Various embodiments of the present disclosure are directed towards a method for forming an integrated chip, the method includes depositing a grid layer over a substrate. The grid layer is patterned to form a grid structure. The grid structure comprises a plurality of sidewalls defining a plurality of openings. A ferroelectric layer is deposited over the substrate. The ferroelectric layer fills the plurality of openings and is disposed along the plurality of sidewalls of the grid structure. An upper conductive structure is formed over the grid structure.

A device includes a substrate, gate stacks, source/drain (S/D) features over the substrate, S/D contacts over the S/D features, and one or more dielectric layers over the gate stacks and the S/D contacts. A via structure penetrates the one or more dielectric layers and electrically contacts one of the gate stacks and the S/D contacts. And a ferroelectric (FE) stack is over the via structure and directly contacting the via structure, wherein the FE stack includes an FE feature and a top electrode over the FE feature.

A gated ferroelectric memory cell includes a dielectric material layer disposed over a substrate, a metallic bottom electrode, a ferroelectric dielectric layer contacting a top surface of the bottom electrode, a pillar semiconductor channel overlying the ferroelectric dielectric layer and capacitively coupled to the metallic bottom electrode through the ferroelectric dielectric layer, a gate dielectric layer including a horizontal gate dielectric portion overlying the ferroelectric dielectric layer and a tubular gate dielectric portion laterally surrounding the pillar semiconductor channel, a gate electrode strip overlying the horizontal gate dielectric portion and laterally surrounding the tubular gate dielectric portion and a metallic top electrode contacting a top surface of the pillar semiconductor channel.

Various embodiments of the present disclosure are directed towards a memory device. The memory device has a first transistor having a first source/drain and a second source/drain, where the first source/drain and the second source/drain are disposed in a semiconductor substrate. A dielectric structure is disposed over the semiconductor substrate. A first memory cell is disposed in the dielectric structure and over the semiconductor substrate, where the first memory cell has a first electrode and a second electrode, where the first electrode of the first memory cell is electrically coupled to the first source/drain of the first transistor. A second memory cell is disposed in the dielectric structure and over the semiconductor substrate, where the second memory cell has a first electrode and a second electrode, where the first electrode of the second memory cell is electrically coupled to the second source/drain of the first transistor.

Provided are a ferroelectric semiconductor device and a method of extracting a defect density of the same. A ferroelectric electronic device includes a first layer, an insulating layer including a ferroelectric layer and a first interface that is adjacent to the first layer, and an upper electrode over the insulating layer, wherein the insulating layer has a bulk defect density of 10.sup.16 cm.sup.−3eV.sup.−1 or more and an interface defect density of 10.sup.10 cm.sup.−2eV.sup.−1 or more.

Provided are a memory device and a method of forming the same. The memory device includes a plurality of bit lines extending along a first direction; a plurality of word lines extending along a second direction different from the first direction; a plurality of memory pillars; and a selector. The plurality of word lines are disposed over the plurality of bit lines. The plurality of memory pillars are disposed between the plurality of bit lines and the plurality of word lines, and respectively positioned at a plurality of intersections of the plurality of bit lines and the plurality of word lines. The selector is disposed between the plurality of memory pillar and the plurality of word lines. The selector extends from a top surface of one memory pillar to cover a top surface of an adjacent memory pillar. A semiconductor device having the memory device is also provided.

A semiconductor structure and method for forming the semiconductor are provided. The semiconductor structure includes a first electrode comprising a first portion, a second portion, and a sheet portion connecting the first portion to the second portion. A ferroelectric material is over the sheet portion. A second electrode is over the ferroelectric material.

A memory unit, array and operation method thereof are provided. The memory unit includes at least one P-type driver having a first end coupled to a power source, a second end and a control end coupled to a word line; a memory cell having a first end coupled to the second end of the P-type driver, and a second end coupled to a bit line.

Systems, methods, and apparatuses are provided for self-aligned etch back for vertical three dimensional (3D) memory. One example method includes depositing layers of a first dielectric material, a semiconductor material, and a second dielectric material to form a vertical stack, forming first vertical openings to form elongated vertical, pillar columns with first vertical sidewalls in the vertical stack, and forming second vertical openings through the vertical stack to expose second vertical sidewalls. Further, the example method includes removing portions of the semiconductor material to form first horizontal openings and depositing a fill in the first horizontal openings. The method can further include forming third vertical openings to expose third vertical sidewalls in the vertical stack and selectively removing the fill material to form a plurality of second horizontal openings in which to form horizontally oriented storage nodes.

A non-volatile memory cell includes a thin film resistor (TFR) in series and between a top state influencing electrode and a top wire. The TFR limits or generally reduces the electrical current at the top state influencing electrode from the top wire. As such, non-volatile memory cell endurance may be improved and adverse impacts to component(s) that neighbor the non-volatile memory cell may be limited. The TFR is additionally utilized as an etch stop when forming a top wire trench associated with the fabrication of the top wire. In some non-volatile memory cells where cell symmetry is desired, an additional TFR may be formed between a bottom wire and a bottom state influencing electrode.