H01H43/04

SCHEDULE PREPARATION METHOD FOR SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING DEVICE
20170160731 · 2017-06-08 ·

A method by which a schedule preparing portion included in a substrate processing apparatus, having at least one single substrate processing unit and a controller, prepares a chronological schedule for operations of the substrate processing apparatus. The method includes a schedule preparation step of preparing a schedule for each substrate by positioning, in chronological order, a plurality of blocks, each specifying an operation to be performed on the substrate. The schedule preparation step includes a high load avoidance positioning step in which, in preparing a schedule for a plurality of substrates, blocks corresponding to a high load operation in which a high control load occurs at least temporarily in the controller are positioned on a time axis so that high load time slots, during which a high control load occurs in the controller, are not concentrated.

WALL MOUNTED PROGRAMMABLE TIMER SYSTEM

A timing device is disclosed which is for controlling electronic devices and which is mounted in a wall switch box. This timing device comprises at least one controller; at least one transceiver in communication with the controller; at least one interface; and at least one cover plate. This device can also include at least one key coupled to the cover plates for interacting with the interface when said cover plate is inserted onto said at least one interface.