Three-dimensional ferroelectric memory cell architectures are discussed related to improved memory cell performance and density. Such three-dimensional ferroelectric memory cell architectures include groups of vertically stacked transistors accessed by vertical bit lines and horizontal word lines. Groups of such stacks of transistors are arrayed laterally. Adjacent transistor stacks are separated by isolation material or memory structures inclusive of capacitor structures or plate line structures.

Three-dimensional ferroelectric memory cell architectures are discussed related to improved memory cell performance and density. Such three-dimensional ferroelectric memory cell architectures include groups of vertically stacked transistors accessed by vertical bit lines and horizontal word lines. Groups of such stacks of transistors are arrayed laterally. Adjacent transistor stacks are separated by isolation material or memory structures inclusive of capacitor structures or plate line structures.

A method of forming an array of capacitors and access transistors there-above comprises forming access transistor trenches partially into insulative material. The trenches individually comprise longitudinally-spaced masked portions and longitudinally-spaced openings in the trenches longitudinally between the masked portions. The trench openings have walls therein extending longitudinally in and along the individual trench openings against laterally-opposing sides of the trenches. At least some of the insulative material that is under the trench openings is removed through bases of the trench openings between the walls and the masked portions to form individual capacitor openings in the insulative material that is lower than the walls. Individual capacitors are formed in the individual capacitor openings. A line of access transistors is formed in the individual trenches. The line of access transistors electrically couples to the individual capacitors that are along that line. Other aspects, including structure independent of method, are disclosed.

Methods, systems, and devices for on-die formation of single-crystal semiconductor structures are described. In some examples, a layer of semiconductor material may be deposited above one or more decks of memory cells and divided into a set of patches. A respective crystalline arrangement of each patch may be formed based on nearly or partially melting the semiconductor material, such that nucleation sites remain in the semiconductor material, from which respective crystalline arrangements may grow. Channel portions of transistors may be formed at least in part by doping regions of the crystalline arrangements of the semiconductor material. Accordingly, operation of the memory cells may be supported by lower circuitry (e.g., formed at least in part by doped portions of a crystalline semiconductor substrate), and upper circuitry (e.g., formed at least in part by doped portions of a semiconductor deposited over the memory cells and formed with a crystalline arrangement in-situ).

Methods, systems, and devices for on-die formation of single-crystal semiconductor structures are described. In some examples, a layer of semiconductor material may be deposited above one or more decks of memory cells and divided into a set of patches. A respective crystalline arrangement of each patch may be formed based on nearly or partially melting the semiconductor material, such that nucleation sites remain in the semiconductor material, from which respective crystalline arrangements may grow. Channel portions of transistors may be formed at least in part by doping regions of the crystalline arrangements of the semiconductor material. Accordingly, operation of the memory cells may be supported by lower circuitry (e.g., formed at least in part by doped portions of a crystalline semiconductor substrate), and upper circuitry (e.g., formed at least in part by doped portions of a semiconductor deposited over the memory cells and formed with a crystalline arrangement in-situ).

A memory cell arrangement is provided that may include: a plurality of electrode layers, wherein each of the plurality of electrode layers comprises a plurality of through holes, each of the plurality of through holes extending from a first surface to a second surface of a respective electrode layer; a plurality of electrode pillars, wherein each of the plurality of electrode pillars comprises a plurality of electrode portions, wherein each of the plurality of electrode portions is disposed within a corresponding one of the plurality of through holes; wherein the respective electrode layer and a respective electrode portion of the plurality of electrode portions form a first electrode and a second electrode of a capacitor and wherein at least one memory material portion is disposed in each of the plurality of through holes in a gap between the respective electrode layer and the respective electrode portion.

Three-dimensional hysteretic memory based on semiconductor nanoribbons is disclosed. An example memory cell may include a nanoribbon-based access transistor and a capacitor coupled to the access transistor, where the capacitor at least partially wraps around the nanoribbon in which the access transistor is formed. One or both of a gate stack of the access transistor and the capacitor insulator may include a hysteretic material/arrangement. Plurality of such memory cells may be provided in a single nanoribbon, and the nanoribbon may be one of a stack of nanoribbons provided above one another over a support structure. Incorporating hysteretic memory cells in different layers above a support structure by using stacks of semiconductor nanoribbons may allow significantly increasing density of hysteretic memory cells in a memory array having a given footprint area, or conversely, significantly reducing the footprint area of the memory array with a given density of hysteretic memory cells.

Three-dimensional hysteretic memory based on semiconductor nanoribbons is disclosed. An example memory cell may include a nanoribbon-based access transistor and a capacitor coupled to the access transistor, where the capacitor at least partially wraps around the nanoribbon in which the access transistor is formed. One or both of a gate stack of the access transistor and the capacitor insulator may include a hysteretic material/arrangement. Plurality of such memory cells may be provided in a single nanoribbon, and the nanoribbon may be one of a stack of nanoribbons provided above one another over a support structure. Incorporating hysteretic memory cells in different layers above a support structure by using stacks of semiconductor nanoribbons may allow significantly increasing density of hysteretic memory cells in a memory array having a given footprint area, or conversely, significantly reducing the footprint area of the memory array with a given density of hysteretic memory cells.

A high-density low voltage ferroelectric (or paraelectric) memory bit-cell that includes a planar ferroelectric or paraelectric capacitor. The memory bit-cell comprises 1T1C configuration, where a plate-line is parallel to a word-line, or the plate-line is parallel to a bit-line. The memory bit-cell can be 1TnC, where ‘n’ is a number. In a 1TnC bit-cell, the capacitors are vertically stacked allowing for multiple values to be stored in a single bit-cell. The memory bit-cell can be multi-element FE gain bit-cell. In a multi-element FE gain bit-cell, data sensing is done with signal amplified by a gain transistor in the bit-cell. As such, higher storage density is realized using multi-element FE gain bit-cells. In some examples, the 1T1C, 1TnC, and multi-element FE gain bit-cells are multi-level bit-cells. To realize multi-level bit-cells, the capacitor is placed in a partially switched polarization state by applying different voltage levels or different time pulse widths at the same voltage level.

Some embodiments include an integrated assembly. The integrated assembly has a first transistor with a horizontally-extending channel region between a first source/drain region and a second source/drain region; has a second transistor with a vertically-extending channel region between a third source/drain region and a fourth source/drain region; and has a capacitor between the first and second transistors. The capacitor has a first electrode, a second electrode, and an insulative material between the first and second electrodes. The first electrode is electrically connected with the first source/drain region, and the second electrode is electrically connected with the third source/drain region. A digit line is electrically connected with the second source/drain region. A conductive structure is electrically connected with the fourth source/drain region.