A method for manufacturing a semiconductor device includes forming a first pattern structure having a first opening on a lower structure comprising a semiconductor substrate. The first pattern structure includes a stacked pattern and a first spacer layer covering at least a side surface of the stacked pattern. A first flowable material layer including a SiOCH material is formed on the first spacer layer to fill the first opening and cover an upper portion of the first pattern structure. A first curing process including supplying a gaseous ammonia catalyst into the first flowable material layer is performed on the first flowable material layer to form a first cured material layer that includes water. A second curing process is performed on the first cured material layer to form a first low-k dielectric material layer. The first low-k dielectric material layer is planarized to form a planarized first low-k dielectric material layer.

A memory device may be provided, including a substrate; one or more bottom electrodes arranged over the substrate; one or more switching layers arranged over the one or more bottom electrodes; and a plurality of top electrodes arranged over the one or more switching layers. Each of the one or more bottom electrodes may include at least one corner tip facing the switching layer, and an angle of each of the at least one corner tip may be less than ninety degrees.

A memristive device is described. The memristive device includes a first layer having a first plurality of conductive lines, a second layer having a second plurality of conductive lines, and memristive interlayer connectors. The first and second layers differ. The first and second pluralities of conductive lines are each lithographically defined. The first and second pluralities of conductive lines are insulated from each other. The memristive interlayer connectors are memristively coupled with a first portion of the first plurality of conductive lines and memristively coupled with a second portion of the second plurality of conductive lines. The memristive interlayer connectors are thus sparsely coupled with the first and second pluralities of conductive lines. Each memristive interlayer connector includes a conductive portion and a memristive portion. The memristive portion is between the conductive portion and corresponding line(s) of the first plurality of conductive lines and/or the second plurality of conductive lines.

A memory device includes a transistor, a memory cell, and an interconnect layer. The transistor includes a bottom source/drain portion, a channel portion, and a top source/drain portion stacked from bottom to top and a gate structure surrounding the channel portion. The memory cell includes a nanowire bottom electrode, a first dielectric layer, a second dielectric layer, and a top electrode. The first dielectric layer laterally surrounds the nanowire bottom electrode. The second dielectric layer is over the nanowire bottom electrode and the first dielectric layer. The second dielectric layer is in contact with a top surface of the nanowire bottom electrode and a sidewall of the first dielectric layer. The top electrode covers the second dielectric layer. The interconnect layer is over the transistor and the memory cell to interconnect the transistor and the memory cell.

A phase change memory (PCM) structure configured for performing a gradual reset operation includes first and second electrodes and a phase change material layer disposed between the first and second electrodes. The PCM structure further includes a thermal insulation layer disposed on at least sidewalls of the first and second electrodes and phase change material layer. The thermal insulation layer is configured to provide non-uniform heating of the phase change material layer. Optionally, the thermal insulation layer may be formed as an air gap. The PCM structure may be configured having the first and second electrodes aligned in a vertical or a lateral arrangement.

A semiconductor device includes a diffusion barrier structure, a bottom electrode, a top electrode, a switching layer and a capping layer. The bottom electrode is over the diffusion barrier structure. The top electrode is over the bottom electrode. The switching layer is between the bottom electrode and the top electrode, and configured to store data. The capping layer is between the switching layer and the top electrode. The diffusion barrier structure includes a multiple-layer structure. A thermal conductivity of the diffusion barrier structure is greater than approximately 20 W/mK.

A phase-change memory device includes a bottom electrode; a stack of alternating electrical conductor layers directly contacting a top surface of the bottom electrode; a metal pillar directly contacting a top surface of the stack; a phase change material element directly contacting a top surface of the metal pillar; and a top electrode on the phase change material element, wherein a lateral dimension of the metal pillar is smaller than that of the stack.

A method for producing a resistive memory cell from a stack of layers having a metal-oxide layer interleaved between first and second electrodes includes forming, within one from among the first and second electrodes, an interlayer material-based electrode interlayer having a selectivity to etching greater than or equal to 2:1 relative to materials of the electrodes. During an etching of the stack, overetching is performed configured to laterally consume, in a horizontal direction, the interlayer material such that the electrode interlayer has a lateral recess greater than or equal to 10 nm.

An approach to provide a semiconductor structure for an array of individual memory cells forming a crossbar array. A plurality of individual memory cells where each memory cell on a first metal layer includes a top electrode contact and a bottom electrode contact in a second metal layer. The crossbar array includes a word line above each of the individual memory cells connecting one or more adjacent top electrode contacts and a bit line above each of the individual memory cells connecting one or more of the adjacent bottom electrode contacts where each memory cell of the plurality of memory cells has a pre-formed conductive filament in a resistive switch device in each memory cell.

A resistive random access memory array includes a plurality of memory cells. Each memory cell includes a gate all around transistor and a resistor device. The resistor device includes a first electrode including a plurality of conductive nanosheets. The resistor device includes a high-K resistive element surrounds the conductive nanosheets. The resistor device includes a second electrode separated from the conductive nanosheets by the resistive element. The resistive random access memory array is used to generate physical unclonable function data.