An x-ray window can include an adhesive layer sandwiched between and providing a hermetic seal between a thin film and a housing. The adhesive layer can include liquid crystal polymer. The liquid crystal polymer can be opaque, gas-tight, made of low atomic number elements, able to withstand high temperature, low outgassing, low leakage, able to relieve stress in the x-ray window thin film, capable of bonding to many different materials, or combinations thereof.

Disclosed is a radiation window structure. The radiation window structure including a substrate made of silicon nitride and a coating layer grown from a vapor phase on outer surface of the substrate. Also disclosed is a method for manufacturing a radiation window structure.

An electron beam irradiation device includes a vacuum chamber having an electron beam generator inside, a vacuum nozzle, and a window foil on a tip of the vacuum nozzle. The electron beam irradiation device further includes an outer pipe surrounding the vacuum nozzle, a cooling-gas supply unit that supplies cooling gas into a coolant passage formed between the vacuum nozzle and the outer pipe, and a heat-conducting transmission foil fitted to the window foil and contacting the tip of the vacuum nozzle. The heat-conducting transmission foil has a value of at least 6310.sup.3, which is determined by dividing a thermal conductivity [W/(m.Math.K)] by a density [kg/m.sup.3], and a tip part of the vacuum nozzle is made of a material having at least a thermal conductivity of copper.

An x-ray window can include a thin film that comprises boron. The thin film can be relatively thin, such as for example 200 nm. This x-ray window can be strong; can have high x-ray transmissivity; can be impervious to gas, visible light, and infrared light; can be easy of manufacture; can be made of materials with low atomic numbers, or combinations thereof. The thin film can include an aluminum layer. A support structure can provide additional support to the thin film. The support structure can include a support frame encircling an aperture and support ribs extending across the aperture with gaps between the support ribs. The support structure can also include boron ribs aligned with the support ribs.

Provided is an electron beam irradiating device capable of emitting an electron beam from an electron beam generation source surrounded by a vacuum chamber to outside of the vacuum chamber through an electron beam exit window. The electron beam exit window includes: a grid; a window foil allowing the electron beam to pass therethrough; and a frame-shaped pressing member pressing the window foil against the grid. The surface of the grid has a groove section having an annular shape. A metal gasket is pressed between the groove section and the window foil.

Provided is an electron beam irradiating device capable of emitting an electron beam from an electron beam generation source surrounded by a vacuum chamber to outside of the vacuum chamber through an electron beam exit window. The electron beam exit window includes: a grid; a window foil allowing the electron beam to pass therethrough; and a frame-shaped pressing member pressing the window foil against the grid. The surface of the grid has a groove section having an annular shape. A metal gasket is pressed between the groove section and the window foil.

A window member for separating an internal environment of an x-ray device from an environment external to the x-ray device is provided. The window member comprises a substrate and a coating layer disposed upon a surface of the substrate. The substrate is formed from a polycrystalline material and is substantially transparent to low-energy x-rays. The coating layer is non-porous, covers the crystal grains at the surface of the substrate and extends into the grain boundaries therebetween, such that the coating layer forms an impermeable barrier between the substrate and the external environment.

A window member for separating an internal environment of an x-ray device from an environment external to the x-ray device is provided. The window member comprises a substrate and a coating layer disposed upon a surface of the substrate. The substrate is formed from a polycrystalline material and is substantially transparent to low-energy x-rays. The coating layer is non-porous, covers the crystal grains at the surface of the substrate and extends into the grain boundaries therebetween, such that the coating layer forms an impermeable barrier between the substrate and the external environment.

A mounted x-ray window can be strong and transmissive to x-rays, can have a hermetic seal, and can withstand high temperatures. The mounted x-ray window can include a film located on an inner-side of a flange of a housing and can be attached to the flange by a ring of elastic adhesive. The film can comprise silicon nitride. A method of mounting an x-ray window can include placing a ring of elastic adhesive on an inner-side of a flange of a housing, placing a film on the ring of elastic adhesive, and baking the housing, the ring of elastic adhesive, and the film.

A mounted x-ray window can be strong and transmissive to x-rays, can have a hermetic seal, and can withstand high temperatures. The mounted x-ray window can include a film located on an inner-side of a flange of a housing and can be attached to the flange by a ring of elastic adhesive. The film can comprise silicon nitride. A method of mounting an x-ray window can include placing a ring of elastic adhesive on an inner-side of a flange of a housing, placing a film on the ring of elastic adhesive, and baking the housing, the ring of elastic adhesive, and the film.