The invention provides equipment for manufacturing a torque sensor shaft by forming a magnetostrictive region including a metallic glass coating in a predetermined pattern on a side face of a shaft-shaped workpiece. The shaft-shaped workpiece is rotatably attached on a conveying pallet. The conveying pallet is successively conveyed to each of work devices including a preheating device for the shaft-shaped workpiece, a thermal spraying device for forming a metallic glass coating on a side face of the shaft-shaped workpiece, a masking device configured to provide a covering corresponding to the pattern on the coating, and a shot blasting device configured to provide shot blasting directed toward the metallic glass coating including the covering. Preheating, thermal spraying, masking, and shot blasting are performed respectively on the shaft-shaped workpiece while rotating the shaft-shaped workpiece on the conveying pallet at each of the work devices. Therefore, the favorable manufacturing equipment can be provided.

Provided is a composition having magnetostrictive properties, which contains a component (P): a compound having a polymerizable group, a component (M): a powdery magnetostrictive material, and a component (R): a radical polymerization initiator.

Methods of etching metal by depositing a material reactive with a metal to be etched and a halogen to form a volatile species and exposing the substrate to a halogen-containing gas and activation gas to etch the substrate are provided. Deposited materials may include silicon, germanium, titanium, carbon, tin, and combinations thereof. Methods are suitable for fabricating MRAM structures and may involve integrating ALD and ALE processes without breaking vacuum.

The magnetostrictive member contains an iron-based alloy crystal having magnetostrictive characteristics and is a plate-like body having front and back faces. In one of the front and back faces, a thickness and a surface roughness Ra of the magnetostrictive member satisfy Expression (1): log Ra?0.48t?0.62. In Expression (1), log indicates a common logarithm, Ra the surface roughness (?m), and t the thickness of the magnetostrictive member (mm).

The magnetostrictive member contains an iron-based alloy crystal having magnetostrictive characteristics and is a plate-like body having front and back faces. In one of the front and back faces, a thickness and a surface roughness Ra of the magnetostrictive member satisfy Expression (1): log Ra?0.48t?0.62. In Expression (1), log indicates a common logarithm, Ra the surface roughness (?m), and t the thickness of the magnetostrictive member (mm).

A method for producing a magnetostrictive material producible without using a mold, a magnetostrictive material, and a method for producing an energy conversion member; the first method includes melting raw material powder for the magnetostrictive material by a laser or electron beam using a metal 3D additive manufacturing machine to perform additive manufacturing. The raw material powder is composed of an FeCo alloy. A method for producing an energy conversion member includes laminating and joining one of a magnetostrictive layer formed by melting raw material powder for a magnetostrictive material by a directed energy deposition method to perform additive manufacturing and a soft magnetic material layer formed by melting raw material powder for a soft magnetic material by the directed energy deposition method to perform additive manufacturing on another.

A method for producing a magnetostrictive material producible without using a mold, a magnetostrictive material, and a method for producing an energy conversion member; the first method includes melting raw material powder for the magnetostrictive material by a laser or electron beam using a metal 3D additive manufacturing machine to perform additive manufacturing. The raw material powder is composed of an FeCo alloy. A method for producing an energy conversion member includes laminating and joining one of a magnetostrictive layer formed by melting raw material powder for a magnetostrictive material by a directed energy deposition method to perform additive manufacturing and a soft magnetic material layer formed by melting raw material powder for a soft magnetic material by the directed energy deposition method to perform additive manufacturing on another.

Embodiments of a magnetic field sensor of the present disclosure includes magnetoelectric nanowires suspended above a substrate across electrodes without substrate clamping. This results in enhanced magnetoelectric coupling by reducing substrate clamping when compared to layered thin-film architectures. Accordingly, the magnetoelectric nanowires of the magnetic field sensor generate a voltage response in the presence of a magnetic field.

A power generation element uses an inverse magnetostrictive effect and includes: a frame yoke made of a magnetic material and having a bent part for forming a closed magnetic circuit, a magnetic part formed in a part of the frame yoke, a magnetostrictive plate made of a magnetostrictive material, a coil, and magnets. The magnetic part has rigidity and geometry for applying a uniform compressive force or tensile force to the magnetostrictive plate and is magnetically saturated by magnetic biases of the magnets. The magnetostrictive plate is attached to the frame yoke so as to be parallel to the magnetic part. The coil is wound around a parallel beam part including the magnetostrictive plate and the magnetic part and/or around the frame yoke. An application of an external force causes the magnetostrictive plate to be extended and compressed and causes the generation of electricity.

A magneto-electric converter capable of converting a variation in magnetic field into a potential difference between two electrical terminals includes a support layer comprising two electrical terminals; a stack disposed on the support layer of a first layer made from a magnetostrictive material defining the reference plane and of a second layer made from a piezoelectric material having a polarization axis in the plane defined by the second layer, parallel to the reference plane; the second layer comprising electrodes; and a means for electrical connection of the electrodes to the electrical terminals.