A bottom electrode, a phase change material layer, the phase change material layer includes a similar lattice constant as a lattice constant of the bottom electrode, and a top electrode vertically aligned. A phase change material layer, a top electrode adjacent to a first vertical side surface of the phase change material layer, and a bottom electrode adjacent to a second vertical side surface of the phase change material layer. Forming a phase change material layer, forming a top electrode adjacent to a first vertical side surface and overlapping a first portion of an upper horizontal surface of the phase change material layer, forming a bottom electrode, adjacent to a second vertical side surface and overlapping a second portion of the upper horizontal surface of the phase change material layer, and forming a dielectric material horizontally isolating the bottom electrode and the top electrode.

A semiconductor device includes a PCM stack that includes bottom electrode liner over a lower heater. The bottom electrode liner has a top-down view plus (+) geometry with a ‘horizontal’ portion being orthogonal to a ‘vertical’ portion. An airgap is formed within the PCM stack in an area located adjacent and between the ‘horizontal’ portion and the ‘vertical’ portion. The airgap has a substantially smaller dielectric constant than the surrounding PCM stack material(s). Therefore, the airgap may effectively reduce the amount of current that leaks from the PCM stack when flowing from the bottom electrode liner to a top contact or top electrode. Further, the airgap may allow for expansion of the surrounding PCM stack material(s) that may result from the heating of the PCM stack.

A method of forming an array of memory cells comprises forming an elevationally inner tier of memory cells comprising spaced inner tier lower first conductive lines, spaced inner tier upper second conductive lines, and programmable material of individual inner tier memory cells elevationally between the inner tier first lines and the inner tier second lines where such cross. First insulative material is formed laterally between the inner tier second lines to have respective elevationally outermost surfaces that are lower than elevationally outermost surfaces of immediately laterally-adjacent of the inner tier second lines. Second insulative material is formed elevationally over the first insulative material and laterally between the inner tier second lines. The second insulative material is of different composition from that of the first insulative material. An elevationally outer tier of memory cells is formed to comprise spaced outer tier lower first conductive lines, spaced outer tier upper second conductive lines, and programmable material of individual outer tier memory cells elevationally between the outer tier first lines and the outer tier second lines where such cross. Arrays of memory cells independent of method of manufacture are disclosed.

A method of forming an array of cross point memory cells comprises using two, and only two, masking steps to collectively pattern within the array spaced lower first lines, spaced upper second lines which cross the first lines, and individual programmable devices between the first lines and the second lines where such cross that have an upwardly open generally U-shape vertical cross-section of programmable material laterally between immediately adjacent of the first lines beneath individual of the upper second lines. Arrays of cross point memory cells independent of method of manufacture are disclosed.

An electronic neuron device that includes a thresholding unit which utilizes current-induced spin-orbit torque (SOT). A two-step switching scheme is implemented with the device. In the first step, a charge current through heavy metal (HM) places the magnetization of a nano-magnet along the hard-axis (i.e. an unstable point for the magnet). In the second step, the device receives a current (from an electronic synapse) which moves the magnetization from the unstable point to one of the two stable states. The polarity of the net synaptic current determines the final orientation of the magnetization. A resistive crossbar array may also be provided which functions as the synapse generating a bipolar current that is a weighted sum of the inputs of the device.

A resistive random access memory includes a memory cell disposed at an intersection point between a first conductive line and a second conductive line. The memory cell includes a selector structure, a first current limiter structure and a resistor structure. The first current limiter structure is disposed between the selector structure and the first conductive line. The resistor structure is disposed between the selector structure and the second conductive line or between the first current limiter structure and the first conductive line.

A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes a semiconductor substrate, active devices and transparent conductive patterns. The active devices are formed on the semiconductor substrate. The transparent conductive patterns are formed over the active devices and electrically connected to the active devices. The transparent conductive patterns are made of a metal oxide material. The metal oxide material has a first crystalline phase with a prefer growth plane rich in oxygen vacancy, and has a second crystalline phase with a prefer growth plane poor in oxygen vacancy.

A semiconductor device may include: a memory cell disposed over a substrate and including a variable resistance layer and a selector layer; a protection layer disposed on side surfaces of the memory cell and an upper surface of the substrate on which the memory cell is not disposed; and a first encapsulation layer disposed on the memory cell and the protection layer, wherein the protection layer may include a treated surface that is modified by a material including helium.

Various embodiments of a three-dimensional cross-point (3D X-point) memory cell design include one or more electrodes having an increased resistance compared to existing memory cell designs or compared to other electrodes within a same memory cell. A memory device includes an array of memory cells with each memory cell arranged between a word line and a bit line of the memory device. Some embodiments include additional material layers to increase memory cell resistance. Some embodiments include electrodes having an increased thickness to increase the resistance. Some embodiments include electrodes having a composition with a higher resistivity. Some embodiments include electrodes with increased interface resistance. Some embodiments include a combination of such features. In any case, the resulting increased memory cell resistance causes a reduction in the transient selection current for the given memory cell.

According to an embodiment, a non-volatile memory device includes a first interconnection, a second interconnection closest to the first interconnection in a first direction, rectifying portions arranged in the first direction between the first interconnection and the second interconnection, and a first resistance change portion arranged between adjacent ones of the rectifying portions in the first direction. Each of the rectifying portions includes a first metal oxide layer and a second metal oxide layer.