H10N30/80

Method of manufacturing a mechanical resonating structure

Methods are described for constructing a mechanical resonating structure by applying an active layer on a surface of a compensating structure. The compensating structure comprises one or more materials having an adaptive resistance to deform that reduces a variance in a resonating frequency of the mechanical resonating structure, wherein at least the active layer and the compensating structure form a mechanical resonating structure having a plurality of layers of materials A thickness of each of the plurality of layers of materials results in a plurality of thickness ratios therebetween.

PIEZOELECTRIC DEVICE AND PRODUCTION METHOD FOR PIEZOELECTRIC DEVICE
20170256701 · 2017-09-07 ·

A piezoelectric resonator includes a piezoelectric thin film including a functional conductor, a fixing layer provided on a principal surface of the piezoelectric thin film to define a void that overlaps a functional portion region, and a support substrate on a principal surface of the fixing layer. A sacrificial layer is provided on a principal surface of a piezoelectric substrate and the fixing layer is provided on the principal surface of the piezoelectric substrate to cover the sacrificial layer. The support substrate is attached to a surface of the fixing layer and the piezoelectric thin film is peeled from the piezoelectric substrate. The functional conductor is provided on the piezoelectric thin film, a through hole is provided in the piezoelectric thin film to straddle a boundary between the fixing layer and the sacrificial layer, and the sacrificial layer is removed by wet etching using the through hole to form the void.

PIEZOELECTRIC DEVICE, MEMS DEVICE, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS
20170253039 · 2017-09-07 ·

A piezoelectric device includes a piezoelectric layer, a first moisture resistant layer, and a second moisture resistant layer stacked in this order. The first moisture resistant layer has a flexibility higher than that of the second moisture resistant layer, and the second moisture resistant layer has a moisture permeability lower than that of the first moisture resistant layer.

OPTICAL ACTUATOR

An actuator (100) powered by photonic energy comprises a rotor including a material (101) which deforms from a first underformed state when exposed to electromagnetic radiation to a second deformed state and begins to return to the first state when the electromagnetic radiation is removed. A stationary element (102) is affixed to the rotor. A moving element (105) engaging the stator at least when the rotor is in the second deformed state. Deformation of the deformable material in response to applied electromagnetic radiation is transmitted by the stator to the moving element by friction between the stationary element and the moving element for causing motion of the moving element.

DISPLAY APPARATUS

A display apparatus includes: a display panel configured to display an image, and at least one vibration module on a rear surface of the display panel, the at least one vibration module including a piezoelectric composite layer including a plurality of sub-modules configured to vibrate the display panel, each of the plurality of sub-modules including: a plurality of first portions including a piezoelectric characteristic, and a plurality of second portions having flexibility, each of the plurality of second portions being between a respective pair of the plurality first portions, wherein the plurality of first portions in the respective sub-modules are arranged in a same direction or are partially arranged in different directions.

Display device for vehicle

A display device for a vehicle includes a stretchable display panel and a touch sensor on a first surface of the stretchable display panel and configured to sense a user's touch. The stretchable display panel includes a plurality of pixels and has a button display area and a display area adjacent the button display area. The stretchable display panel is integrally arranged on a center fascia of the vehicle that as a plurality of curved surfaces, and a step is defined between the button display area and the adjacent display area.

Electrostatic zipper

An electrostatic zipping actuator includes a primary electrode, a secondary electrode overlying the primary electrode, a dielectric layer located between and abutting at least a portion of the primary electrode and the secondary electrode, and a dielectric fluid disposed at least at a junction between the dielectric layer and one of the electrodes, where an average total thickness of the dielectric layer is less than approximately 10 micrometers.

MEMS PROCESS POWER
20220199893 · 2022-06-23 ·

A transducer includes a first piezoelectric layer; and a second piezoelectric layer that is above the first piezoelectric layer; wherein the second piezoelectric layer is a more compressive layer with an average stress that is less than or more compressive than an average stress of the first piezoelectric layer.

ENHANCED NOISE IMMUNITY MULTILAYER PIEZOELECTRIC TRANSDUCER
20220187112 · 2022-06-16 ·

A transducer sensor apparatus can include a sensor, and a multilayer transducer can include a plurality of piezoelectric elements. The sensor can include the multilayer transducer, and the multilayer transducer can improve a signal-to-noise ratio during sensing operations by the sensor by overcoming an external noise source.

PIEZOELECTRIC LAMINATE, PRODUCTION METHOD FOR PIEZOELECTRIC LAMINATE, AND PIEZOELECTRIC ELEMENT

There is provided a piezoelectric stack, including: a substrate; an output-side bottom electrode film on the substrate; an output-side piezoelectric film, being an oxide film, on the output-side bottom electrode film; an output-side top electrode film on the output-side piezoelectric film; an input-side bottom electrode film on the substrate; an input-side piezoelectric film, being a nitride film, on the input-side bottom electrode film; an input-side top electrode film on the input-side piezoelectric film; and an ultrasonic output part and ultrasonic input part placed in such a manner as not overlapping each other when viewed from a top surface of the substrate, the ultrasonic output part comprising a stacked part of the output-side bottom electrode film, the output-side piezoelectric film, and the output-side top electrode film, the ultrasonic input part comprising a stacked part of the input-side bottom electrode film, the input-side piezoelectric film, and the input-side top electrode film.