A microactuator for a suspension is described. The microactuator includes a multi-layer PZT device having a first face and an opposite second face. Each layer of the multi-layer PZT device is configured to operate in its d15 mode when actuated by an actuation voltage. The layers are configured as a stack such that each layer is configured to act in the same direction when actuated such that the first face moves in shear relative to the second face.

A manufacturing method of an epitaxial thin film piezoelectric element includes: providing a substrate; forming a bottom electrode layer on the substrate by epitaxial growth process; forming a first piezoelectric layer that has c-axis orientation on the bottom electrode layer by epitaxial growth process; forming a second piezoelectric layer that has c-axis orientation and different phase structure from the first piezoelectric layer on the first piezoelectric layer by epitaxial growth process; and forming a top electrode layer on the second piezoelectric layer. The thin film piezoelectric element has good thermal stability, low temperature coefficient and high piezoelectric constant.

A microelectromechanical resonator includes a support structure, a resonator element suspended to the support structure, and an actuator for exciting the resonator element to a resonance mode. The resonator element includes a plurality of adjacent sub-elements each having a length and a width and a length-to-width aspect ratio of higher than 1 and being adapted to a resonate in a length-extensional, torsional or flexural resonance mode. Further, each of the sub-elements is coupled to at least one other sub-element by one or more connection elements coupled to non-nodal points of the of said resonance modes of the sub-elements for exciting the resonator element into a collective resonance mode.

The present disclosure provides a fingerprint recognition module, a driving method thereof, a manufacturing method thereof, and a display device. The fingerprint recognition module includes a receiving electrode layer, a piezoelectric material layer, and a driving electrode layer. The receiving electrode layer includes a plurality of receiving electrodes arranged in an array along a first direction and a second direction. The piezoelectric material layer is disposed on a side of the receiving electrode layer. The driving electrode layer is disposed on a side of the piezoelectric material layer remote from the receiving electrode layer and includes a plurality of driving electrodes arranged along the second direction. Each driving electrode is a strip electrode extending along the first direction, and overlaps with multiple receiving electrodes arranged along the first direction.

A piezoelectric material contains a main component containing a perovskite-type metal oxide represented by general formula (1), a first sub-component containing Mn, and a second sub-component containing Bi or Bi and Li. A Mn content relative to 100 parts by weight of the metal oxide is 0.500 parts by weight or less (including 0 parts by weight) in terms of metal, a Bi content relative to 100 parts by weight of the metal oxide is 0.042 parts by weight or more and 0.850 parts by weight or less in terms of metal, and a Li content relative to 100 parts by weight of the metal oxide is 0.028 parts by weight or less (including 0 parts by weight) in terms of metal:
(Ba.sub.1−x−yCa.sub.xSn.sub.y).sub.α(Ti.sub.1−zZr.sub.z)O.sub.3 (where 0.020≦x≦0.200, 0.020≦y≦0.200, 0≦z≦0.085, 0.986≦α≦1.100)  General formula (1).

To provide a valve control device, a drive control device, and a fluid control device, which are suitable for adjusting a valve. The valve control device comprises: a rod-shaped rotor provided so as to rotate about a rotation axis, wherein one end of the rotor is directly or indirectly connected to a valve body, at least a part of the valve body being positioned in a flow path for fluid, wherein the rotor changes a relative position between the valve body and a valve seat that is closed by the valve body or a contact force between the valve body and the valve seat; a pair of contacts for sandwiching the rotor and for rotating the rotor; a moving unit comprising a piezoelectric element for causing the pair of contacts to perform relative movement; and a drive control unit for controlling the relative position between the valve body and the valve seat or the contact force between the valve body and the valve seat by applying a voltage waveform having a rising slope and a falling slope different from the rising slope to the piezoelectric element so as to cause the pair of contacts to rotate the rotor in a desired direction, wherein a steeper slope of the rising slope and the falling slope causes a slip between the rotor and the pair of contacts.

A substrate includes a substrate main body that includes a first main surface and a second main surface facing the first main surface. First electrode lands are disposed inside a recessed portion of the first main surface of the substrate main body. Second electrode lands are disposed in a region outside the recessed portion. The first electrode land and the second electrode land are connected to different electric potentials.

A surface acoustic wave filter includes first and second signal terminals and first and second IDT electrodes that are adjacent to or in a vicinity of each other in an x-axis direction and that each includes a pair of comb-shaped electrodes each including a busbar electrode extending in the x-axis direction and electrode fingers extending in a y-axis direction. One of the comb-shaped electrodes in each of the first and second IDT electrodes is electrically connected to the first and second signal terminals, respectively. The surface acoustic wave filter further includes a bridging capacitance including a pair of comb-shaped electrodes arranged in a region outside an overlap region of the electrode fingers. One of the comb-shaped electrodes of the bridging capacitance is electrically connected to the comb-shaped electrode in the first IDT electrode. The other of the comb-shaped electrodes of the bridging capacitance is electrically connected to the comb-shaped electrode in the second IDT electrode.

A transducer device, including an electroactive polymer transducer, which has at least two electrode layers which are situated in parallel to one another and which are connected to one another by inserting an elastic intermediate layer in each case, and including a circuit having electronic components for the purpose of generating an electrical voltage applied to the electrode layers of the polymer transducer, the circuit increasing an input voltage to a voltage which is increased with regard to the input voltage.

A Microelectromechanical System (MEMS) device which includes a piezoelectric stack on a substrate separated by a dielectric layer is disclosed. The piezoelectric stack includes first and second piezoelectric layers with a first electrode below the first piezoelectric layer and a contact pad and a second electrode between the first and second piezoelectric layers. A first contact extends through the piezoelectric layers and contact pad to the first electrode and a second contact extends through the second piezoelectric layer to the second electrode. The contact pad prevents an interface to form between the first and second piezoelectric layers in the contact opening, thus preventing corrosion of the piezoelectric layers during contact formation process.