A bending sensor is provided that includes a piezoelectric element disposed on a bendable substrate; a voltage detection circuit that detects a voltage generated in the piezoelectric element; and an arithmetic unit that calculates an integrated value by integrating the voltage detected by the voltage detection circuit and associates the integrated value with a bent state of the substrate. Moreover, the arithmetic unit calculates in advance a corrected integrated value obtained by correcting a maximum value of the integrated value with a decrease value resulting from a stress relieving effect, associates the corrected integrated value with a first bent state of the substrate, and normalizes a calculated integrated value based on the corrected integrated value.

Certain aspects provide an integrated circuit (IC) including a resonator. One example IC generally includes a substrate, a first oxide region disposed above the substrate, and a resonator. The resonator may include a piezoelectric layer, a second oxide region disposed below the piezoelectric layer and bonded to the first oxide region, and a cavity in the second oxide region, wherein at least a portion of the second oxide region is below the cavity.

A modular array includes modular array includes one or more array modules. Each array module includes one or more transducer arrays, where each of the one or more transducer arrays includes a plurality of piezoelectric elements; a conducting interposer arranged and configured to provide acoustic absorbing backing for the one or more transducer arrays; and one or more Application Specific Integrated Circuits (ASICs). The conducting interposer and the one or more ASICs are in electrical contact with each other at a first direct electrical interface. Additionally, the conducting interposer and the one or more transducer arrays are in electrical contact with each other at a second direct electrical interface.

The disclosed technology generally relates to quartz crystal devices and more particularly to quartz crystal devices configured to vibrate in torsional mode. In one aspect, a quartz crystal device configured for temperature sensing comprises a fork-shaped quartz crystal comprising a pair of elongate tines laterally extending from a base region in a horizontal lengthwise direction of the fork-shaped quartz crystal. Each of the tines has formed on one or both of opposing sides thereof a vertically protruding line structure laterally elongated in the horizontal lengthwise direction. The quartz crystal device further comprises a first electrode and a second electrode formed on the one or both of the opposing sides of each of the tines and configured such that, when an electrical bias is applied between the first and second electrodes, the fork-shaped quartz crystal vibrates in a torsional mode in which each of the tines twists about a respective axis extending in the horizontal lengthwise direction.

An extreme ultraviolet light generating apparatus for generating extreme ultraviolet light in a chamber according to one aspect of the present disclosure includes a piezoelectric element provided in the chamber; a pressure sensor configured to detect pressure in the chamber; a gas introducing unit configured to introduce gas into the chamber; an exhaust unit configured to exhaust the gas from the chamber; and a control unit configured to control application of a voltage to the piezoelectric element. The control unit is configured to determine whether or not to apply a voltage to the piezoelectric element based on information on the pressure in the chamber obtained by the pressure sensor.

An example device includes a nanovoided polymer element, a first electrode, and a second electrode. The nanovoided polymer element may be located at least in part between the first electrode and the second electrode. In some examples, the nanovoided polymer element may include anisotropic voids. In some examples, anisotropic voids may be elongated along one or more directions. In some examples, the anisotropic voids are configured so that a polymer wall thickness between neighboring voids is generally uniform. Example devices may include a spatially addressable electroactive device, such as an actuator or a sensor, and/or may include an optical element. A nanovoided polymer layer may include one or more polymer components, such as an electroactive polymer.

A tactile feedback mechanism is provided, including a movable part, a fixed part, and a driving assembly. The movable part includes a first weight element. The movable part is movable relative to the fixed part. The driving assembly is used for driving the movable part to move relative to the fixed part. The first weight element is made of a metal material.

Piezoelectric composites are described. A piezoelectric composite can include a polymeric matrix, piezoelectric additive(s), and polyol. Methods of making and using the piezoelectric composite are also described.

The invention relates to a piezoelectric resonator, which comprises a base and at least two vibrating arms (3) extending from the base, at least two grooves (4a, 4b) being formed opposite each other on part of the length of the arms and on upper and lower faces of the arms. The depth of the groove on the upper face is less than 30% of the total thickness of each arm and the depth of the groove on the lower face is more than 50% of the total thickness of each arm, or reversely.

An apparatus includes a dielectric tile array including a plurality of dielectric tiles; and a plurality of electroactive (EA) material blocks configured to expand or contract in response to being actuated by the application of an actuation voltage.