MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.

There is provided a wire for a reed switch used for a material of a reed piece comprised by a reed switch, the wire being composed of an iron-group alloy containing Fe and 0 mass % or more and less than 10 mass % of Ni, with a total content of the Fe and the Ni satisfying 10 mass % or more and less than 20 mass %, with a balance of Co and an impurity, the iron-group alloy having a cubic crystal structure, the wire having a Curie temperature of 900 C. or higher and a specific resistance of 15 .Math.cm or less at normal temperature, a ratio of a thermal expansion coefficient of a glass tube comprised by the reed switch to a thermal expansion coefficient of the wire for the reed switch being 90% or more, the wire having a diameter of 1 mm or less.

There is provided a wire for a reed switch used for a material of a reed piece comprised by a reed switch, the wire being composed of an iron-group alloy containing Fe and 0 mass % or more and less than 10 mass % of Ni, with a total content of the Fe and the Ni satisfying 10 mass % or more and less than 20 mass %, with a balance of Co and an impurity, the iron-group alloy having a cubic crystal structure, the wire having a Curie temperature of 900 C. or higher and a specific resistance of 15 .Math.cm or less at normal temperature, a ratio of a thermal expansion coefficient of a glass tube comprised by the reed switch to a thermal expansion coefficient of the wire for the reed switch being 90% or more, the wire having a diameter of 1 mm or less.

An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode over a first fixed electrode, forming a second cantilevered electrode with an end that overlaps the first cantilevered electrode, forming a third cantilevered electrode operable to directly contact the first cantilevered electrode upon an application of a voltage to a second fixed electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.

An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode operable to directly contact a second fixed electrode upon an application of a voltage to a first fixed electrode, forming a second cantilevered electrode with an end that overlaps the first cantilevered electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.

A heavy current reed switch contact structure comprises at least one set of elastic reed electrode (11, 12) or at least one fixed electrode (12) and an elastic reed electrode (11). The reed electrode (11, 12) is made of a conductive material. Contacts (13, 14) are arranged on opposing surfaces of mutually overlapping ends. A side of the end having the contacts is disposed with an arc discharge device (16, 162). The reed switch employs a specially designed contact structure, and the arc discharge structure device is additionally disposed on the basis of a traditional switch contact structure. As a result, the reed switch quickly transfers to the contact arc discharge structure device an instantons arc generated upon switching the switch contact, thereby easing burnout resulting from an arc on the contact surfaces of the contacts, enabling the contacts to be less prone to being adhered together, and considerably increasing a bearing current and a switching capacity of the reed switch. The heavy current reed switch contact structure has a simple structure and provides a heavy bearing current.

A heavy current reed switch contact structure comprises at least one set of elastic reed electrode (11, 12) or at least one fixed electrode (12) and an elastic reed electrode (11). The reed electrode (11, 12) is made of a conductive material. Contacts (13, 14) are arranged on opposing surfaces of mutually overlapping ends. A side of the end having the contacts is disposed with an arc discharge device (16, 162). The reed switch employs a specially designed contact structure, and the arc discharge structure device is additionally disposed on the basis of a traditional switch contact structure. As a result, the reed switch quickly transfers to the contact arc discharge structure device an instantons arc generated upon switching the switch contact, thereby easing burnout resulting from an arc on the contact surfaces of the contacts, enabling the contacts to be less prone to being adhered together, and considerably increasing a bearing current and a switching capacity of the reed switch. The heavy current reed switch contact structure has a simple structure and provides a heavy bearing current.

A manual disconnect switching device includes an external housing having a handle actuator. The manual disconnect switching device further includes a bellows actuator in communication with the handle actuator and hermetically sealed within an internal volume of the external housing. The bellows actuator includes a shaft and a biased bellows for switching the manual disconnect switching device between open and closed positions.

A manual disconnect switching device includes an external housing having a handle actuator. The manual disconnect switching device further includes a bellows actuator in communication with the handle actuator and hermetically sealed within an internal volume of the external housing. The bellows actuator includes a shaft and a biased bellows for switching the manual disconnect switching device between open and closed positions.

A MEMS device comprises an electro mechanical element in a sealed chamber containing a gas comprising a reactive gas selected to react with any contaminants that may be present or formed on the operating surfaces of the device in a manner to maximize the electrical conductivity of the surfaces during operation of the device. The MEMS device may comprise a MEMS switch having electrical contacts as the operating surfaces. The reactive gas may comprise hydrogen or an azane, optionally mixed with an inert gas, or any combination of the gases. The corresponding process provides a means to substantially reduce or eliminate contaminants present or formed on the operating surfaces of MEMS devices in a manner to maximize the electrical conductivity of the surfaces during operation of the devices.