferroelectric material and between sidewalls of the ferroelectric material. One or more sidewall spacers are arranged along opposing sides of the ferroelectric material. A dielectric layer continuously and laterally extends from directly below the one or more sidewall spacers to directly below the ferroelectric material.

A three-dimensional flash memory for improving leakage current and a substrate are disclosed. The three-dimensional flash memory comprises: a string extending in one direction on the substrate, wherein the string includes a channel layer extending in the one direction and a charge storage layer extending in the one direction so as to surround the channel layer; at least one selection line vertically connected to an upper end or a lower end of the string; and a plurality of word lines positioned above or below the at least one selection line and vertically connected to the string, wherein the channel layer is formed of an oxide semiconductor material.