Patent classifications
H10K71/10
System and method for electrostatically chucking a substrate to a carrier
A chucking station comprises a chuck, a power supply, and one or more pumping elements. The chuck comprises a plurality of first vacuum ports configured to interface with a surface of a substrate and a plurality of second vacuum ports configured to interface with a surface of a carrier. The chuck further comprises a first electrical pin configured to be in electrical communication with a first electrode of the carrier, and a second electrical pin configured to be in electrical communication with a second electrode of the carrier. The power supply is configured to apply a chucking voltage and a de-chucking voltage to the first and second electrical pins. The one or more pumping elements is coupled to the first and second vacuum ports and configured to generate a vacuum between the substrate and the chuck and a vacuum between the carrier and the chuck.
METHOD OF FORMING SEMICONDUCTOR DEVICE HAVING CARBON NANOTUBE
A method includes placing a first charged metal dot on a first position of a surface of a semiconductor substrate. A first charged region is formed on a second position of the surface of the semiconductor substrate. A precursor gas is flowed along a first direction from the first position toward the second position on the semiconductor substrate, thereby forming a first carbon nanotube (CNT) on the semiconductor substrate. A dielectric layer is deposited to cover the first CNT and the semiconductor substrate. A second charged metal dot is placed on a third position of a surface of the dielectric layer. A second charged region is formed on a fourth position of the surface of the dielectric layer. The precursor gas is flowed along a second direction from the third position toward the fourth position on the semiconductor substrate, thereby forming a second CNT on the first CNT.
NOVEL HETEROCYCLIC COMPOUND AND LIGHT-EMITTING DIODE INCLUDING SAME
Disclosed herein are pyrene heterocyclic compounds useful for an organic light-emitting diode and an organic light-emitting diode including same. More specifically, compound represented by [Chemical Formula A] or [Chemical Formula B] and an organic light-emitting diode are provided. [Chemical Formula A] and [Chemical Formula B] are as defined in the Description.
NOVEL HETEROCYCLIC COMPOUND AND LIGHT-EMITTING DIODE INCLUDING SAME
Disclosed herein are pyrene heterocyclic compounds useful for an organic light-emitting diode and an organic light-emitting diode including same. More specifically, compound represented by [Chemical Formula A] or [Chemical Formula B] and an organic light-emitting diode are provided. [Chemical Formula A] and [Chemical Formula B] are as defined in the Description.
Metal mask, method of manufacturing the same, and method of manufacturing display panel using the metal mask
A deposition mask includes a metal mask body in which a deposition opening is defined; and a coating layer including aluminum oxynitride, on an outer surface of the metal mask body.
Metal mask, method of manufacturing the same, and method of manufacturing display panel using the metal mask
A deposition mask includes a metal mask body in which a deposition opening is defined; and a coating layer including aluminum oxynitride, on an outer surface of the metal mask body.
Organic light-emitting display apparatus and fabrication method thereof
An organic light-emitting display apparatus includes a display substrate and a thin film encapsulation layer on the display substrate. The display substrate includes at least one hole, a thin film transistor, a light-emitting portion electrically connected to the thin film transistor, and a plurality of insulating layers. The light-emitting portion includes a first electrode, an intermediate layer, and a second electrode. The display substrate includes an active area, an inactive area between the active area and the hole, and a plurality of insulating dams. Each insulating dam includes at least one layer. The inactive area includes a first area different from a laser-etched area and a second laser-etched area.
Organic electroluminescent device
Provided is an organic electroluminescent device. The organic electroluminescent device comprises a first electrode, a second electrode, and at least two light emitting units disposed between the first electrode and the second electrode, wherein the light emitting units each comprises at least one light emitting layer, and a connection layer of a specific structure is further disposed between adjacent two light emitting units. By using a connection layer of a specific structure, the organic light-emitting device reduces the device voltage, prolongs life time of the device, and improves the device performance.
Organic electroluminescent device
Provided is an organic electroluminescent device. The organic electroluminescent device comprises a first electrode, a second electrode, and at least two light emitting units disposed between the first electrode and the second electrode, wherein the light emitting units each comprises at least one light emitting layer, and a connection layer of a specific structure is further disposed between adjacent two light emitting units. By using a connection layer of a specific structure, the organic light-emitting device reduces the device voltage, prolongs life time of the device, and improves the device performance.
LIGHT-EMITTING DEVICE AND METHOD OF PRODUCING LIGHT-EMITTING DEVICE
A light-emitting device includes a first light-emitting region in which a light emission peak wavelength is a first wavelength; a second light-emitting region in which a light emission peak wavelength is a second wavelength shorter than the first wavelength; a cathode disposed in the first light-emitting region and the second light-emitting region; an anode facing the cathode in the first light-emitting region and the second light-emitting region; a second light-emitting layer disposed between the cathode and the anode in the first light-emitting region and the second light-emitting region and having a light emission peak wavelength being the second wavelength; a first light-emitting layer disposed between the anode and the second light-emitting layer at least in the first light-emitting region and having a light emission peak wavelength being the first wavelength; and a first electron transport layer disposed between the first light-emitting layer and the second light-emitting layer in the first light-emitting region and having ionization energy higher than both of ionization energy of the first light-emitting layer and ionization energy of the second light-emitting layer.