An acoustic wave resonator includes: a piezoelectric substrate; and an interdigital transducer (IDT) located on the piezoelectric substrate, the IDT including a pair of comb-shaped electrodes having a plurality of electrode fingers and a bus bar to which the plurality of electrode fingers are coupled, the IDT having: a first region in which a pitch of electrode fingers is substantially constant; a second region in which a pitch of electrode fingers decreases at closer distances to an outer side; and a third region in which a pitch of electrode fingers increases at closer distances to an outer side, the second region being located outside the first region in an arrangement direction of the plurality of electrode fingers, and the third region being located outside the second region in the arrangement direction.

A resonator device includes a quartz crystal substrate, a resonator element including a first excitation electrode arranged on a first surface of the quartz crystal substrate, a second excitation electrode arranged on a second surface of the quartz crystal substrate in opposition to the first excitation electrode, and first and second pad electrodes that are arranged on the first surface and are coupled to the first and second excitation electrodes, a base including a substrate and first and second interconnects arranged on the substrate, a first bonding member bonding the first pad electrode to the first interconnect, and a second bonding member bonding the second pad electrode to the second interconnect. The first and second bonding members are arranged such that a first imaginary line that passes through a centroid of the resonator element and is parallel to an X axis is interposed between the first and second bonding members. An angle θ1 formed between the first imaginary line and a second imaginary line passing through the first bonding member and the second bonding member is 100°<θ1<140°.

A glass membrane deformation assembly configured to deform a glass membrane includes: a deformable glass membrane having a first surface and a second surface; a piezoelectric layer affixed to a first surface of the deformable glass membrane, wherein the piezoelectric layer is controllably deformable via a voltage potential; a structural member affixed to at least a first portion of the second surface of the deformable glass membrane; and a deformable lens assembly affixed to at least a second portion of the second surface of the deformable glass membrane; wherein the controllably deformation of the piezoelectric layer is configured to controllably deform the deformable glass membrane and the deformable lens assembly.

An imaging device includes a two dimensional array of piezoelectric elements. Each piezoelectric element includes: a piezoelectric layer; a bottom electrode disposed on a bottom side of the piezoelectric layer and configured to receive a transmit signal during a transmit mode and develop an electrical charge during a receive mode; and a first top electrode disposed on a top side of the piezoelectric layer; and a first conductor, wherein the first top electrodes of a portion of the piezoelectric elements in a first column of the two dimensional array are electrically coupled to the first conductor.

A microelectromechanical systems (MEMS) scanning device comprising a torsional beam flexure that has a variable width in relation to a rotational axis for a scanning mirror. The geometric properties of the torsional beam vary along the rotational axis to increase a desired mode of mechanical strain at a location where a strain sensor is operating within the MEMS scanning device to generate a feedback signal. The torsional beam flexure mechanically suspends the scanning mirror from a frame structure. During operation of the MEMS scanning device, actuators induce torsional deformation into the torsional beam flexure to cause rotation of the scanning mirror about the rotational axis. The degree or amount of this torsional deformation is directly related to the angular position of the scanning mirror and, therefore, the desired mode of mechanical strain may be this torsional deformation strain component.

A piezoelectric actuator includes a piezoelectric element having a rectangular shape, a first supporter, and a second supporter. The piezoelectric element includes a pair of main surfaces opposing each other, a first end surface and a second end surface opposing each other in a long side direction of the pair of main surfaces, and a first side surface and a second side surface opposing each other in a short side direction of the pair of main surfaces. The first supporter is provided to be movable according to deformation of the first end surface. The second supporter is provided to be movable according to deformation of the first side surface. The first supporter includes an opposing portion and a protruding portion. The opposing portion opposes the second supporter in the long side direction. The protruding portion protrudes from the opposing portion and abuts on the second supporter.

A piezoelectric actuator includes a piezoelectric element having a rectangular shape, a first supporter, and a second supporter. The piezoelectric element includes a pair of main surfaces opposing each other, a first end surface and a second end surface opposing each other in a long side direction of the pair of main surfaces, and a first side surface and a second side surface opposing each other in a short side direction of the pair of main surfaces. The first supporter is provided to be movable according to deformation of the first end surface. The second supporter is provided to be movable according to deformation of the first side surface. The first supporter includes an opposing portion and a protruding portion. The opposing portion opposes the second supporter in the long side direction. The protruding portion protrudes from the opposing portion and abuts on the second supporter.

A transducer includes first and second piezoelectric layers made of corresponding different first and second piezoelectric materials and three or more electrodes, implemented in two or more conductive electrode layers. The first piezoelectric layer is sandwiched between a first pair of electrodes and the second piezoelectric layer is sandwiched between a second pair of electrodes. The first and second pairs of electrodes contain no more than one electrode that is common to both pairs.

A suspended piezoelectric ultrasonic transducer includes a semiconductor substrate and a piezoelectric ultrasonic sensing element. The semiconductor substrate includes a columnar arrangement area, a peripheral wall, and one or more bridge portions. A cavity is between the columnar arrangement area and the peripheral wall. The cavity surrounds the columnar arrangement area, and the bridge portion is connected to the columnar arrangement area and the peripheral wall. The piezoelectric ultrasonic sensing element is disposed on the columnar arrangement area. Through providing the cavity and the bridge portion on the semiconductor substrate, the resonance frequency, the acoustic pressure, and the emitting angle of the transducer can be adjusted, thereby providing a greater manufacturing tolerance for the transducer.

A field-driven electroactive polymer actuator is provided with a current sensor for sensing a current flowing to the actuator. A control circuit is used for driving the actuator which includes a voltage source. The driving of the actuator is controlled in dependence on the sensed current, thereby to provide a predetermined charge delivery for particular changes in actuation level of the actuator. This provides a combined voltage-based and current-based drive scheme for a voltage-driven EAP actuator, and it enables mechanical movements of the actuator to be more reliably repeated.