A variable capacitor includes an enclosure having first and second conductive collars separated by an intermediate electrically insulating element. A movable capacitor plate assembly is electrically coupled to the first conductive collar, and a fixed capacitor plate assembly is electrically coupled to the second conductive collar. An actuator extends into the enclosure for advancing and retracting the movable capacitor plate assembly relative to the fixed capacitor plate assembly. A hermetically sealed volume within the enclosure contains a dielectric fluid serving as a dielectric between a capacitor plate of the movable capacitor plate assembly and a capacitor plate of the fixed capacitor plate assembly. A flexible structure is provided to contain the dielectric fluid displaced when the movable capacitor plate assembly is advanced toward the fixed capacitor plate assembly.

A variable capacitor includes an enclosure having first and second conductive collars separated by an intermediate electrically insulating element. A movable capacitor plate assembly is electrically coupled to the first conductive collar, and a fixed capacitor plate assembly is electrically coupled to the second conductive collar. An actuator extends into the enclosure for advancing and retracting the movable capacitor plate assembly relative to the fixed capacitor plate assembly. A hermetically sealed volume within the enclosure contains a dielectric fluid serving as a dielectric between a capacitor plate of the movable capacitor plate assembly and a capacitor plate of the fixed capacitor plate assembly. A flexible structure is provided to contain the dielectric fluid displaced when the movable capacitor plate assembly is advanced toward the fixed capacitor plate assembly.

A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

Provided are a flexible variable capacitor and method for preparation thereof. The flexible variable capacitor includes two highly conductive flexible electrode layers and an elastomer dielectric insulation layer disposed between the two highly conductive flexible electrode layers, wherein the highly conductive flexible electrode layers include first polymeric elastomer and carbon nanomaterial, and the elastomer dielectric insulation layer includes second polymeric elastomer and functional ceramic nanoparticles. The method for preparation of the flexible variable capacitor is as follows: first, preparing an elastomer composite film with different functions, and then pressing upper and lower electrode layers with the intermediate elastomer insulation layer together to obtain a stretchable strip-shaped plate capacitor. Different from existing technologies, the present application uses independently developed highly conductive flexible electrodes to replace traditional silver oil electrodes, which greatly reduces the cost of variable capacitor devices, and enhances the integration and operability. The prepared flexible variable capacitor has characteristics such as high dielectric constant, low dielectric loss, simple preparation process, and capacitance being sensitive to deformation.

Provided are a flexible variable capacitor and method for preparation thereof. The flexible variable capacitor includes two highly conductive flexible electrode layers and an elastomer dielectric insulation layer disposed between the two highly conductive flexible electrode layers, wherein the highly conductive flexible electrode layers include first polymeric elastomer and carbon nanomaterial, and the elastomer dielectric insulation layer includes second polymeric elastomer and functional ceramic nanoparticles. The method for preparation of the flexible variable capacitor is as follows: first, preparing an elastomer composite film with different functions, and then pressing upper and lower electrode layers with the intermediate elastomer insulation layer together to obtain a stretchable strip-shaped plate capacitor. Different from existing technologies, the present application uses independently developed highly conductive flexible electrodes to replace traditional silver oil electrodes, which greatly reduces the cost of variable capacitor devices, and enhances the integration and operability. The prepared flexible variable capacitor has characteristics such as high dielectric constant, low dielectric loss, simple preparation process, and capacitance being sensitive to deformation.

A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

A capacitive vapor sensor, sensor system, and method for determining a vapor concentration is provided. The capacitive sensor includes a first electrode and a second electrode. The first and second electrodes are configured to provide a bias voltage. The sensor further includes a cantilevered sensor electrode interdigitated between the first and second electrodes and having an adsorptive polymer attached to a surface of the cantilevered sensor electrode. The adsorptive polymer is configured to expand in response to adsorbing a vapor and cause a deflection of the cantilevered sensor electrode, the deflection causing a change in a differential capacitance of the first and second electrodes. A sensor indicates current at the cantilevered sensor electrode, and an electronic processor determines the change in the differential capacitance to determine a characteristic or concentration of the vapor.

A capacitive vapor sensor, sensor system, and method for determining a vapor concentration is provided. The capacitive sensor includes a first electrode and a second electrode. The first and second electrodes are configured to provide a bias voltage. The sensor further includes a cantilevered sensor electrode interdigitated between the first and second electrodes and having an adsorptive polymer attached to a surface of the cantilevered sensor electrode. The adsorptive polymer is configured to expand in response to adsorbing a vapor and cause a deflection of the cantilevered sensor electrode, the deflection causing a change in a differential capacitance of the first and second electrodes. A sensor indicates current at the cantilevered sensor electrode, and an electronic processor determines the change in the differential capacitance to determine a characteristic or concentration of the vapor.