A position indicator includes a capacitor having a capacitance that changes in correspondence to a force applied to one end part of a housing. The capacitor is configured by a pressure detecting chip that includes a first electrode and a second electrode disposed opposite to the first electrode with a predetermined distance defined therebetween to have capacitance Cv formed between the first electrode and the second electrode. The capacitance Cv changes when the force applied to the one end part of the housing is transmitted to the first electrode to thereby change a relationship (e.g., the distance) between the two electrodes. A pressure transmitting member having predetermined elasticity is disposed on the first electrode such that the force applied to the one end part of the housing is transmitted to the first electrode of the semiconductor element via the pressure transmitting member.

A position indicator includes a capacitor having a capacitance that changes in correspondence to a force applied to one end part of a housing. The capacitor is configured by a pressure detecting chip that includes a first electrode and a second electrode disposed opposite to the first electrode with a predetermined distance defined therebetween to have capacitance Cv formed between the first electrode and the second electrode. The capacitance Cv changes when the force applied to the one end part of the housing is transmitted to the first electrode to thereby change a relationship (e.g., the distance) between the two electrodes. A pressure transmitting member having predetermined elasticity is disposed on the first electrode such that the force applied to the one end part of the housing is transmitted to the first electrode of the semiconductor element via the pressure transmitting member.

A ring electrode to determine the orientation of the stylus relative to the surface. The stylus can include a ring electrode configuration which can improve capacitive coupling between the ring electrode and the touch panel. The ring electrode configuration can include a ring electrode and ground ring, and ground plate. By varying the lengths of ring electrode, ground ring, ground plate, and the distance between these elements, the electric field emanating from the ring electrode can be tuned to optimize the capacitive coupling between the ring electrode and surface. In some examples, the ring electrode can include multiple sub-rings. In some examples, the ring electrode can comprise a crown shape including projections, each having a width that tapers to a minimum width along the length of the ring electrode.

A MEMS structure that provides an improved way to selectively control electromechanical properties of a MEMS device with an applied voltage. The MEMS structure includes a capacitor element that comprises at least one stator element, and at least one rotor element suspended for motion parallel to a first direction in relation to the stator element. The stator element and the rotor element form at least one capacitor element, the capacitance of which varies according to displacement of the rotor element from an initial position. The stator element and the rotor element are mutually oriented such that in at least one range of displacements of the rotor element from an initial position, the second derivative of the capacitance with respect to the displacement has negative values.

A MEMS structure that provides an improved way to selectively control electromechanical properties of a MEMS device with an applied voltage. The MEMS structure includes a capacitor element that comprises at least one stator element, and at least one rotor element suspended for motion parallel to a first direction in relation to the stator element. The stator element and the rotor element form at least one capacitor element, the capacitance of which varies according to displacement of the rotor element from an initial position. The stator element and the rotor element are mutually oriented such that in at least one range of displacements of the rotor element from an initial position, the second derivative of the capacitance with respect to the displacement has negative values.

A capacitance value fast-placing vacuum capacitor includes: a housing, a first electrode group and a second electrode group. A vacuum chamber is provided in the housing. The first electrode group and the second electrode group are mutually coupled and accommodated in the vacuum chamber. An electromagnetic drive mechanism is mounted on the outer side of one end of the housing. The electromagnetic drive mechanism is capable of driving the first electrode group to shift relative to the second electrode group, the vacuum capacitor is switched between two capacitance value states. In the capacitance value rapid-switching vacuum capacitor, the electromagnetic drive mechanism is configured for rapidly adjusting and switching capacitance values of the vacuum capacitor, the capacitance value switching time of the vacuum capacitor is within one hundred milliseconds, thus meeting the requirement of an application device of the vacuum capacitor for rapid matching of an impedance matcher.

A vacuum variable capacitor includes a vacuum sealed enclosure to contain a vacuum dielectric medium, wherein the enclosure includes a first plate and a second plate, the first plate and the second plate being separated by an electrically insulating element, a fixed electrode attached inside the enclosure to the first plate and a movable electrode attached to a movable plate, wherein the movable plate is attached inside the enclosure to the second plate by at least one vacuum bellows, wherein the vacuum capacitor includes a mechanical drive system for displacing, in particular translating, the movable plate relative to the first plate so as to vary the capacitance of the vacuum capacitor, wherein the mechanical drive system includes a ball screw arranged to drive the movable plate and wherein the mechanical drive system includes outside of the vacuum sealed enclosure a limiting element limiting the maximum distance between the first plate and the movable plate and wherein the drive system includes a nut attached to the ball screw, wherein the nut includes a first shoulder configured to abut against the limiting element to limit the maximum distance between the first plate and the movable plate.

A vacuum variable capacitor includes a vacuum sealed enclosure to contain a vacuum dielectric medium, wherein the enclosure includes a first plate and a second plate, the first plate and the second plate being separated by an electrically insulating element, a fixed electrode attached inside the enclosure to the first plate and a movable electrode attached to a movable plate, wherein the movable plate is attached inside the enclosure to the second plate by at least one vacuum bellows, wherein the vacuum capacitor includes a mechanical drive system for displacing, in particular translating, the movable plate relative to the first plate so as to vary the capacitance of the vacuum capacitor, wherein the mechanical drive system includes a ball screw arranged to drive the movable plate and wherein the mechanical drive system includes outside of the vacuum sealed enclosure a limiting element limiting the maximum distance between the first plate and the movable plate and wherein the drive system includes a nut attached to the ball screw, wherein the nut includes a first shoulder configured to abut against the limiting element to limit the maximum distance between the first plate and the movable plate.

A vacuum variable capacitor includes a pre-vacuum enclosure for reducing a pressure differential across the bellows. The vacuum force load on the drive system can thereby be reduced, allowing faster movement of the movable electrode, faster capacitance adjustment of the vacuum variable capacitor and longer lifetimes of the device.

A position indicator includes a capacitor having a capacitance that changes in correspondence to a force applied to one end part of a housing. The capacitor is configured by a pressure detecting chip that includes a first electrode and a second electrode disposed opposite to the first electrode with a predetermined distance defined therebetween to have capacitance Cv formed between the first electrode and the second electrode. The capacitance Cv changes when the force applied to the one end part of the housing is transmitted to the first electrode to thereby change a relationship (e.g., the distance) between the two electrodes. A pressure transmitting member having predetermined elasticity is disposed on the first electrode such that the force applied to the one end part of the housing is transmitted to the first electrode of the semiconductor element via the pressure transmitting member.