A variable capacitor is disclosed. The variable capacitor includes a multi-layer ceramic capacitor member, and a capacitance varying mechanism. The multi-layer ceramic capacitor member includes one or two external electrode(s), a ceramic dielectric, and a plurality of electrode layers positioned inside the ceramic dielectric. The capacitance varying mechanism includes an electrical conductor positioned aside and approximate to the ceramic dielectric. The electrical conductor is deformable responsive to a pressure applied thereon, and an area of the electrical conductor in contact with the ceramic dielectric varies in accordance with the pressure, thus varying a capacitance value between the external electrode(s) and the electrical conductor. In general, the external electrode(s) of the multi-layer ceramic capacitor member serve(s) as fixed electrode(s) of the variable capacitor.

An apparatus for plasma processing includes a chamber, a substrate support having a lower electrode and an electrostatic chuck disposed on the lower electrode and configured to support a substrate mounted on the electrostatic chuck in the chamber, and a radio frequency power supply configured to supply a radio frequency power to generate plasma in the chamber. Further, in the apparatus, a bias power supply supplies a bias power. A first electrical path electrically connects the bias power supply and the lower electrode, and a second electrical path that is different from the first electrical path and the lower electrode is configured to supply the bias power from the lower electrode or the first electrical path to an edge ring disposed to surround an edge of the substrate. Further, an impedance adjuster provides a variable impedance to the second electrical path.

A system including first and second electric or electronic circuits galvanically isolated from each other, and a coupling device coupling the first circuit to the second circuit, the coupling device including a variable-capacitance capacitor including first and second electrodes mobile with respect to each other, separated by an insulating region, and third and fourth electrodes electrically insulated from the first and second electrodes, capable of receiving a control signal to vary, by an electrostatic, electromagnetic, or piezoelectric actuation mechanism, the relative position of the first and second electrodes, to vary the capacitance between the first and second electrodes.

A variable vacuum capacitor is described in which oil inside the main bellows (21) is pumped through the bellows and through the oil circuit (8) of a heat exchanger by a pump (15). Water passes through coolant channels (6) of the heat exchanger, from inlet (7) to outlet (7). The extendable capacitor drive shaft (14) is hollow and serves as a conduit, conveying the oil to the bottom of the (bellows 21), thereby ensuring a full circulation of the oil right through the bellows and then through the heat exchanger. Pump drive means (9) may be a gerotor hydraulic motor, coupled to a gerotor oil pump (15) via magnetic coupling (22). Pumping heat transfer fluid (oil) through the bellows allows the capacitor to operate at significantly higher currents and/or lower temperatures, and significantly extends the life of the device.

A variable vacuum capacitor is described in which oil inside the main bellows (21) is pumped through the bellows and through the oil circuit (8) of a heat exchanger by a pump (15). Water passes through coolant channels (6) of the heat exchanger, from inlet (7) to outlet (7). The extendable capacitor drive shaft (14) is hollow and serves as a conduit, conveying the oil to the bottom of the (bellows 21), thereby ensuring a full circulation of the oil right through the bellows and then through the heat exchanger. Pump drive means (9) may be a gerotor hydraulic motor, coupled to a gerotor oil pump (15) via magnetic coupling (22). Pumping heat transfer fluid (oil) through the bellows allows the capacitor to operate at significantly higher currents and/or lower temperatures, and significantly extends the life of the device.

A pressure detection element of a capacitive system includes a dielectric having two opposing surfaces including a first surface and a second surface, a conductor layer provided on the first surface of the dielectric, a conductive elastic member provided on the second surface of the dielectric, a spacer that positions the conductive elastic member at a predetermined distance from the second surface of the dielectric, and a pressing member configured to push the conductive elastic member toward the dielectric. An end surface of the pressing member that presses the conductive elastic member has a predetermined curvature, with an apex at a center of the end surface. A protrusion is provided at the apex at the center of the end surface of the pressing member.

A variable capacitor includes first and second movable capacitor plate assemblies disposed in the interior of an enclosure and include a first and second movable capacitor plates. A first fixed capacitor plate and a second fixed capacitor plate are respectively disposed proximal to the first and second movable capacitor plates. The capacitor plates may comprise variably interdigitated concentric cylindrical blades, The first movable capacitor plate and the first fixed capacitor plate may be coaxial with the second movable capacitor plate and the second fixed capacitor plate. Actuators may be provided for independently advancing and retracting the first and second movable capacitor plate assemblies with respect to the first and second fixed capacitor plate assemblies to vary the capacitance of the variable capacitor by independently adjusting an amount of interdigitization of the capacitor plates of respective capacitor plate assembly pairs.

A switched capacitive device includes a stationary portion including a plurality of first electrodes extending at least partially in a longitudinal dimension. Each first electrode has a first substantially active electrode volume. The device also includes a translatable portion including a plurality of second electrodes proximate the plurality of first electrodes. Each second electrode has a second substantially active electrode volume. The first active electrode volume is greater than the second active electrode volume. The second electrodes are translatable with respect to the first electrodes. The second electrodes extend at least partially in the longitudinal dimension. The first electrodes are configured to induce substantially linear motion of the second electrodes in the longitudinal dimension through the use of an electric field induced by at least a portion of the first electrodes.

An apparatus for plasma processing includes a chamber, a substrate support having a lower electrode and an electrostatic chuck disposed on the lower electrode and configured to support a substrate mounted on the electrostatic chuck in the chamber, and a radio frequency power supply configured to supply a radio frequency power to generate plasma in the chamber. Further, in the apparatus, a bias power supply supplies a bias power. A first electrical path electrically connects the bias power supply and the lower electrode, and a second electrical path that is different from the first electrical path and the lower electrode is configured to supply the bias power from the lower electrode or the first electrical path to an edge ring disposed to surround an edge of the substrate. Further, an impedance adjuster provides a variable impedance to the second electrical path.

Disclosed is a method for manufacturing a vacuum capacitor (1) provided with an insulating pipe (2), terminal electrodes (3, 4) that are disposed at open ends of the insulating pipe (2), and spiral electrodes (5, 6) that are connected to the terminal electrodes (3, 4). An electrode plate (7) and a spacer (8) are wound on a core member (9) to prepare a spiral electrode (5), and an electrode plate (10) and a spacer (8) are wound on a core member (11) to prepare a spiral electrode (6). A linear brazing material (12) is disposed in a groove (3c) formed in a surface of the terminal electrode (3) on an inner side of the insulating pipe (2). A platy brazing material (13) is sandwiched between the terminal electrode (3) and the spiral electrode (5) to fix the spiral electrode (5) to the terminal electrode (3). The insulating pipe (2) and the spiral electrode (6) are placed on the terminal electrode (4), and the terminal electrode (3) is disposed on the insulating pipe (2), thereby temporarily assembling the vacuum capacitor (1). The vacuum capacitor (1) is put into a vacuum heating furnace, and the terminal electrode (3) and the spiral electrode (5), the terminal electrode (4) and the spiral electrode (6), and the insulating pipe (2) and the terminal electrodes (3, 4) are respectively brazed.