Micro-electromagnetically actuated latched miniature relay switches formed from laminate layers comprising a spring and magnet, electromagnetic coils, magnetic latching material, and transmission line with contacts. Preferably the miniature relay switches transmit up to about 50 W of DC or AC line power, and carry up to about 10 A of load current, with an overall volume of less than about 100 mm.sup.3. In addition to switching large power, the device preferably requires less than 3 V to actuate, and has a latching feature that retains the switch state after actuation without the need for external applied voltage or current.

Frequency addressable micro-actuators having one or more movable resonating elements actuators, such as cantilevers, can be forced into oscillation by, e.g., electromagnetic actuation. The movable structure is designed to latch at a certain amplitude using one of several latching techniques, such as a near-field magnetic field. In operation, the movable element is driven into resonance, producing a large amplitude, which results in the structure latching. Through resonance, a small force applied in a repeating manner can result in the latching of the actuator, an operation which would normally require a large force. If two or more units, each with different harmonic frequencies, are placed under the same influence, only the one with a harmonic response to the driving force will latch. A single influencing signal may be used to latch more than one device on demand by tuning the frequency to match the natural frequency of the device of interest.

Micro-electromagnetically actuated latched miniature relay switches formed from laminate layers comprising a spring and magnet, electromagnetic coils, magnetic latching material, and transmission line with contacts. Preferably the miniature relay switches transmit up to about 50 W of DC or AC line power, and carry up to about 10 A of load current, with an overall volume of less than about 100 mm.sup.3. In addition to switching large power, the device preferably requires less than 3 V to actuate, and has a latching feature that retains the switch state after actuation without the need for external applied voltage or current.

The disclosure provides a micro-electromechanical system switch and a communication device. The micro-electromechanical system switch includes: a substrate; a DC bias line, arranged on one side of the substrate; a first signal transmission line and a second signal transmission line, arranged on the same side of the substrate as the DC bias line; a cantilever beam, arranged on a side, away from the substrate, of a layer on which the first signal transmission line is located; and a fixing structure, arranged on the side, away from the substrate, of the layer on which the first signal transmission line is located and not in contact with the first signal transmission line, where the fixing structure connects the free end and the substrate.