In some embodiments, in response to the user selecting a first node in the tree to be pinned, the system displays a first detail panel for the first node, wherein the first detail panel displays state information for the first node, wherein the state information is frozen at the time of pinning. Moreover, in response to the user selecting a second node in the tree to be pinned, the system displays a second detail panel for the second node, wherein the second detail panel displays state information for the second node, wherein the state information is frozen at the time of pinning. Note that the first detail panel is displayed concurrently with the second detail panel to facilitate comparing state information between the first and second nodes.

The disclosed flexible vibrotactile devices may include a flexible electroactive material that has a substantially spiral shape, a first electrode electrically coupled to a first side of the flexible electroactive material, and a second electrode electrically coupled to a second, opposite side of the flexible electroactive material. The first electrode and the second electrode may be positioned and configured to apply an electrical voltage to the flexible electroactive material to induce haptic vibration in the flexible electroactive material. Various other related methods and systems are also disclosed.

A product includes an array of cold spray-formed structures. Each of the structures is characterized by having a defined feature size in at least one dimension of less than 100 microns as measured in a plane of deposition of the structure, at least 90% of a theoretical density of a raw material from which the structure is formed, and essentially the same functional properties as the raw material. A product includes a cold spray-formed structure characterized by having a defined feature size in at least one dimension of less than 100 microns as measured in a plane of deposition of the structure, at least 90% of a theoretical density of a raw material from which the structure is formed, and essentially the same functional properties as the raw material.

A vibration transducer module for detecting a vibratory signal, comprising a base, a spring connected to the base at a first location, a mass mechanically coupled to the spring at a second location remote from the first location, and a wall configured to position a first wall electrode and a second wall electrode a selected distance from the first location, the conductive element positioned and sized to contact the first wall electrode and the second wall electrode. The mass comprises a conductive element, and an energy harvester to provide a first voltage signal. The energy harvester may comprise a piezoelectric material or be construct as a SAW device. The module may be combined with a rectifier and an oscillator to form a vibration sensor.

A force-measuring and touch-sensing integrated circuit device includes a semiconductor substrate, a thin-film piezoelectric stack overlying the semiconductor substrate, piezoelectric micromechanical force-measuring elements (PMFEs), and piezoelectric micromechanical ultrasonic transducers (PMUTs). The thin-film piezoelectric stack includes a piezoelectric layer. The PMFEs and PMUTs are located at respective lateral positions along the thin-film piezoelectric stack, such that each of the PMFEs and PMUTs includes a respective portion of the thin-film piezoelectric stack. Each PMUT has a cavity, the respective portion of the thin-film piezoelectric stack, and first and second PMUT electrodes. Each PMFE has the respective portion of the thin-film piezoelectric stack, and first and second PMFE electrodes. Each PMFE is configured to output voltage signals between the PMFE electrodes in accordance with a time-varying strain at the respective portion of the piezoelectric layer resulting from a low-frequency mechanical deformation.

A micro-electromechanical system (MEMS) device and a method of forming the same, the MEMS device includes a composite substrate, a cavity, a piezoelectric stacking structure and a proof mass. The composite substrate includes a first semiconductor layer, a bonding layer and a second semiconductor layer from bottom to top. The cavity is disposed in the composite substrate, and the cavity is extended from the second semiconductor layer into the first semiconductor layer and not penetrated the first semiconductor layer. The piezoelectric stacking structure is disposed on the composite substrate, with the piezoelectric stacking structure having a suspended region over the cavity. The proof mass is disposed in the cavity to connect to the piezoelectric stacking structure.

A method of making an actuator switch is disclosed. One method including: receiving a threshold amount of pressure on a top surface of a flexible film; in response to receiving the threshold amount of pressure, contacting a first electrode with a second electrode; in response to receiving the threshold amount of pressure, generating i) a first capacitive connection between a row electrode and the second electrode and ii) a second capacitive connection between a column electrode and the second electrode; in response to the first electrode contacting the second electrode, generating, by a piezoelectric actuator, haptic feedback; and in response to the generating the first capacitive connection and the second capacitive connection, providing an input detection signal.

A method of making an actuator switch is disclosed. One method including: receiving a threshold amount of pressure on a top surface of a flexible film; in response to receiving the threshold amount of pressure, contacting a first electrode with a second electrode; in response to receiving the threshold amount of pressure, generating i) a first capacitive connection between a row electrode and the second electrode and ii) a second capacitive connection between a column electrode and the second electrode; in response to the first electrode contacting the second electrode, generating, by a piezoelectric actuator, haptic feedback; and in response to the generating the first capacitive connection and the second capacitive connection, providing an input detection signal.

A magneto-electric converter capable of converting a variation in magnetic field into a potential difference between two electrical terminals includes a support layer comprising two electrical terminals; a stack disposed on the support layer of a first layer made from a magnetostrictive material defining the reference plane and of a second layer made from a piezoelectric material having a polarization axis in the plane defined by the second layer, parallel to the reference plane; the second layer comprising electrodes; and a means for electrical connection of the electrodes to the electrical terminals.

A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member. A plurality of openings within a surface of the resonant member are disposed more densely within the first region than the second region and at least partly filled with a compensating material that reduces temperature dependence of the resonant frequency corresponding to the mechanical resonance mode.