The present invention generally relates to a MEMS DVC having a shielding electrode structure between the RF electrode and one or more other electrodes that cause a plate to move. The shielding electrode structure may be grounded and, in essence, block or shield the RF electrode from the one or more electrodes that cause the plate to move. By shielding the RF electrode, coupling of the RF electrode to the one or more electrodes that cause the plate to move is reduced and capacitance modulation is reduced or even eliminated.

The present invention generally relates to a MEMS DVC having a shielding electrode structure between the RF electrode and one or more other electrodes that cause a plate to move. The shielding electrode structure may be grounded and, in essence, block or shield the RF electrode from the one or more electrodes that cause the plate to move. By shielding the RF electrode, coupling of the RF electrode to the one or more electrodes that cause the plate to move is reduced and capacitance modulation is reduced or even eliminated.

The present invention relates to an electrode unit (10, 20) for an electric vacuum capacitor comprising a band-shaped capacitor plate (11, 21) with a height H, wherein the band-shaped capacitor plate (11, 21) is wound in a spiral with a maximum diameter D.sub.max and a constant distance between successive turns, wherein the band-shaped capacitor plate (11, 21) comprises a first longitudinal edge (11a, 21a) attached to a supporting part (12) and a second longitudinal edge (11b, 21b), the second longitudinal edge (11b, 21b) being free, wherein at the outer extremity of the spiral, the first longitudinal edge (11a, 21a) and the second longitudinal edge (11b, 21b) are connected by an inclined edge (11c, 21c) such that the first longitudinal edge (11a, 21a) is longer than the second longitudinal edge (11b, 21b), wherein the inclined edge (11c, 21c) forms with the longitudinal axis (B) of the band-shaped capacitor plate (11, 21) an angle ? less than or equal to an angle ?.sub.max=(45?.Math.?/180?). The invention relates also to a vacuum capacitor (30) comprising at least one electrode unit (10, 20) according to the present invention.

The present invention relates to an electrode unit (10, 20) for an electric vacuum capacitor comprising a band-shaped capacitor plate (11, 21) with a height H, wherein the band-shaped capacitor plate (11, 21) is wound in a spiral with a maximum diameter D.sub.max and a constant distance between successive turns, wherein the band-shaped capacitor plate (11, 21) comprises a first longitudinal edge (11a, 21a) attached to a supporting part (12) and a second longitudinal edge (11b, 21b), the second longitudinal edge (11b, 21b) being free, wherein at the outer extremity of the spiral, the first longitudinal edge (11a, 21a) and the second longitudinal edge (11b, 21b) are connected by an inclined edge (11c, 21c) such that the first longitudinal edge (11a, 21a) is longer than the second longitudinal edge (11b, 21b), wherein the inclined edge (11c, 21c) forms with the longitudinal axis (B) of the band-shaped capacitor plate (11, 21) an angle ? less than or equal to an angle ?.sub.max=(45?.Math.?/180?). The invention relates also to a vacuum capacitor (30) comprising at least one electrode unit (10, 20) according to the present invention.

A pressure detection element of a capacitive system includes a dielectric having two opposing surfaces including a first surface and a second surface, a conductor layer provided on the first surface of the dielectric, a conductive elastic member provided on the second surface of the dielectric, a spacer that positions the conductive elastic member at a predetermined distance from the second surface of the dielectric, and a pressing member configured to push the conductive elastic member toward the dielectric. An end surface of the pressing member that presses the conductive elastic member has a predetermined curvature, with an apex at a center of the end surface. A protrusion is provided at the apex at the center of the end surface of the pressing member.

A method for assembling a force sensitive capacitor is provided. The method comprises: assembling an insulating member to a rear end of a rear-end moving part; inserting a front-end moving part and the rear-end moving part into a case from a front end and a rear end of the case, respectively, and assembling connecting portions of the front-end moving part and the rear-end moving part; assembling a compressible conductor to a front end of a conductor base; and inserting the conductor base into the case from the rear end of the case and assembling the conductor base to the case.

Disclosed is a method for manufacturing a vacuum capacitor (1) provided with an insulating pipe (2), terminal electrodes (3, 4) that are disposed at open ends of the insulating pipe (2), and spiral electrodes (5, 6) that are connected to the terminal electrodes (3, 4). An electrode plate (7) and a spacer (8) are wound on a core member (9) to prepare a spiral electrode (5), and an electrode plate (10) and a spacer (8) are wound on a core member (11) to prepare a spiral electrode (6). A linear brazing material (12) is disposed in a groove (3c) formed in a surface of the terminal electrode (3) on an inner side of the insulating pipe (2). A platy brazing material (13) is sandwiched between the terminal electrode (3) and the spiral electrode (5) to fix the spiral electrode (5) to the terminal electrode (3). The insulating pipe (2) and the spiral electrode (6) are placed on the terminal electrode (4), and the terminal electrode (3) is disposed on the insulating pipe (2), thereby temporarily assembling the vacuum capacitor (1). The vacuum capacitor (1) is put into a vacuum heating furnace, and the terminal electrode (3) and the spiral electrode (5), the terminal electrode (4) and the spiral electrode (6), and the insulating pipe (2) and the terminal electrodes (3, 4) are respectively brazed.

A pressure detection sensor according to one embodiment of the present invention includes a first electrode layer including a channel portion configured to output a sensing signal and a wiring portion connected to the channel portion, a first elastic dielectric layer disposed on the first electrode layer, a second electrode layer disposed on the first elastic dielectric layer at a position corresponding to the channel portion, a second elastic dielectric layer disposed on the second electrode layer, and a third electrode layer disposed on the second elastic dielectric layer, wherein, when a pressure is applied to the third electrode layer, capacitances of the first elastic dielectric layer and the second elastic dielectric layer are changed.

Described herein is a sensor including a sensing electrode structure and a motion-responsive structure in capacitive communication with the sensing electrode structure, the sensing electrode structure and the motion-responsive structure being separated by a first dielectric layer, the motion-responsive structure comprising a liquid metal mass within a matrix in which the liquid metal mass is movable based upon movement of the sensor, and the sensing electrode structure comprising a first electrode, and a second electrode spaced from the first electrode to form a capacitor.

A high power low frequency tuner uses motor controlled rotary capacitors submerged in low loss high epsilon dielectric fluid and lengths of semi-rigid RF cable interconnecting the floating static blocks of the capacitors, the rotating blocks being grounded. And tuner calibration and tuning methods, allowing accurate tuning and perfect Smith chart impedance coverage. The full calibration lasts several hours and is reduced by the de-embedded calibration algorithm to minutes. A maximum power embodiment comprises full immersion of capacitors and interconnecting cables in circulated dielectric liquid (mineral oil) for breakdown voltage increase and heat removal.